OpenPLC + ARMxy Application Case: FFU Control System for Semiconductor Cleanrooms

Application Scenario

In semiconductor fabs, maintaining ultra-clean air is critical to ensuring wafer yield and equipment reliability. This case highlights how our ARMxy controller powers the FFU (Fan Filter Unit) control system in a Class 10 cleanroom.

System Configuration

• ARMxy Industrial Controller

• Y-AI Analog Input Module (for monitoring particle count and airflow)

• X-DO Digital Output Module (for controlling FFU fans)

Implementation Details

• The Y-AI module collects key environmental data: • 0.1μm particle count via RS485-to-analog converters • Air velocity via thermal anemometers (0–10V analog output)

• Based on real-time sensor input, the system dynamically adjusts the fan speed of the FFU array to maintain consistent laminar flow.

• Control logic is executed through OpenPLC, allowing transparent and flexible automation.

• Operators can remotely switch between different cleanroom levels (e.g., Class 10 to Class 100) via secure interfaces.

Key Advantages

✔️ Precision control with ±0.1% high-accuracy AI input

✔️ Supports remote environment grading adjustments

✔️ Fully compatible with cleanroom standards and semiconductor manufacturing environments