GFFP - GORE®
Filters Introduction
7th
APAC New Associates
Integration
Redefining
Filtration
Performanc
e
W. L. Gore &
Associates
Gore’s New Membrane Technology
• For more than 25 years, Gore has
been providing the filtration media
that goes into the best-performing
PTFE filters in the world
• Gore has developed new PTFE membranes that
provide significantly enhanced performance
• This unmatched performance
and economics is only
available in GORE®
Filters
W. L. Gore &
Associates
Previous highest
flow 0.02µm PS
membrane
at 500x
Gore’s new
0.02 µm membrane
at 500x
More Small Pores = More Flow
W. L. Gore &
Associates
W. L. Gore &
Associates
W. L. Gore &
Associates
W. L. Gore &
Associates
W. L. Gore &
Associates
Benefits in Your System
Upgrade Retention
(without sacrificing flow)
Remove smaller particles
Reduce particle counts
Drop in replacement
No additional housing
Reduce Filtration
Cost
Fewer installed filters
Reduced capital expense
Lower operating dP
Decrease disposal cost
Cleaner Recirculation
Baths
• Faster bath turnovers
• Reduce particle counts
Reduce Processing Time
• Reach particle spec faster
• Fill baths quicker
0.05
10 L/min
10 L/min
Using Gore 0.05
um
10 L/min
10 L/min
0.1
0.2
45 L/min
45 L/min
Using Gore 0.2
um
18 L/min
18 L/min
0.2
Existing
Filtration
0.1
0.1
0.1
30 L/min
30 L/min 0.1
30L/min
30 L/min
Using Gore 0.1
um
W. L. Gore &
Associates
Cartridge components
W. L. Gore &
Associates
Applications
Applications
• Microelectronics
Microelectronics
– Particulate Removal from Fluids
Particulate Removal from Fluids
• Utilities
Utilities
– Water, Bulk Chemicals , Air, Nitrogen
Water, Bulk Chemicals , Air, Nitrogen
• Cleaning
Cleaning
– Acids, Bases, Solvents
Acids, Bases, Solvents
• Photolithography
Photolithography
– Photoresist, Developers, Strippers
Photoresist, Developers, Strippers
• Etchants
Etchants
– BOE, Phos, Metal Oxide, Etc
BOE, Phos, Metal Oxide, Etc
• Diffusion & Implantation
Diffusion & Implantation
– Boron, Epitaxy, Phosgene, etc
Boron, Epitaxy, Phosgene, etc
• CMP
CMP
– Slurry
Slurry
W. L. Gore &
Associates
Wafer Defects

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Filter filtration products Intro liquid and air

  • 1. GFFP - GORE® Filters Introduction 7th APAC New Associates Integration Redefining Filtration Performanc e
  • 2. W. L. Gore & Associates Gore’s New Membrane Technology • For more than 25 years, Gore has been providing the filtration media that goes into the best-performing PTFE filters in the world • Gore has developed new PTFE membranes that provide significantly enhanced performance • This unmatched performance and economics is only available in GORE® Filters
  • 3. W. L. Gore & Associates Previous highest flow 0.02µm PS membrane at 500x Gore’s new 0.02 µm membrane at 500x More Small Pores = More Flow
  • 4. W. L. Gore & Associates
  • 5. W. L. Gore & Associates
  • 6. W. L. Gore & Associates
  • 7. W. L. Gore & Associates
  • 8. W. L. Gore & Associates Benefits in Your System Upgrade Retention (without sacrificing flow) Remove smaller particles Reduce particle counts Drop in replacement No additional housing Reduce Filtration Cost Fewer installed filters Reduced capital expense Lower operating dP Decrease disposal cost Cleaner Recirculation Baths • Faster bath turnovers • Reduce particle counts Reduce Processing Time • Reach particle spec faster • Fill baths quicker 0.05 10 L/min 10 L/min Using Gore 0.05 um 10 L/min 10 L/min 0.1 0.2 45 L/min 45 L/min Using Gore 0.2 um 18 L/min 18 L/min 0.2 Existing Filtration 0.1 0.1 0.1 30 L/min 30 L/min 0.1 30L/min 30 L/min Using Gore 0.1 um
  • 9. W. L. Gore & Associates Cartridge components
  • 10. W. L. Gore & Associates Applications Applications • Microelectronics Microelectronics – Particulate Removal from Fluids Particulate Removal from Fluids • Utilities Utilities – Water, Bulk Chemicals , Air, Nitrogen Water, Bulk Chemicals , Air, Nitrogen • Cleaning Cleaning – Acids, Bases, Solvents Acids, Bases, Solvents • Photolithography Photolithography – Photoresist, Developers, Strippers Photoresist, Developers, Strippers • Etchants Etchants – BOE, Phos, Metal Oxide, Etc BOE, Phos, Metal Oxide, Etc • Diffusion & Implantation Diffusion & Implantation – Boron, Epitaxy, Phosgene, etc Boron, Epitaxy, Phosgene, etc • CMP CMP – Slurry Slurry
  • 11. W. L. Gore & Associates Wafer Defects

Editor's Notes

  • #8: The key value proposition for POU applications are; Retention Upgrade - for applications experiencing particle problems or for a new process that needs better filtration. The key here is that we can provide a 0.1 um filter with the same or better flow as a competitor 0.2, or a 0.1 vs. a 0.45, or our 0.05 um vs. a 0.1 um Higher Flow to provide faster recirc bath clean up – this is usually limited by the customer’s system and bath design. Even if all the potential flow is not realized the system will operate at a lower differential pressure, which is a benefit especially for chemical delivery systems. Reduced cost – this is mostly for large flow and multi-filter applications like Ni Plating, but chemical delivery systems may also be another area See the next slide for the other important value proposition – potential for longer filter life.
  • #11: As you have heard in the last presentation, one of the main application of Gore Microfiltration Media is for Semiconductor manufacturing. The Filtration of particles is very important here because of the very small features that are being manufactured into the wafer surface as shown in this schematic here. The linewidth between neighboring features is becoming smaller and smaller and that is why more memory can be stored on chips and why processors run faster. The linewidth can be less than 100 nm. Particles that are trapped between neighboring features as shown in this micrograph can cause a short and a defect in the wafer. Here is another picture of a particle which is trapped between two raised features leading to a defective chip. The size of these defect causing particles can be as small as 50 nm. It is very important that our filtration media filter these particles to a very low concentration.