Computational Heat Transfer and Fluid Dynamics Analysis for Titanium Dioxide (TiO2) Deposition

International Research Journal of Engineering and Technology (IRJET) e-ISSN: 2395-0056
Volume: 04 Issue: 07 | July -2017 www.irjet.net p-ISSN: 2395-0072
© 2017, IRJET | Impact Factor value: 5.181 | ISO 9001:2008 Certified Journal | Page 2386
Computational Heat Transfer and Fluid Dynamics Analysis for
Titanium Dioxide (TiO2) Deposition
Rahul Kumar1, M.K. Chopra2
1P.G. Scholar, Dept. Of Mechanical Engineering, R.K.D.F Institute of Science & Technology, Bhopal, M.P., India
2Vice Principal, Dean Academic & Head, Dept. Of Mechanical Engineering,
R.K.D.F Institute of Science & Technology, Bhopal, M.P., India
---------------------------------------------------------------------***---------------------------------------------------------------------
Abstract – This paper suggests the best possible model of
Computational Fluid Dynamics to simulate the process of
deposition of Titanium Dioxide (TiO2) over a substrateformed
as a result of pyrolysisofTitaniumTetraisopropoxide(TTIP)as
a precursor and argon as carrier gas. As a result ofpyrolysis of
TTIP if the solid particles of TiO2 gets formed before
impinging the substrate then Discrete Particle Model (DPM)
has to be applied or else if the formation of TiO2 is in vapor
form and its particles are formed after impinging the
substrate where it has to be deposited then Species Transport
Model (SPM). After carrying out literature reviews it has been
found that SPM is the best model to solve the phenomena of
TiO2 formation as a result of TTIP pyrolysis and for findingthe
deposition rate thickness.
Key Words: Pyrolysis, Impinging, Titanium Dioxide,
Discrete Particle Model, Species Transport Model.
1. INTRODUCTION
Titanium Dioxide (TiO2) is of much relevance and is used
extensively for the industrial purposes due to its optical,
chemical and electrical properties. Out of all the applications
the water splitting as in the case of electrolysis can be done
using TiO2 as electrode and light as a current source thus we
call it photolysis of water [1]. This photolysis of water gives
us hydrogen gas which canbefurtherusedasenergysources
for the various applications. For the proper photolysis of
water using TiO2 as electrode the deposition of TiO2 over a
substrate should be proper. There are several processes of
TiO2 formation and deposition over a substrate but the
formation of TiO2 by the pyrolysis of the Titanium
Tetraisopropoxide(TTIP) anditsdepositiononthesubstrate
using argon as carrier gas is considered to be cost effective,
which also allows the controllingofthemicrostructure[2-7].
This process of pyrolysis can be attempted for various
ranges of temperature, pressure and concentration of
precursor. The proper combination of all these parameters
decides the deposition thickness of TiO2 over the substrate,
so one need to carry out the Computational Fluid Dynamic
(CFD) analysis in order to estimate the optimizedparameter
for achieving the required deposited thicknessofTiO2 overa
substrate.
2. LITERATURE REVIEW
Yiyang Zhang et al performed experiments and found that
Nanoporous TiO2 thin films are deposited directly onto
substrates by a one-step stagnation flame synthesis with
organometallic precursors. Intensive study related to
deposition mechanism in the stagnation-point boundary
layer was carried out by them. The radial profile of
nanoparticle deposition flux for the first time was measured
using a novel method of concentric collecting rings, which
depicted similar trend with the heat flux profile of
stagnation-point flows. Then they developed the
mathematical model of nanoparticle transport and
deposition in thestagnation-point boundarylayerforfurther
clarifying experimental results, especially the effects of
substrate temperatures and in-situ produced particle sizes.
Both thermophoresis in an inner part of boundary layer and
thermal compression/expansion of the gas phase are found
to play important roles in determining the deposition flux.
The contribution of Brownian diffusion, determined by a
thermophoreticPecletnumber,isinappreciablecomparedto
thermophoresis until particle diameter is as small as 2 nm.
The results in this work support a conclusion of size-
independence of the thermophoretic velocity, implying that
the rigid-body collision assumption of Waldmann's formula
is not accurate for small particles especially less than 10nm.
This study can be generally applied to other deposition
techniques of thin films [2].
Erik D. Tolmachoff et al proposed a new method to fabricate
nanocrystalline titania (TiO2) films of controlled crystalline
size and film thickness. The method uses the laminar,
premixed, stagnation flame approach, combining particle
synthesis and film deposition in a single step. A rotating disc
serves as a combination of substrate-holder and stagnation-
surface that stabilizes the flame. Disc rotation repetitively
passes the substrates over a thin sheet, fuel-lean ethylene–
oxygen–argon flamedoped withtitaniumtetra isopropoxide.
Convective cooling of the back side of the disc keeps the
substrate well below the flame temperature, allowing
thermophoretic forces to deposit a uniform film of particles
that are nucleated and grown via the flame stabilized just
below the surface. The particle film grows typically at ~1
μm/s. The film is made of narrowly distributed, crystalline
TiO2 several nanometers in diameter and forms with a 90%
porosity. Analysis shows that the rotation of the stagnation-

surface does not reduce the stability of a stagnation flame,
nor does it affect the fundamental chemistry of particle
nucleation and growth that occurs between the flame and
the stagnation surface [3].
Nkwenti Azong-Wara et al developed a new Thermal
Precipitator (TP) as a personal sampler for nanoparticle
exposure studies. Two parallel 20-mm-long plates with
different but uniformtemperatureswereintroducedinto the
TP with an appropriate gap distance, to achieve a uniform
temperature gradient along the lengthoftheplates.Particles
are thermophoretically deposited on the colder plate in the
TP which acts as the substrate. Analytical calculations were
carried out to determine an optimal plate gap distance and
temperature gradient in the TP.A simulation grid was
created from the resulting geometry which was used for
numerical modelling with a CFD Software. Results from the
simulations showed a uniform deposition of particles up to
the size range of about 300 nm for a temperature gradient of
15 K/mm and a 1-mm gap distance, independent of the
orientation of the TP during sampling. In contrast to the old
TP where up to 32 SEM images of its non-uniform particle
deposition had to be evaluated to obtain an average particle
size distribution, an evaluation of the uniform deposition
with the new TP is much more simplified, remarkably
reducing the time and cost of the evaluation, whileproviding
more accurate results [4].
G.S. Mcnab and A. Meisen studied that small particleslocated
in stagnant gases with temperature gradients experience a
force and consequently, move in the direction of lower
temperature. This phenomenoncalledas“thermophoresisin
gases” and has received extensive experimental and
theoretical study. No experimental evidence of
thermophoresis in liquids has thusfarbeenreportedand the
present work was therefore undertaken to determine its
existence and characteristics. In addition to the purely
scientific interest, the phenomenon was also thought to
merit investigation due to its possible engineering
significance. An example of the latter is the undesirable
deposition of particulate matters in heat exchangers [5].
Wes Burwash et al performed the experiments and found
that an axis symmetric turbulent air jet flow (with vertical
and downward orientation) laden with fluorescent solid
particles was impinged normally onto a flat surface. The
particle deposition efficiency and distribution on the flat
surface were measured experimentally using fluorometry
and imaging techniques. The fluorescent particles (5.0 µm
diameter) were dispersed by a nebulizer and injected into a
stream of compressed air, resulting in a steady flow (Q=111
L/min). A round nozzle was used to generate a jet
characterized by a Reynolds number of Re =104, based on
the nozzle diameter (D =15.0 mm) and nozzle exit velocity
(u = 10.5 m/s). Three dimensionless distances from the
nozzle’s exit to the impact surfaces, L/D = 2, 4 and 6
investigated. It was observed that although having similar
total deposition efficiencies (16.5 – 17.8 %), shorter nozzle
to surface distances (L/D = 2 and 4) show a more
pronounced ring-like radial deposition pattern around the
stagnation point when compared tothelongerdistance(L/D
= 6). Indeed, in moving through L/D = 2, 4 and 6, peak
deposition density valuesof254,347and685particles/mm2
shift through radii of 2.1D, 0.8D and 0.1D respectively. In
addition to these experiments, numerical simulation was
also performed, which showed that the particle deposition
was dominated bya turbulentdispersionmechanismforL/D
= 2, with inertial impaction becomingmoreimportantfor the
L/D = 4 and 6 cases [6].
N. Anbuchezhian et al mathematically solved the problem of
laminar fluid flow, which results from the stretching of a
vertical surface with variable streamconditionina nanofluid
due to solar energy, is investigated numerically. The model
used for the nanofluid incorporates the effects of the
Brownian motion and thermophoresis in the presence of
thermal stratification. Thesymmetrygroupsadmitted bythe
corresponding boundary value problem are obtained by
using a special form of Lie group transformations, namely
the scaling group of transformations. An exact solution is
obtained for the translational symmetriesandthenumerical
solutions are obtained for the scaling symmetry. This
solution depends on the Lewis number, the Brownian
motion parameter, the thermal stratification parameter and
the thermpphoretic parameter.Theconclusionisdrawnthat
the flow field, the temperature, and the nanoparticlevolume
fraction profiles are significantly influenced by these
parameters. Nanofluids have been shown to increase the
thermal conductivity and convective heat transfer
performance of base liquids. Nanoparticles in thebasefluids
also offer the potential in improving the radiative properties
of the liquids, leading to an increase intheefficiencyofdirect
solar collectors [7].
Jaishree Vyas etalperformedtheexperimentsandpresented
experimental results related to generation of anatase TiO2
nanoparticle film on titanium substrate using CW CO2 laser.
Parameters determining crystalline character of the films
were identified and highly crystalline anatase TiO2
nanoparticles films weregenerated.Sincemixtureofanatase
and rutile crystalline phase of TiO2 is better than pure
anatase phase for photocatalytic water splitting, CO2 laser
sintering of the films were carried out to transform some
anatase to rutile crystalline phase. Anatase to rutile
transition of TiO2 was characterized by GIXRD and Raman
spectroscopy [8].
Shalmali Tiwari et al presented the various aspects which
affect the characteristics of TiO2 particles films generated by
gas phase CO2 laser based pyrolysis technique.Effectoflaser
power and precursor concentration has been studied to
evaluate their effect on size and crystalline nature of
nanoparticles. Other important technical issue related to
reproducible TiO2 film has also been discussed [9].

Graeme M.G. Watson et al performed experiment and
validated results to further the understanding of nitrogen
oxide (NOx) formation, it is essential to testpredictionsfrom
existing NOx kinetics sub-models against reliable, well-
defined experiments over a range of fuel compositions and
combustion conditions. Such experimental validations
require a multifaceted approach whereby burning rate,
temperature and species formation are simultaneously
measured and compared to numerical predictions.Here,the
implementation of particle velocimetry, thermometry and
planar laser-induced fluorescence diagnostics is presented
for the study of NO pollutant formation in strained,
atmospheric pressure, premixed flames stabilized in a jet-
wall stagnation flow. The resulting experimental profilesare
directly compared to numerical simulations, performed
using CANTERA Accurate measurements of premixed gas
composition; gas velocity, temperature, and spread-rate
yield all necessary inlet boundary conditions. Use of a
temperature-controlled stagnation plate allows for first-
order temperature (heat loss) effects to be imposed on the
numerical simulation, rather than relying on external
temperature-corrections. The experiments provide a
sensitive test of NOx sub-models, result in multiple
validation targets which do not rely on extrapolations, and
allow for accurate specification of measurement
uncertainties when comparing experiments to simulations.
This work provides a discussion ofthediagnostic techniques
and compares experimental results for methane flames to
numerical predictions using a number of published natural
gas kinetics models and their associated sub-modelsforNOx
formation [10].
M.V. Papalexandris and P.D. Antoniadis developeda thermo-
mechanical model for flows in superposed porous and fluid
layers with interphasial heat and massexchange. Thismodel
is based on a mixture-theoretic formalism, according to
which, the fluid and the solid phases are treated as two
coexisting but open thermodynamic continua that interact
with each other. As such, each phase is endowed with its
own set of thermodynamic variables and conservation laws.
In particular, each phase is assigned with its own
temperature field, thereby allowing for thermal non-
equilibrium between the two phases. Constitutiveequations
for all dissipative and relaxation phenomena occurring in
both phases are derived by exploiting the constraints
imposed by the entropy axiom when applied to the entire
mixture. This model is valid for both compressible and
incompressible flows. Herein we also derive its low-Mach
number approximation, which is substantially simpler and,
therefore, more convenient for flows where compressibility
effects are negligible. The efficacyoftheproposedmodel and
the effect of thermal non-equilibrium between the two
phases are examined via direct numerical simulations of
natural convection in a horizontal channel consisting of a
porous layer and a superposed pure-fluid domain [11].
Adélio S. Cavadas et al carried out an experimental
investigation to characterize the flow field in a liquid
impinging jet confined by slopping plane walls and
emanating from a rectangularduct.ThefluidsareNewtonian
flowing in the laminar (Re=135 and 276) and turbulent
regimes (Re=13,750) and the two-dimensional rectangular
cell has an aspect-ratio equal to 13. The fully-developed
rectangular jet impinging the flat surface (plate) is confined
by two slopping plane walls, each onemakinganangleof 12°
relative to the plate. The presence of the impact plate is felt
upstream at y/H= -0.2 in the laminar regime andat y/H=-0.4
in the turbulent regime. The results show that the flow is
symmetric relative to the x-y and x-z center planes. Near the
plane slopping wall there is separated flow for Reynolds
numbers in excess of 208, as was observed in visualization
studies. For Re= 275 this small separated flow zone has a
normalized length, xR/H = 0.25, whereas for turbulentflow
xR/H is equal to 0.9. In the turbulent flow regime turbulence
is very high at the jet impact region due to strong fluid
deceleration, but the maximumturbulenceisobservedin the
shear layer formed between the jet along the impingingwall
and the separated flow region on the sloping wall. We also
report three-dimensional effects due to finite slendernessof
the flow geometry [12].
Ming Zhou et al performed experiments on PECVD (Plasma-
enhanced Chemical Vapor Deposition) process operating at
150 °C has been implemented to prepare micro-columnar
porous TiO2 anatasethinfilms,performingpost-annealingat
300 °C for 5 h. Optimized PECVD conditions have enabled us
to obtain homogeneous films with thicknessequal to1–2μm
± 0.2 μm. An anatase seeding interface depositedpriortothe
PECVD process has enabled us to reduce crystallizationtime
down to 1.5 h. The size of nano-crystals in prepared anatase
thin films has been estimated to be 20 nm by applying the
Scherrer equation. Besides, the band-gap energy (Eg) of
synthesized anatase thin films on quartz was found to be
3.30 eV [13].
Neyda Baguer et al studied the metal-organic (MO)chemical
vapor deposition (CVD) of titanium dioxide (TiO2) films
grown using the Titanium Tetraisopropoxide (TTIP) as
precursor and nitrogen as carrier gas by means of
Computational Fluid Dynamics Simulations. The effects of
the precursor concentration, the substratetemperature,and
the hydrolysis reaction on the deposition process are
investigated. It is found that hydrolysisofTTIPdecreases the
oneset temperatureofthegas-phasethermal decomposition,
and that the deposition rate increase with the precursor
concentration and with the decrease of the substrate
temperature. Concerning the mechanismresponsibleforthe
film growth, the model shows that at the lowest precursor
concentration becomes more important [14].
Siti Hajar Othman studied the 3-dimensional (3D)
computational fluid dynamics (CFD) simulation study of
metal organic chemical vapor deposition (MOCVD)

producing photocatalytic titanium dioxide (TiO2)
nanoparticle. It aims to provide better understanding of the
MOCVD synthesis system especially of deposition processof
TiO2 nanoparticles as well as fluid dynamics inside the
reactor. The simulated model predictstemperature,velocity,
gas streamline, mass fraction of reactants and products,
kinetic rate of reaction, and surface deposition rate profiles.
It was found that temperature distribution,flowpattern,and
thermophoretic force considerably affected the deposition
behavior of TiO2 nanoparticles. Good mixing of nitrogen
(N2) carrier gas and oxygen (O2) feed gas is important to
ensure uniform deposition and the quality of the
nanoparticles produced [15].
3. Discussion
After going through the several published literatures it is
inferred that there can be two situations:
a) TiO2 particle form immediately after the pyrolysis
process.
b) TiO2 particles form at the substrate much after pyrolysis.
In the first case (a) the particles are formedimmediately and
for its deposition on to the substrate it needs to reach the
substrate. The particle trajectory while reaching to the
substrate is governed by the following equationisasfollows:
Particle Trajectory [19]
…..…………
(1)
In the above equation (1) mp denotes the mass of the
particle formed after pyrolysis and the term denotes
the rate of the change of velocity of the particle.
The drag force is given as [16] ——
……………..
(1.1)
The gravitational force is given as ——
……………….(1.2)
In the other forces, we can consider rotational forces,
thermophoretic forces, brownian force, saffman’s lift force,
virtual mass force or user defined force as per the physical
condition, but in case of pyrolysis we consider
thermophoretic forces as other forces . This thermophoretic
force is needed to be taken into account because there is a
temperature gradient while theTiO2 particlemovesfromthe
pyrolysis centre where the temperature is very high to the
substrate where the temperature is much lower.
Fig.1 Thermophoresis [19]
In the above figure the blue plate depicts the lower
temperature, the red one shows the higher temperatureand
in between the plates particles are moving. This type of
physical phenomena can be modeled using the Discrete
Particle Model (DPM). Out of available all commercial CFD
software the popularoneANSYSFLUENTwhichcansimulate
the process only for the particle size of submicron level, in
order to simulate the process for the particle size less than
the micron order one needs to the include the Fine Particle
Module (FPM) together with the Discrete Particle Module
(DPM) [4,19,17].
In the second case (b) the processisconsideredtobehappen
in the series of reaction in a sequential manner. The
pyrolysis of TTIP for the TiO2 formation is also carried out
through the same [14]. The table X shows all the reactions
which occurs during the above said process:
Table X: Reactions occurring during the pyrolysis of TTIP
Reactions Classification Ref
1 Ti(OC3H7) TiO2 (g) + 4C3H6 + 2H2O volumetric [15]
2 Ti(OC3H7) + 2H2O TiO2 (g) + 4C3H7OH volumetric [16]
3 Ti(OC3H7) TiO2 (c) + 4C3H6 + 2H2O surface [19]
4 TiO2 (g) TiO2 (c) surface [17-18]
In order to simulate the physical process which is occurring
in the series of chemical reaction one needs to follow
SPECIES TRANSPORT MODEL (SPM). The SPM model takes
into account the order of the reaction and all reactant and
products as species.
Consider a typical chemical reaction as below –

…………………..... (2)
In the above reaction (2) A, B, C, D have to be considered as
the different species and a, b, c, d as their stoichiometric
constants. The reaction rate  (also r or R) for a chemical
reaction in a closed system under constant volume
conditions, without a build up reaction intermediates, is
defined as:
……….
(3)
For any system the full mass balances taken into account:-
………………..
(4)
Where FA0 is the amount of the substance A that comes into
the system FA is the amount of A that comes out of the
system. V is the volume of the system, r is the reaction rate.
NA is the amount of A in the system at any time. It describes
the accumulation of substance A in the system.
A rate law is used to express the relation between the rate
and these concentrations. A rate law could bedeterminedby
experimental data or may be formulated by a theoretical
study. Usually reactions have their rate laws in thefollowing
form:-
……………. (5)
Where k is the rate constant, feature of a given reaction. The
power x, y are the numbers that must be determined
experimentally. x is the order with respect to A and y is the
order with respect to B. Note that, in general, x and y are not
equal to the stoichiometric coefficients a and b. The overall
reaction of the order is (x+ y +…) Ordersareusuallyintegers.
For any of the reactions, there may be a lot of factors that
affect the rate of reaction, such as concentration,
temperature, solvent, pressure, electromagnetic radiation,
catalyst and so on. Here we pay our attention to the effect of
temperature because it is the most important factor in this
study. Rate constants are often found to depend strongly on
temperature. It is required to discuss with rate constant
together with temperature.
In most case the reaction rate goes up with temperature,but
it does not have to. Rate constants are found to have the
relation with temperature as follows:
…………………..(6)
Where the rate constant is written down as to
emphasize its dependence on temperature. R is the gas
constant (8.314J.K-1 mol-1). The activation energy , which
is the minimum amount of energy required to initiate a
chemical reaction, is in unit of energy.mol-1. is usually
expressed in kJ.mol-1 or kcal.mol-1. A is the pre-exponential
factor and it is usually found to be independent on
temperature. Besides it must have the same dimensionsand
units as k. Equation (6) is known as Arrhenius equation. It
predicts that the rate constant increases with temperature
for a positive activation energy.
Thus the rate of reaction, activation energy and pre-
exponential factor needs to be considered for each of the
reaction occurring for the process of TiO2 deposition[14, 15,
19]. The commercial available software ANSYS FLUENTalso
works in the same manner for SPM.
3. Conclusion
The TiO2 formation by the pyrolysisofTTIPoccursthrougha
series of reaction and the particle formation takes place at
the substrate [14]. So the process can be simulated using
Species Transport Model (SPM) instead of the Discrete
Particle Model (DPM).
ACKNOWLEDGEMENT
Authors would like to express sincere thanks to
Dr. Yogesh Pahariya, Director, R.K.D.F IST, Bhopal (M.P.),
India for his continuous support and encouragement during
the above study.
REFERENCES
[1] A. Fujishima and K. Honda, Nature, 238, 37 (1972).
[2] Yiyang Zhang, Shuiqing, Wen Yan, Qiang Yao;
“Nanoparticle transport and deposition in boundary
layer of stagnation-point permixed flames”; Elsevier
Powder Technology 227 (2012) 24–34.
[3] Erik D. Tolmachoff, Aamir D. Abid, Denis J. Phares,
Charle S.Campbell, Hai Wang; “Synthesis of nano-phase
TiO2 crystalline films over premixedstagnationflames”,
Elsevier Proceedings of the Combustion Institute 32
(2009) 1839–1845.
[4] Nkwenti Azong-Wara, Christof Asbach, Burkhard
Stahlmecke, Heinz Fissan, Heniz Kaminski, Sabine
Plitzko, Thomas A. J. Kuhlbusch ; “Optimisation of
thermophoretic personal sampler for nanoparticle
exposure studies”, Springer Science J Nanopart Res
(2009)11:1611–1624.
[5] G.S. Mcnab, A. Meisen ; “Thermophoresis in Liquids”
,Department of chemical engineering, The University of

British Columbia ,Vancover 8,B. C.,Canada December
29,1972
[6] Wes Burwash, Warren Finlay & Edgar Matida;
“Deposition of Particles by a Confined Impinging Jet
onto a Flat Surface at Re = 104”, Aerosol Science and
Technology, 40:147–156, 2006,ISSN:0278-6826print/
1521-7388 online.
[7] N.Anbuchezhian , K. Srinivasan, K. Chandrasekaran, R.
Kandasamy; “Thermophoresis and Brownian motion
effects on boundary layer flow of nanofluid in presence
of thermal stratification due to solar energy” , Shanghai
University and Springer-Verlag BerlinHeidelberg2012,
Appl. Math. Mech. -Engl. Ed., 33(6),765–780 (2012).
[8] Jaishree Vyas, Shalmali Tiwari, ManojKumar,Alka Ingle,
L.B. Rana, M S Bhagat, B Singh and L.M Kukreja -
“Synthesis of TiO2 nanoparticles films by CO2 laser
pyrolysis technique and effect of laser sintering on
Anatase to Rutile transformation”, 24TH DAE BRNS
National Laser Symposium (NLS-24) ISBN 978-81-
903321-6-3.
[9] Shalmali Tiwari , Jaishree Vyas, Manoj Kumar, L.B.Rana,
M S Bhagat, B Singh and L.M Kukreja - “Various aspects
of gas phase synthesis of TiO2 nanoparticlesfilmsbyCO2
laser pyrolysis technique” ,24TH DAE BRNS National
Laser Symposium (NLS-24) ISBN978-81-903321-6-3.
[10] Graeme M.G. Watson, Jeffrey D. Munzar, Jeffrey M.
Bergthorson;“Experimental diagnosticsandmodelingof
jet-wall stagnation flames for NOx sub-model
validation”, 8th US National Combustion Meeting
Organized by the Western States Section of the
Combustion Institute and hosted by the University of
Utah May 19-22, 2013,Paper # 070LT-0186.
[11] M.V. Papalexandris, P.D. Antoniadis ; “A thermo-
mechanical model for flows in superposed porous and
fluid layers with interphasial heat and mass exchange” ,
Elsevier International Journal ofHeatandMassTransfer
88 (2015) 42–54
[12] Adélio S. Cavadas, João B. L. M. Campos and Fernando T.
Pinho; “Flow Field In A Liquid Impinging JetConfinedBy
Slopping Plane Walls”, 13th Int Symp on Applications of
Laser Techniques to Fluid Mechanics Lisbon, Portugal,
26-29 June, 2006
[13] Ming Zhou, Stéphanie Roualdès , Jie Zhao,VincentAutès,
André Ayral; “Nanocrystalline TiO2 thin film prepared
by low-temperature plasma-enhanced chemical vapor
deposition for photocatalytic applications”, Elsevier
Thin Solid Films 589 (2015) 770–777.
[14] Neyda Baguer, Erik Neyts, Sake Van Gils and Annemie
Bogaerts; “Study of Atmoispheric MOCVD of TiO2 Thin
Films by Means of Computational Fluid Dynamics
Simulations”, WILEY-VCH Verlag GmbH & Co. KGaA,
Weinheim, Chemical Vap.Deposition2008,14,339-346;
DOI: 10.1002/cvde.200806708.
[15] Siti Hajar Othman, Suraya Abdul Rashid, Tinia Idaty
Mohd Ghazi, and Norhafizah Abdullah; “3D CFD
Simulations of MOCVD Synthesis System of Titanium
Dioxide Nanoparticles”, Hindawi Publishing
Corporation, Journal of Nanomaterials, Volume 2013,
Article ID 123256, 11 pages,
http://dx.doi.org/10.1155/2013/123256.
[16] Z.Nami, O. Misman, A. Erbil, G.S. May, J. Cryst. Growth
1997,171,154
[17] E. Neyts, A. Bogaerts, M. De Meyer, S. Van Gils, Surf.Coat.
Technology 2007,201, 8338
[18] A. Rathu, M. Ritala, Chem. Vap. Deposition 2002, 8,21
[19] ANSYS FLUENT, http:// www.ansys.com
[20] https://support.ansys.com/staticassets/ANSYS/staticas
sets/partner/Chimera/software-particulates-
chimera.pdf

Computational Heat Transfer and Fluid Dynamics Analysis for Titanium Dioxide (TiO2) Deposition

More Related Content

What's hot (19)

Similar to Computational Heat Transfer and Fluid Dynamics Analysis for Titanium Dioxide (TiO2) Deposition (20)

More from IRJET Journal (20)

Recently uploaded (20)

Computational Heat Transfer and Fluid Dynamics Analysis for Titanium Dioxide (TiO2) Deposition