2008 tech Attitude for Precise Positioning...
- 1. TAYHWA TECH CO.,LTD TAYHWA TECH CO.,LTD. http://www.tayhwa.com.tw 『Attitude for Precise Positioning of Nano Control Co., LTD』 2008.9.22
- 2. TAYHWA TECH CO.,LTD 1. Piezo Actuators Hysteresys・Creep・Generated Force・Displacement Reduction 2. Sensor Capacitive Sensor・Strain Gauge Sensor 3. Stages Hinge Mechanisms・ＦＥＭ Analysis 4. Drive and Control Block Diagram of Positioning System 5. Products ・Precise Stages: Short Stroke, Long Stroke, Elevating Z, Highly Rigid Type, Ultra Precise Machining Use, Objective Lens Positioners ・Controller Drivers ・Technical Data Contents
- 3. TAYHWA TECH CO.,LTD Merits of Piezo Actuators A piezo actuator is a solid state actuator which induces strain by applying voltage. One Layer Thickness : 100μｍ Applied Voltage : 150V Displacement : 10μm / 10mm Length Force : 850N / 5mm × 5mm Resolution : 60nm / 1V・10mm Length Response : μsec～msec The above specification is typical data. It’s depends on a actuator size.
- 4. TAYHWA TECH CO.,LTD Characteristics of Piezo Actuators① Hysteresis The figure shows a displacement of piezo actuator. Increasing applied voltage, the displacement becomes larger. And displacement hysteresis is occurred in case of increasing and decreasing applied voltage. Hysteresis modification using sensor is necessary due to precise positioning.
- 5. TAYHWA TECH CO.,LTD Characteristics of Piezo Actuators② Creep A displacement of piezo actuator increase little by little, even if the actuator is applied constant voltage. This phenomenon is called creep, which is caused by polarization of piezo ceramics. It is necessary feed back control by using a displacement sensor to suppress the creep due to precise positining.
- 6. TAYHWA TECH CO.,LTD Characteristics of Piezo Actuators③-1 The piezo actuator is elastic construction. （Elastic coefficient≒4.4×1010N/m2) Therefore, a piezo actuator is shrinked under constant loaded and reference position of displacement goes down. But by being established the position as a renewed reference, a rated displacement can be obtained by measuring from the the renewal reference position.
- 7. TAYHWA TECH CO.,LTD Sensors Displacement sensors Sensors below are used in nano positioning. ･Capacitive Sensor : Detecting capacity change, non-contact type ･Strain Gauge Sensor : Detecting resistance change, contact type ･Linear Sensor : Detecting lattice pattern on a glass scale, LD and PD For long travel rage use (expensive） ･Laser interferometer : Using laser interference For long travel range use (expensive） A capacitive or strain sensors are installed in stages. These sensors have high resolution and high stability, and more have high cost performance on strain gage sensor. In case of using strain gage senor, positioning to several several nanometer is provided in low cost. In case of using capacitive sensor, nanometer resolution and high stability are available. Sensor signal is faint, and is required to amplify and calibrate by a displacement sensor amplifier for linearity.
- 8. TAYHWA TECH CO.,LTD Structure of Precise Stages① ■Hinge Mechanism Roughness of backlash and friction on a cross roller and a linear guide disturbs preciseness in nano positioning. Therefore hinge mechanisms are adopted for our products. For example, the stage which is consist of hinges and magnification mechanisms can be realized long travel range and precise motion characteristics even though high resolution is maintained.
- 9. TAYHWA TECH CO.,LTD Structure of Precise Stages② Analisys ■Finite Element Method A stage is consist of hinges and magnification mechanisms. These mechanisms are simulated by using FEM. Characteristics of stages travel range, internal stress and strain etc. can be analyzed using FEM. Therefore, reliable and optimized stages can be designed efficiently.
- 10. TAYHWA TECH CO.,LTD FEM Analysis of precise Stages
- 11. TAYHWA TECH CO.,LTD Block Diagram of Positioning System Servo Mode Serial/ Parallel Board （Options） Sensor Amp. Piezo Driver Sensor Input P I D Piezo Output Sensor Monitor Analog Input Error/ Imposition Signal Piezo Monitor Reset Serial/Parallel Interfaces PID Control Piezo ActuatorSensor Stage Controller Driver
- 12. TAYHWA TECH CO.,LTD Example Connection on Positioning System
- 13. MeritsMerits Nano Servo StagesNano Servo Stages ・・Travel RangeTravel Range 1515μμmm ～～ 500500μμmm ・・ResolutionResolution 1nm1nm ～～ ・・SensorsSensors Capasitive SensorCapasitive Sensor Strain Gauge SensorStrain Gauge Sensor ・・Highly Rigid and PreciseHighly Rigid and Precise Mechanisms using MonolithicMechanisms using Monolithic ConstructionsConstructions ・・Positioning in quick ResponcePositioning in quick Responce Precise Stage SeriesPrecise Stage Series High ResolutionHigh Resolution・・Large ForceLarge Force ・・Quick ResponseQuick Response Capacitive SensorCapacitive Sensor ・・Strain Gauge SensorStrain Gauge Sensor Optimized Design by MagnificationOptimized Design by Magnification and Preload Mechanismsand Preload Mechanisms
- 14. TAYHWA TECH CO.,LTD Variety of Nano Servo Stages Short Travel Range Elevating Z Axis Long Travel Range ＸＹ Axes Stage Highly Rigid Type Highly Rigid Elevating Z Axis For Ultra Precise Machines
- 15. TAYHWA TECH CO.,LTD Stroke (Open Loop) ■Stroke A displacement of piezo actuator is measured by applying voltage from 0 to an operating voltage in constant interval for five times. The difference between maximum and minimum value in the fifth displacement cycle is defined as a stroke of the actuator.
- 16. TAYHWA TECH CO.,LTD Resonant Frequency ■Resonant Frequency The impedance of piezo actuator which is installed in the stage is measured by impedance analyzer. And the frequency at minimum impedance is defined resonant frequency.
- 17. TAYHWA TECH CO.,LTD Resolution ■Resolution The stage is positioned in step which can be visible by applying a bit step voltage more than five times. And the value of the difference between maximum and minimum position divided by number of steps is defined as a resolution.
- 18. TAYHWA TECH CO.,LTD Repeatability ■Repeatabilty A stage is positioned at an optional point in one direction seven times. The half of a difference between maximum and minimum position with ± is defined as a repeatability. The repeatability is measured at the center of stage travel range ordinary and more is measured at both side of the range depending on requirement.
- 19. TAYHWA TECH CO.,LTD Response Input Signal Sensor Monitor Error （Input Signal－Sensor Signal）
- 20. TAYHWA TECH CO.,LTD 使用Stage於AFM的特點 1. Stage平整度高 2. 大幅擴充AFM掃描的行程 3. 改善使用tube scanner遲滯的影響 數字標準片
- 21. Objective Lens PositionerObjective Lens Positioner ・・StrokeStroke 1515μμmm、、100100μμmm、、200200μμmm ・・ResolutionResolution 2nm2nm ～～ ・・Easy Attachment for Microscope RevolverEasy Attachment for Microscope Revolver ・・ Movement of Focal Plane in Quick ResponseMovement of Focal Plane in Quick Response Focusing SeriesFocusing Series Revolver PositionerRevolver Positioner MeritsMerits ・・Travel Range : 100Travel Range : 100μμmm ・・Resolution : 2nmResolution : 2nm ・・Optimized Design for Motorized RevolverOptimized Design for Motorized Revolver ・・Focus Adjustment for Microscope RevolverFocus Adjustment for Microscope Revolver MeritsMerits High ResolutionHigh Resolution・・Large ForceLarge Force ・・Quick ResponseQuick Response Capacitive SensorCapacitive Sensor・・Strain Gauge SensorStrain Gauge Sensor Optimized Design for MagnificationOptimized Design for Magnification and Preload Mechanismsand Preload Mechanisms
- 22. TAYHWA TECH CO.,LTD FEM Analysis of an Objective Positioner
- 23. TAYHWA TECH CO.,LTD Installed Piezo Actuator and Sensor Fixed Part Moving Part Piezo Cable Sensor Cable Lens goes up and down. Revolver Attachment Objective Positioners
- 24. TAYHWA TECH CO.,LTD 搭配物鏡式AFM探針頭，可大幅擴充AFM掃描的深度，可應 用於較大尺寸之光電元件表面輪廓掃描 BEF 導光板 使用Z-axis actuator 於AFM的特點
- 25. ・・Travel Range : 30Travel Range : 30μμm, 80m, 80μμmm ・・Resolution : 2nmResolution : 2nm ～～ ・・ BacklashBacklash--free and Quick Responsefree and Quick Response ・・Optimized Design for positioning ofOptimized Design for positioning of Diamond bytes, Spindles and WorksDiamond bytes, Spindles and Works ・・High Rigidity, High Resonant FrequencyHigh Rigidity, High Resonant Frequency Precise Stages for Ultra PrecisePrecise Stages for Ultra Precise MachinesMachines Precise Stage SeriesPrecise Stage Series MeritsMerits ･･Large ForceLarge Force・・Quick ResponseQuick Response ･･Capacitive SensorCapacitive Sensor・・Strain Gauge SensorStrain Gauge Sensor ･･High Rigidity, Monolithic PreloadHigh Rigidity, Monolithic Preload MechanismMechanism・・Guide MechanismGuide Mechanism
- 26. TAYHWA TECH CO.,LTD Resolution：2nm バイト取付時 Characteristics of Stages for Ultra Precise Machines Attached for inclinedAttached for inclined--shaft type spindleshaft type spindle WorkSpindle A Stage for Ultra Precise MachinesA Stage for Ultra Precise Machines Diamond Byte
- 27. Precise Stage SeriesPrecise Stage Series Nano Servo ControllerNano Servo Controller Precise PositioningPrecise Positioning by using Power Amplifier withby using Power Amplifier with Low Noise and High StabilityLow Noise and High Stability MeritsMerits ・・Enough Power Capacity for DrivingEnough Power Capacity for Driving Piezo ActuatorPiezo Actuator ・・PID ControlPID Control ・・Analog and Digital InterfaceAnalog and Digital Interface ・・Controller Driver for One Axis, Multi AxesController Driver for One Axis, Multi Axes
- 28. TAYHWA TECH CO.,LTD Controller Stage Sensor Cable（2m） Piezo Cable（2m） Piezo Output Sensor Input Applied Voltage to Piezo Actuator Sensor Signal Output S Stage Stage + Controller (Closed Loop)
- 29. TAYHWA TECH CO.,LTD Driver Stage （Sensor Cable is not necessary） Piezo Cable（2m） Piezo Output Applied Voltage to Piezo Actuator Stage + Controller (Open Loop)
- 30. TAYHWA TECH CO.,LTD Function Generator PC + D/A DC Supply D/A 0～10V How to Use Analog Interface
- 31. TAYHWA TECH CO.,LTD Serial Cable (D-Sub9Pin) PC Serial（RS232C） Interface Paralell Interface Options How to Use Digital Interface
- 32. TAYHWA TECH CO.,LTD For Positioning from point to point For Continuous positioning Sin Wave Triangular Wave A point B point C point D point E point Digital control by communicating commands by PC is suitable. Analog control by applying from 0 to 10V analog input signal is suitable. Digital and Analog Interfaces
- 33. TAYHWA TECH CO.,LTD MV X100 : To move 100nm in X axis MR X30 : To move 30nm from present position in X axis MR Y-70 : To move -70nm from present position in Y axis PS? X : To read present position in X axis Example of Commands on Serial Interface
- 34. TAYHWA TECH CO.,LTD Thank You for Your Attention