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Hybrid Photonic integration @ Huawei:
     for optical transport & C2C



         Photonic integration in Si and InP:
        Overview of experience and expertise
                Roman Malendevich

                 Confidential and proprietary   02/23/13
Outline
Si integration at Luxtera

InP integration at Infinera
• OOK
• Coherent detection & advanced modulation


Summary

Potential future aspirations
• PAM for 500m
• 3D packaging for C2C




                  Confidential and           2
At @ Luxtera:
Si photonics integration




  Confidential and         3
Si optical chips and interconnect systems
                                                                     Optical Filters - DWDM
                                   Flip-chip bonded lasers



                                   10G Modulators
      4 km



                                                                          10G Rx
                                           Fiber cable                    Ge detectors, TIAs


                                                 Ceramic Package


    copper        SOI transistor    Optical “wire”       SOI transistor
                                     (waveguide)
                        poly Si

                                          WG
   Field oxide      "Active" Si           Si
   Buried Oxide (BOX)

   "Handle" Si




                            Confidential and                                       4
Design experience
Grating couplers



Designed SOI production wafer
structure
 •   Integration challenge
 •   Need best system compromise of
     performances of individual
     components
                                               “Photonics Spectra”, March 2006
       – Grating couplers (IL and
         bandwidth)
       – Waveguide loss
       – Modulators (speed and IL)
       – AWG (cross-talk and IL)
       – Manufacturability and yield




                            Confidential and                             5
General rigorous device design methodology
 Functionality
 Architectural choices
 Design inputs and outputs
  •   Input parameters interactions
 Theoretical limits
 Key trade-offs
 Design:
  •   theory
  •   modeling & simulations
  •   experimental DOEs (tape-outs)
 Design and process sensitivities
  •   corner cases, Monte-Carlo statistics
  •   manufacturability, yields
 Skewing test results
  •   Repeatability, reproducibility, accuracy, Gage R&R
 Correlations and building models



                          Confidential and                 6
Wafer level testing: Design and architecture
                              Million of multi-port devices on ea.
                              wafer
  fibers
              RF               •   6D alignment
                              Multiple input-output fibers
                               •   separated by only 127um

                   DC         Finds ea. device in seconds
                               •   not minutes
                              Initial aligning structures:
                               •   one-port reflecting Littrow gratings
                              Capacitor Z-axis spacing sensor
                               •   tight 5um air gap across 8” wafer
                              Operator-free 24/7
                              Still in production (10 years)
                               •   9 patents



           8” Si wafer             “Photonics Spectra”, March 2006


                Confidential and                             7
At @ Infinera:
InP photonics integration




   Confidential and         8
10ch. x 10G OOK Tx and Rx PICs




Optics and Photonics News (2009)             CS MANTECH Conference (2006)




                          Confidential and                         9
10ch. x 10G OOK Transmitter module

                                                                                        200G spacing

                                                                           0




                                                  Normalized Power (dB)
                                                                          -10


                                                                          -20


                                                                          -30


                                                                          -40


                                                                          -50


                                         Tx PIC                           -60


                                                                                1.525    1.530    1.535      1.540    1.545
                                                                                                 Wavelength (µm)




Fiber Systems, Lightwave Europe (2006)




                                                                                                   OPN (2009)




                             Confidential and                                                                        10
Advanced modulation formats




      Confidential and        11
Pol-Mux DQPSK Reference Tx box: Performance
 HW development and integration
                                                           Amplitude
     •   Ref Tx to Ref Rx: test data shown
     •   OSNR-loaded long-term (24/7) stability <0.1dB Q

                            Phase

             90o             0o

TE

            180o             270o




TM




                               Confidential and               12
Reference Tx for PM-DQPSK and coherent QPSK
                              (typical HW configuration)




                Confidential and                   13
Typical test set for BER test (simplified)




  OFC 2011 (OML7)




                    Confidential and     14
Non-coherent DQPSK Rx
  Passive PIC: uses 1-bit delay
  Pros:
   •   No LO frequency mismatch || Pol. demux done by MIMO analog control
   •   No need for coherent DSP ASIC || Saves 1-2 yrs development time || Saves power
  Cons:
   •   Reduced Rx power sensitivity
   •   TE/TM paths must be bit aligned – need integrated PBS and pol. rotator → High losses in InP
   •   MIMO circuits’ zero offsets complicate pol. tracking || Reduced Q performance




                                                                                            MIMO ASIC




                          1-bit delay


OFC 2011 (OML7)
                                 Confidential and                                                15
Coherent Rx
 Active Rx PIC: uses DFB LO
 Pros:
   •   Pol. tracking done by DSP ASIC digitally
   •   DSP compensates for PMD, CD
   •   PBS can be external
   •   Better Rx power sensitivity
 Cons:
   •   Requires development time of complex, power-hungry DSP
   •   Tx DFB and LO DFB must have limited linewidth, phase noise




“10-channel, 28 Gbaud PM-QPSK, monolithic InP Terabit Superchannel Receiver PIC”
       M. Kato, R. Malendevich, D. Lambert et al., 2011 IEEE Photonics invited, & OFC 2011, invited


                                     Confidential and                                                 16
1 Tb/s Tx PIC
                                                                       Each PIC:
                                                                        >400 integrated functions




                                                                        Each λ:




“Terabit Superchannel Coherent InP PM-QPSK Transmitter PIC”
       P. Evans, M. Fisher, R. Malendevich et al., Opt. Express 19 2011 & OFC 2011 (post-deadline)


                                    Confidential and                                                 17
InP DQPSK modulator




“Terabit Superchannel Coherent InP PM-QPSK Transmitter PIC”
       P. Evans, M. Fisher, R. Malendevich et al., Opt. Express 19 2011 & OFC 2011 (post-deadline)


                                        Confidential and                                             18
Tx DFB Frequency Noise Power Spectral Density (PSD)
       Fundamental problem: phase noise   σ = 2π ⋅ LW ⋅ ∆t




                                      Linewidth < 1MHz
                                      Linewidth < 1MHz




Ref. on slide 18


                            Confidential and                 19
First live network coherent PIC demo (2010)




                 Confidential and             20
et al.




Linear Tx driver



                                      From coherent DSP




                   Confidential and                            21
*
                                                                                                et al.




* O. Gerstel (VZ) et al, “Elastic Optical Networking: A New Dawn for the Optical Layer?”, IEEE Comm. Magazine, 2012


                                 Confidential and                                                    22
Gridless super-channel transmission




Same ref. as on slide 23
                           Confidential and   23
“Elastic optical network”
                              (spectrum defragmentation)




 Same ref. as on slide 23


                            Confidential and               24
Potential future aspirations




      Confidential and         25
PAM for 500m




Ref.: IEEE 100G taskforce


                            Confidential and   26
3D Packaging for C2C




Ref.: Computer Systems Based on Silicon Photonic Interconnects,
      Sun, IEEE Proceedings (2009)       Confidential and         27
Summary

The field of photonics integration is blossoming

 •   With applications in long-haul, metro, local, FTTH and datacenter
     networks, as well as C2C and MCM communication
      – Even in your living room!


 •   A number of start-ups (Aurrion, Skorpio Technologies, Luxtera) and
     giants (Intel, Huawei, Cisco/Lightwire, Oracle/Sun, IBM, Finisar,
     Samsung) intensifying the field

 •   The future of photonic integration looks as promising as ever

 •   I have personally worked on OOK and coherent PICs, modules and
     systems, integrated both in Si and InP
       – From concept to real world, customer demos and production




                       Confidential and                              28
Addendums




Confidential and   29
Academics
CREOL (Center for Research and Education in Optics &
Lasers) Univ. of Central Florida




Kiev National University
 •   1st runner-up National Physics Olympics




                                Confidential and       30

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Candidate experience overview (2013)

  • 1. Hybrid Photonic integration @ Huawei: for optical transport & C2C Photonic integration in Si and InP: Overview of experience and expertise Roman Malendevich Confidential and proprietary 02/23/13
  • 2. Outline Si integration at Luxtera InP integration at Infinera • OOK • Coherent detection & advanced modulation Summary Potential future aspirations • PAM for 500m • 3D packaging for C2C Confidential and 2
  • 3. At @ Luxtera: Si photonics integration Confidential and 3
  • 4. Si optical chips and interconnect systems Optical Filters - DWDM Flip-chip bonded lasers 10G Modulators 4 km 10G Rx Fiber cable Ge detectors, TIAs Ceramic Package copper SOI transistor Optical “wire” SOI transistor (waveguide) poly Si WG Field oxide "Active" Si Si Buried Oxide (BOX) "Handle" Si Confidential and 4
  • 5. Design experience Grating couplers Designed SOI production wafer structure • Integration challenge • Need best system compromise of performances of individual components “Photonics Spectra”, March 2006 – Grating couplers (IL and bandwidth) – Waveguide loss – Modulators (speed and IL) – AWG (cross-talk and IL) – Manufacturability and yield Confidential and 5
  • 6. General rigorous device design methodology Functionality Architectural choices Design inputs and outputs • Input parameters interactions Theoretical limits Key trade-offs Design: • theory • modeling & simulations • experimental DOEs (tape-outs) Design and process sensitivities • corner cases, Monte-Carlo statistics • manufacturability, yields Skewing test results • Repeatability, reproducibility, accuracy, Gage R&R Correlations and building models Confidential and 6
  • 7. Wafer level testing: Design and architecture Million of multi-port devices on ea. wafer fibers RF • 6D alignment Multiple input-output fibers • separated by only 127um DC Finds ea. device in seconds • not minutes Initial aligning structures: • one-port reflecting Littrow gratings Capacitor Z-axis spacing sensor • tight 5um air gap across 8” wafer Operator-free 24/7 Still in production (10 years) • 9 patents 8” Si wafer “Photonics Spectra”, March 2006 Confidential and 7
  • 8. At @ Infinera: InP photonics integration Confidential and 8
  • 9. 10ch. x 10G OOK Tx and Rx PICs Optics and Photonics News (2009) CS MANTECH Conference (2006) Confidential and 9
  • 10. 10ch. x 10G OOK Transmitter module 200G spacing 0 Normalized Power (dB) -10 -20 -30 -40 -50 Tx PIC -60 1.525 1.530 1.535 1.540 1.545 Wavelength (µm) Fiber Systems, Lightwave Europe (2006) OPN (2009) Confidential and 10
  • 11. Advanced modulation formats Confidential and 11
  • 12. Pol-Mux DQPSK Reference Tx box: Performance HW development and integration Amplitude • Ref Tx to Ref Rx: test data shown • OSNR-loaded long-term (24/7) stability <0.1dB Q Phase 90o 0o TE 180o 270o TM Confidential and 12
  • 13. Reference Tx for PM-DQPSK and coherent QPSK (typical HW configuration) Confidential and 13
  • 14. Typical test set for BER test (simplified) OFC 2011 (OML7) Confidential and 14
  • 15. Non-coherent DQPSK Rx Passive PIC: uses 1-bit delay Pros: • No LO frequency mismatch || Pol. demux done by MIMO analog control • No need for coherent DSP ASIC || Saves 1-2 yrs development time || Saves power Cons: • Reduced Rx power sensitivity • TE/TM paths must be bit aligned – need integrated PBS and pol. rotator → High losses in InP • MIMO circuits’ zero offsets complicate pol. tracking || Reduced Q performance MIMO ASIC 1-bit delay OFC 2011 (OML7) Confidential and 15
  • 16. Coherent Rx Active Rx PIC: uses DFB LO Pros: • Pol. tracking done by DSP ASIC digitally • DSP compensates for PMD, CD • PBS can be external • Better Rx power sensitivity Cons: • Requires development time of complex, power-hungry DSP • Tx DFB and LO DFB must have limited linewidth, phase noise “10-channel, 28 Gbaud PM-QPSK, monolithic InP Terabit Superchannel Receiver PIC” M. Kato, R. Malendevich, D. Lambert et al., 2011 IEEE Photonics invited, & OFC 2011, invited Confidential and 16
  • 17. 1 Tb/s Tx PIC Each PIC: >400 integrated functions Each λ: “Terabit Superchannel Coherent InP PM-QPSK Transmitter PIC” P. Evans, M. Fisher, R. Malendevich et al., Opt. Express 19 2011 & OFC 2011 (post-deadline) Confidential and 17
  • 18. InP DQPSK modulator “Terabit Superchannel Coherent InP PM-QPSK Transmitter PIC” P. Evans, M. Fisher, R. Malendevich et al., Opt. Express 19 2011 & OFC 2011 (post-deadline) Confidential and 18
  • 19. Tx DFB Frequency Noise Power Spectral Density (PSD) Fundamental problem: phase noise σ = 2π ⋅ LW ⋅ ∆t Linewidth < 1MHz Linewidth < 1MHz Ref. on slide 18 Confidential and 19
  • 20. First live network coherent PIC demo (2010) Confidential and 20
  • 21. et al. Linear Tx driver From coherent DSP Confidential and 21
  • 22. * et al. * O. Gerstel (VZ) et al, “Elastic Optical Networking: A New Dawn for the Optical Layer?”, IEEE Comm. Magazine, 2012 Confidential and 22
  • 23. Gridless super-channel transmission Same ref. as on slide 23 Confidential and 23
  • 24. “Elastic optical network” (spectrum defragmentation) Same ref. as on slide 23 Confidential and 24
  • 25. Potential future aspirations Confidential and 25
  • 26. PAM for 500m Ref.: IEEE 100G taskforce Confidential and 26
  • 27. 3D Packaging for C2C Ref.: Computer Systems Based on Silicon Photonic Interconnects, Sun, IEEE Proceedings (2009) Confidential and 27
  • 28. Summary The field of photonics integration is blossoming • With applications in long-haul, metro, local, FTTH and datacenter networks, as well as C2C and MCM communication – Even in your living room! • A number of start-ups (Aurrion, Skorpio Technologies, Luxtera) and giants (Intel, Huawei, Cisco/Lightwire, Oracle/Sun, IBM, Finisar, Samsung) intensifying the field • The future of photonic integration looks as promising as ever • I have personally worked on OOK and coherent PICs, modules and systems, integrated both in Si and InP – From concept to real world, customer demos and production Confidential and 28
  • 30. Academics CREOL (Center for Research and Education in Optics & Lasers) Univ. of Central Florida Kiev National University • 1st runner-up National Physics Olympics Confidential and 30