GE4230 Micromirror Project 2
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This document describes finite element analysis (FEA) simulations performed on a micromirror design using ANSYS Workbench. Structural and modal analyses were conducted. The structural analysis determined stresses, deformation, and whether the mirror would fail at 5 degrees. The modal analysis identified six resonant frequencies and deformation shapes. The mirror was found to withstand loads but did not rotate properly due to oversupporting.
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Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 300. µm 216. µm
Length Y 60. µm 218. µm
Length Z 4.25 µm
Properties
Volume 28294 µm³ 1.0286e+005 µm³
Mass 6.5925e-011 kg 2.3966e-010 kg
Centroid X 2212.2 µm
Centroid Y 1511.6 µm
Centroid Z 10.299 µm 14.561 µm
Moment of Inertia Ip1 2.0043e-008 kg·µm² 9.4902e-007 kg·µm²
Moment of Inertia Ip2 2.6827e-007 kg·µm² 9.0172e-007 kg·µm²
Moment of Inertia Ip3 2.8824e-007 kg·µm² 1.8505e-006 kg·µm²
Statistics
Nodes 13590 13092
Elements 6602 6039
Mesh Metric None
Coordinate Systems
TABLE 11
Mirror (A4, B4) > Coordinate Systems > Coordinate System
Object Name Global Coordinate System
State Fully Defined
Definition
Type Cartesian
Ansys System Number 0.
Origin
Origin X 0. µm
Origin Y 0. µm
Origin Z 0. µm
Directional Vectors
X Axis Data [ 1. 0. 0. ]
Y Axis Data [ 0. 1. 0. ]
Z Axis Data [ 0. 0. 1. ]
Connections
TABLE 12
Mirror (A4, B4) > Connections
Object Name Connections
State Fully Defined
Auto Detection
Generate Contact
Yes
On Update
Tolerance Type Slider
Tolerance Slider 0.
Tolerance Value 1.0388 µm
Face/Face Yes](https://image.slidesharecdn.com/jrzproject2-130320103619-phpapp02/85/GE4230-Micromirror-Project-2-19-320.jpg)
GE4230 Micromirror Project 2
- 1. MICROMIRROR DESIGN USING SANDIA SUMMIT TOOLS GE 4230: Design and Fabrication of MEMS Dr. Osama Jadaan University of Wisconsin – Platteville Jon Zickermann December 12, 2011 Abstract: Structural and modal finite element analysis (FEA) simulations were ran on the micromirror created in the previous project using ANSYS Workbench. The structural simulation determined the stresses and deformation of the mirror at 10° and if the mirror will fail at 5°. The modal analysis determined six resonant frequencies and corresponding modal shapes for each frequency.
- 2. 1 TABLE OF CONTENTS Objective ....................................................................... 2 Development ...................................................................... 2 Models ........................................................... 3 Mesh .................................................................... 3 Loads .................................................................... 4 Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
- 3. 2 OBJECTIVE Although the Sandia SUMMiT V tools allowed for the creation of a MEMS device, there is no certainty how the device will behave when a load is applied. To avoid high costs in real - world testing, the 3d model generated in AutoCAD can be imported into ANSYS workbench and real-world physics can be applied. For the torsional micromirror, a structural simulation was needed to determined the stresses and deformation of the mirror at 10° and if the mirror will fail at 5°. The modal analysis was needed to determine six resonant frequencies and corresponding modal shapes and deformation at each frequency. DEVELOPMENT The first step to creating the simulation was to create a mesh for the model. Originally, the imported model contained over 100,000 nodes, which was far too many for a simulation requiring a simple load for a design that would not be used in production; t oo many nodes for model only used to demonstrate the knowledge of using ANSYS Workbench. To reduce the number of nodes, mapped face shaping and body sizing operations were applied to cut down on the number of nodes from to about 50,000. The body sizes were around 100 µm for the substrate and closer to 10 µm for more vital structures such as the supports for the spring. Since the spring was the main focus of the simulation, the spring only received mapped face meshing. The next was to fix the connections automatically generated by Workbench. By default, there were too many connections between objects that never made contact, such as the Poly0 layer to the spring. After, the contact tool was run and many connections were manually fixed since the simulation considered the connections to lack contact even if the two bodies were touching. This proved to fix problems with the simulation reporting errors with structures not initial contact. Afterwards, the loads and supports were applied. For the static stru ctural analysis, the Poly 0 layer was used as the fixed support to simplify and reduce the time to solve. The load was determined to be a 0.36117µN*µN moment. A moment was chosen since using a force resulted in the mirror bending downwards in both directions. The 0.36117µN*µN moment was determined experimentally from 3 separate moments and their deformations and the equation determined from the linear regression in excel (see appendix fig 1). For the modal analysis, the spring supports were assumed to be a fixed load due to the rigid body motion that resulted with only the substrate acting as a fixed support.
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- 11. 10 RESULTS Static Structural Results: Maximum Maximum Maximum Maximum Total Object Name Principal Stress Principal Stress 2 Principal Stress 3 Principal Stress 4 Deformation Scope Scoping Geometry Selection Method Geometry All Bodies 1 Body 2 Bodies All Bodies Results -1.5729e-003 -2.2717e-004 -1.5729e-003 -5.3634e-004 Minimum 0. µm MPa MPa MPa MPa 1.1628e-003 1.5247e-003 Maximum 6.277e-003 MPa 6.277e-003 MPa 19.164 µm MPa MPa Minimum Spring Part 6 Poly0 Occurs On Maximum Spring Part 6 Plate Occurs On Modal Results: Type Total Deformation Mode 1. 2. 3. 4. 5. Identifier Results Minimum 0. µm 1.3285e+005 1.4596e+005 2.0527e+005 2.1181e+005 2.1742e+005 Maximum µm µm µm µm µm Minimum Occurs Substrate On Maximum Occurs Plate On Information Reported 2.7379e-004 3.7744e-004 5.2514e-004 5.624e-004 9.1669e-004 Frequency MHz MHz MHz MHz MHz DISCUSSION In the static structural tests, the maximum observed stresses were only 6Pa, far below the yield of any material used in MEMS if the mirror was deformed to 10 degrees. Therefore, the mirror should not fracture at 5 degrees under normal operation. Looking at the images from the moment tests, the mirror will not be able to work since the mirror does not bend uniformly; the mirror looks like it twists rather than rotates. This is a result from oversupporting the spring to the Poly1 layer below. Originally t here was a concern about the first design’s spring sagging without any loads, however the simulation could not be run in the design phase of the first project one due to lack of experience with ANSYS Workbench. If this design was to be used in real life, the supports would have to be removed to allow the mirror to rotate. In the modal analysis, each frequency had a unique shape following one of three patterns: bending at the sides that were perpendicular to the supporting Poly1 layer structure , bending at the corners and bending both at the sides and corners. The shapes of the
- 12. 11 deformation became more extreme as the frequency increased, slowing turning from a simple deformation similar to the static force where both sides deformed in the downward direction, to a complex deformation where all corners and both sides were deformed. In addition, the resonant frequencies occurred only at extremely high frequencies, where the lowest was reported at 2.7GHz, far lower than any mechanical vibration in a typical envi ronment. This could possibly be a result from the over-engineering done on the spring’s support structure. CONCLUSION The results from Workbench conformed to the primary concern of the design - would the design be strong enough to withstand a load strong enough to bend the mirror 10 degrees? From the FEA simulation, the answer was yes. However, the design would not be practical since the mirror does not rotate – instead, it bends and twists. This would not allow the mirror to reflect the total amount of light emitted. Looking at the animations and images from the simulation from both the structural and modal modes, the mirror was over-engineered from the fear of fracture. Therefore, the design needs to be re -considered with less support, requiring more testing and redesigns before this mirror should be considered for production . APPENDIX Fig 1: Moment Calculation: Distance for 10 degree angle: Moment calculation: Torque vs Deformation Deformation Moment 12 0.23 Torque vs Deformation 15.98 0.3 0.4 19 0.36 y = 0.0185x + 0.0056 Deformation (μm) 0.35 0.3 Required Moment 0.25 19.22 0.36117 0.2 10 12 14 16 18 20 Moment (μN* μm) Fig 2: Preprocessing Data: Units
- 13. 12 TABLE 1 Unit System Metric (µm, kg, µN, s, V, mA) Degrees rad/s Celsius Angle Degrees Rotational Velocity rad/s Temperature Celsius Mirror (A4, B4) Geometry TABLE 2 Mirror (A4, B4) > Geometry Object Name Geometry State Fully Defined Definition Source J:GE423Micromirror3d63d6.sat Type ACIS Length Unit Micrometers Element Control Manual Display Style Part Color Bounding Box Length X 330. µm Length Y 252. µm Length Z 15.73 µm Properties Volume 4.0907e+005 µm³ Mass 9.5314e-010 kg Scale Factor Value 1. Statistics Bodies 20 Active Bodies 20 Nodes 63251 Elements 20598 Mesh Metric None Preferences Import Solid Bodies Yes Import Surface Bodies Yes Import Line Bodies No Parameter Processing Yes Personal Parameter Key DS CAD Attribute Transfer No Named Selection Processing No Material Properties Transfer No CAD Associativity Yes Import Coordinate Systems No Reader Save Part File No Import Using Instances Yes Do Smart Update No Attach File Via Temp File Yes Temporary Directory C:Documents and SettingsStudentApplication DataAnsysv121 Analysis Type 3-D Mixed Import Resolution None
- 14. 13 Enclosure and Symmetry Processing Yes TABLE 3 Mirror (A4, B4) > Geometry > Parts Object Name Substrate Thermal Electrical State Meshed Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes Bounding Box Length X 330. µm Length Y 252. µm Length Z 1. µm 0.63 µm 0.8 µm Properties Volume 83160 µm³ 52391 µm³ 66528 µm³ Mass 1.9376e-010 kg 1.2207e-010 kg 1.5501e-010 kg Centroid X 2212.2 µm Centroid Y 1511.1 µm Centroid Z 0.5 µm 1.315 µm 2.03 µm Moment of Inertia Ip1 1.0254e-006 kg·µm² 6.46e-007 kg·µm² 8.2032e-007 kg·µm² Moment of Inertia Ip2 1.7584e-006 kg·µm² 1.1078e-006 kg·µm² 1.4067e-006 kg·µm² Moment of Inertia Ip3 2.7838e-006 kg·µm² 1.7538e-006 kg·µm² 2.227e-006 kg·µm² Statistics Nodes 287 5888 Elements 32 800 Mesh Metric None TABLE 4 Mirror (A4, B4) > Geometry > Body Groups Object Name Part 4 Part 5 Part 6 Base State Meshed Graphics Properties Visible Yes Definition Suppressed No Assignment Silicon Anisotropic Coordinate System Default Coordinate System Bounding Box Length X 330. µm 310. µm 294. µm 310. µm Length Y 252. µm 232. µm 226. µm 232. µm Length Z 0.3 µm 3. µm 1.61 µm 3.5 µm
- 15. 14 Properties Volume 24947 µm³ 20793 µm³ 129.29 µm³ 29970 µm³ Mass 5.8127e-011 kg 4.8448e-011 kg 3.0124e-013 kg 6.9831e-011 kg Centroid X 0. µm 2335.5 µm 2212.2 µm Centroid Y 0. µm 1511.6 µm Centroid Z 0. µm 5.1149 µm 4.535 µm 6.4504 µm Moment of Inertia Ip1 0. kg·µm² 9.1465e-008 kg·µm² 2.2198e-009 kg·µm² 2.6271e-007 kg·µm² Moment of Inertia Ip2 0. kg·µm² 1.393e-008 kg·µm² 5.3446e-009 kg·µm² 1.1088e-006 kg·µm² Moment of Inertia Ip3 0. kg·µm² 1.0538e-007 kg·µm² 7.5643e-009 kg·µm² 1.3715e-006 kg·µm² Statistics Nodes 12071 5533 2784 4118 Elements 1664 2471 272 1918 Mesh Metric None TABLE 5 Mirror (A4, B4) > Geometry > Part 4 > Parts Object Name Poly0 State Meshed Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes Bounding Box Length X 330. µm Length Y 252. µm Length Z 0.3 µm Properties Volume 24947 µm³ Mass 5.8127e-011 kg Centroid X 2212.2 µm Centroid Y 1511.1 µm Centroid Z 2.58 µm Moment of Inertia Ip1 3.076e-007 kg·µm² Moment of Inertia Ip2 5.2749e-007 kg·µm² Moment of Inertia Ip3 8.3509e-007 kg·µm² Statistics Nodes 12071 Elements 1664 Mesh Metric None TABLE 6 Mirror (A4, B4) > Geometry > Part 5 > Parts
- 16. 15 Object Name Part 5 Part 6 State Fully Defined Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes Bounding Box Length X 110. µm Length Y 232. µm Length Z 3. µm Properties Volume 10397 µm³ Mass 2.4224e-011 kg Centroid X 2088.9 µm 2335.5 µm Centroid Y 1511.6 µm Centroid Z 5.1149 µm Moment of Inertia Ip1 9.1268e-008 kg·µm² 9.1465e-008 kg·µm² Moment of Inertia Ip2 1.393e-008 kg·µm² Moment of Inertia Ip3 1.0518e-007 kg·µm² 1.0538e-007 kg·µm² Statistics Nodes 2759 2774 Elements 1233 1238 Mesh Metric None TABLE 7 Mirror (A4, B4) > Geometry > Part 6 > Parts Object Name Part 7 Part 8 Part 9 Part 10 Part 11 State Fully Defined Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes
- 17. 16 Bounding Box Length X 19.859 µm 1.9998 µm 19.859 µm Length Y 1.9999 µm Length Z 1.61 µm Properties Volume 15.518 µm³ 2.5727 µm³ 15.518 µm³ Mass 3.6156e-014 kg 5.9944e-015 kg 3.6156e-014 kg Centroid X 2079.7 µm 2344.7 µm 2358.2 µm 2079.7 µm Centroid Y 1401.6 µm 1621.6 µm 1456.6 µm 1511.6 µm 1456.6 µm Centroid Z 4.535 µm Moment of Inertia Ip1 3.4886e-014 kg·µm² 4.4923e-015 kg·µm² 3.4886e-014 kg·µm² Moment of Inertia Ip2 1.3623e-012 kg·µm² 4.4934e-015 kg·µm² 1.3623e-012 kg·µm² Moment of Inertia Ip3 1.3816e-012 kg·µm² 6.3961e-015 kg·µm² 1.3816e-012 kg·µm² Statistics Nodes 324 96 324 Elements 32 8 32 Mesh Metric None TABLE 8 Mirror (A4, B4) > Geometry > Part 6 > Parts Object Name Part 12 Part 13 Part 14 Part 15 Part 16 State Fully Defined Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes Bounding Box Length X 19.859 µm 1.9998 µm 19.859 µm Length Y 1.9999 µm Length Z 1.61 µm Properties Volume 15.518 µm³ 2.5727 µm³ 15.518 µm³ Mass 3.6156e-014 kg 5.9944e-015 kg 3.6156e-014 kg Centroid X 2344.7 µm 2079.7 µm 2066.2 µm 2344.7 µm Centroid Y 1566.6 µm 1511.6 µm 1623.6 µm 1399.6 µm Centroid Z 4.535 µm Moment of Inertia Ip1 3.4886e-014 kg·µm² 4.4923e-015 kg·µm² 3.4886e-014 kg·µm² Moment of Inertia Ip2 1.3623e-012 kg·µm² 4.4929e-015 kg·µm² 1.3623e-012 kg·µm² Moment of Inertia Ip3 1.3816e-012 kg·µm² 6.3956e-015 kg·µm² 1.3816e-012 kg·µm² Statistics Nodes 324 96 324
- 18. 17 Elements 32 8 32 Mesh Metric None TABLE 9 Mirror (A4, B4) > Geometry > Base > Parts Object Name Right Left State Fully Defined Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes Bounding Box Length X 110. µm Length Y 232. µm Length Z 3.5 µm Properties Volume 14985 µm³ Mass 3.4915e-011 kg Centroid X 2088.4 µm 2336.1 µm Centroid Y 1511.6 µm Centroid Z 6.4504 µm Moment of Inertia Ip1 1.3129e-007 kg·µm² 1.3142e-007 kg·µm² Moment of Inertia Ip2 1.897e-008 kg·µm² Moment of Inertia Ip3 1.5024e-007 kg·µm² 1.5037e-007 kg·µm² Statistics Nodes 2088 2030 Elements 979 939 Mesh Metric None TABLE 10 Mirror (A4, B4) > Geometry > Parts Object Name Spring Plate State Meshed Graphics Properties Visible Yes Transparency 1 Definition Suppressed No Stiffness Behavior Flexible Brick Integration Scheme Full Coordinate System Default Coordinate System Reference Temperature By Environment
- 19. 18 Material Assignment Silicon Anisotropic Nonlinear Effects Yes Thermal Strain Effects Yes Bounding Box Length X 300. µm 216. µm Length Y 60. µm 218. µm Length Z 4.25 µm Properties Volume 28294 µm³ 1.0286e+005 µm³ Mass 6.5925e-011 kg 2.3966e-010 kg Centroid X 2212.2 µm Centroid Y 1511.6 µm Centroid Z 10.299 µm 14.561 µm Moment of Inertia Ip1 2.0043e-008 kg·µm² 9.4902e-007 kg·µm² Moment of Inertia Ip2 2.6827e-007 kg·µm² 9.0172e-007 kg·µm² Moment of Inertia Ip3 2.8824e-007 kg·µm² 1.8505e-006 kg·µm² Statistics Nodes 13590 13092 Elements 6602 6039 Mesh Metric None Coordinate Systems TABLE 11 Mirror (A4, B4) > Coordinate Systems > Coordinate System Object Name Global Coordinate System State Fully Defined Definition Type Cartesian Ansys System Number 0. Origin Origin X 0. µm Origin Y 0. µm Origin Z 0. µm Directional Vectors X Axis Data [ 1. 0. 0. ] Y Axis Data [ 0. 1. 0. ] Z Axis Data [ 0. 0. 1. ] Connections TABLE 12 Mirror (A4, B4) > Connections Object Name Connections State Fully Defined Auto Detection Generate Contact Yes On Update Tolerance Type Slider Tolerance Slider 0. Tolerance Value 1.0388 µm Face/Face Yes
- 20. 19 Face/Edge No Edge/Edge No Priority Include All Group By Bodies Search Across Bodies Revolute Joints Yes Fixed Joints Yes Transparency Enabled Yes Analysis Data Management Solver Files C:Documents and Directory SettingsStudentDesktopwbwb_filesdp0globalMECHSYSContact Tool TABLE 13 Mirror (A4, B4) > Connections > Contact Regions Bonded - Bonded - Bonded - Thermal Bonded - Part 5 Bonded - Part 5 Object Name Substrate To Electrical To To Electrical To Part 11 To Part 13 Thermal Poly0 State Fully Defined Scope Scoping Geometry Selection Method Contact 1 Face 5 Faces Target 1 Face 5 Faces Contact Substrate Thermal Electrical Part 5 Bodies Target Thermal Electrical Poly0 Part 11 Part 13 Bodies Definition Type Bonded Scope Mode Automatic Behavior Symmetric Suppressed No Advanced Formulation Pure Penalty Normal Program Controlled Stiffness Update Never Stiffness Pinball Program Controlled Region TABLE 14 Mirror (A4, B4) > Connections > Contact Regions Bonded - Part 5 Bonded - Part 6 Bonded - Part 6 Bonded - Part 6 Bonded - Part 7 Object Name To Right To Part 12 To Part 15 To Part 16 To Right State Fully Defined Scope Scoping Geometry Selection Method Contact 26 Faces 5 Faces Target 46 Faces 5 Faces
- 21. 20 Contact Part 5 Part 6 Part 7 Bodies Target Bodies Right Part 12 Part 15 Part 16 Right Definition Type Bonded Scope Mode Automatic Behavior Symmetric Suppressed No Advanced Formulation Pure Penalty Normal Program Controlled Stiffness Update Never Stiffness Pinball Program Controlled Region TABLE 15 Mirror (A4, B4) > Connections > Contact Regions Bonded - Part 8 Bonded - Part 9 Bonded - Part Bonded - Part 11 Bonded - Part Object Name To Right To Left 10 To Left To Right 12 To Left State Fully Defined Scope Scoping Geometry Selection Method Contact 5 Faces Target 5 Faces Contact Part 8 Part 9 Part 10 Part 11 Part 12 Bodies Target Bodies Right Left Right Left Definition Type Bonded Scope Mode Automatic Behavior Symmetric Suppressed No Advanced Formulation Pure Penalty Normal Program Controlled Stiffness Update Never Stiffness Pinball Program Controlled Region TABLE 16 Mirror (A4, B4) > Connections > Contact Regions Bonded - Part 13 Bonded - Part 14 Bonded - Part Bonded - Part Bonded - Right Object Name To Right To Right 15 To Left 16 To Left To Spring State Fully Defined Scope Scoping Geometry Selection Method
- 22. 21 Contact 5 Faces 1 Face Target 5 Faces 3 Faces Contact Part 13 Part 14 Part 15 Part 16 Right Bodies Target Bodies Right Left Spring Definition Type Bonded Scope Mode Automatic Behavior Symmetric Suppressed No Advanced Formulation Pure Penalty Normal Program Controlled Stiffness Update Never Stiffness Pinball Program Controlled Region TABLE 17 Mirror (A4, B4) > Connections > Contact Regions Bonded - Left Bonded - Spring Bonded - Part 5 Bonded - Part 6 Bonded - Part 7 Object Name To Spring To Plate To Poly0 To Poly0 To Part 5 State Fully Defined Scope Scoping Geometry Selection Method Contact 1 Face 7 Faces 4 Faces Target 3 Faces 1 Face 5 Faces Contact Left Spring Part 5 Part 6 Part 7 Bodies Target Bodies Spring Plate Poly0 Part 5 Definition Type Bonded Scope Mode Automatic Manual Behavior Symmetric Suppressed No Advanced Formulation Pure Penalty Normal Program Controlled Stiffness Update Never Stiffness Pinball Program Controlled Region TABLE 18 Mirror (A4, B4) > Connections > Contact Regions Bonded - Part 14 To Bonded - Part 5 To Bonded - Left To Bonded - Left To Object Name Part 5 Part 8 Multiple Part 6 State Fully Defined Scope
- 23. 22 Scoping Geometry Selection Method Contact 4 Faces 12 Faces 1 Face Target 4 Faces 12 Faces 1 Face Contact Bodies Part 14 Part 5 Left Target Bodies Part 5 Part 8 Multiple Part 6 Definition Type Bonded Scope Mode Manual Behavior Symmetric Suppressed No Advanced Formulation Pure Penalty Normal Program Controlled Stiffness Update Never Stiffness Pinball Region Program Controlled TABLE 19 Mirror (A4, B4) > Connections > Contact Tools Object Name Contact Tool State Solved Scope Scoping Method Worksheet Mirror (A4, B4) > Connections > Contact Tool Name Contact Side Bonded - Substrate To Thermal Both Bonded - Thermal To Electrical Both Bonded - Electrical To Poly0 Both Bonded - Part 5 To Part 11 Both Bonded - Part 5 To Part 13 Both Bonded - Part 5 To Right Both Bonded - Part 6 To Part 12 Both Bonded - Part 6 To Part 15 Both Bonded - Part 6 To Part 16 Both Bonded - Part 7 To Right Both Bonded - Part 8 To Right Both Bonded - Part 9 To Left Both Bonded - Part 10 To Left Both Bonded - Part 11 To Right Both Bonded - Part 12 To Left Both Bonded - Part 13 To Right Both Bonded - Part 14 To Right Both Bonded - Part 15 To Left Both Bonded - Part 16 To Left Both Bonded - Right To Spring Both Bonded - Left To Spring Both Bonded - Spring To Plate Both Bonded - Part 5 To Poly0 Both
- 24. 23 Bonded - Part 6 To Poly0 Both TABLE 20 Mirror (A4, B4) > Connections > Contact Tool > Contact Data Tables Object Name Initial Information State Solved Mirror (A4, B4) > Connections > Contact Tool > Initial Information Number Gap Geometric Geometri Resultin Real Contac Penetratio Name Type Status Contactin (µm Penetratio c Gap g Pinball Constan t Side n (µm) g ) n (µm) (µm) (µm) t Bonded - Contac Bonde Close 2.2204e- 2.2204e- Substrat 32. 0. 0. 3.7529 21. t d d 016 016 e To Thermal Bonded - Bonde Close 2.2204e- 2.2204e- Substrat Target 800. 0. 0. 0.7604 22. d d 016 016 e To Thermal Bonded - Thermal Contac Bonde Close 4.4409e- 4.4409e- 800. 0. 0. 0.76912 23. To t d d 016 016 Electrica l Bonded - Thermal Bonde Close 4.4409e- 4.4409e- Target 800. 0. 0. 0.7604 24. To d d 016 016 Electrica l Bonded - Contac Bonde Close 4.4409e- 8.8818e- Electrica 800. 0. 0. 0.76912 25. t d d 016 016 l To Poly0 Bonded - Bonde Close 1.3323e- 8.8818e- Electrica Target 1664. 0. 0. 0.49999 26. d d 015 016 l To Poly0 Bonded - Part 5 Contac Bonde Close 6.8212e- 9.0949e- 20. 0. 0. 0.31581 27. To Part t d d 013 013 11 Bonded - Part 5 Bonde Close 4.5475e- 2.2737e- Target 60. 0. 0. 0.26989 28. To Part d d 013 013 11 Bonded - Part 5 Contac Bonde Close 4.5475e- 4.5475e- 20. 0. 0. 0.31581 29. To Part t d d 013 013 13 Bonded Target Bonde Close 60. 0. 0. 4.5475e- 4.5475e- 0.26989 30.
- 25. 24 - Part 5 d d 013 013 To Part 13 Bonded Contac Bonde Close 2.2737e- - Part 5 342. 0. 0.325 0.2251 0.68128 31. t d d 013 To Right Bonded Bonde Close 2.2737e- - Part 5 Target 266. 0. 0.33066 0.2251 1.0985 32. d d 013 To Right Bonded - Part 6 Contac Bonde Close 9.0949e- 4.5475e- 20. 0. 0. 0.31803 33. To Part t d d 013 013 12 Bonded - Part 6 Bonde Close 2.2737e- 9.0949e- Target 60. 0. 0. 0.26989 34. To Part d d 013 013 12 Bonded - Part 6 Contac Bonde Close 9.0949e- 4.5475e- 20. 0. 0. 0.31774 35. To Part t d d 013 013 15 Bonded - Part 6 Bonde Close 4.5475e- 4.5475e- Target 60. 0. 0. 0.26989 36. To Part d d 013 013 15 Bonded - Part 6 Contac Bonde Close 9.0949e- 9.0949e- 20. 0. 0. 0.31774 37. To Part t d d 013 013 16 Bonded - Part 6 Bonde Close 4.5475e- 9.0949e- Target 60. 0. 0. 0.26989 38. To Part d d 013 013 16 Bonded Contac Bonde Close 4.5475e- 2.2737e- - Part 7 52. 0. 0. 0.30566 39. t d d 013 013 To Right Bonded Bonde Close 4.5475e- 4.5475e- - Part 7 Target 16. 0. 0. 1.4671 40. d d 013 013 To Right Bonded Contac Bonde Close 4.5475e- 2.2737e- - Part 8 52. 0. 0. 0.29754 41. t d d 013 013 To Right Bonded Bonde Close 4.5475e- 4.5475e- - Part 8 Target 16. 0. 0. 1.2457 42. d d 013 013 To Right Bonded Contac Bonde Close 2.2737e- 4.5475e- - Part 9 52. 0. 0. 0.30566 43. t d d 013 013 To Left Bonded Bonde Close 9.0949e- 9.0949e- - Part 9 Target 16. 0. 0. 1.8976 44. d d 013 013 To Left Bonded Contac Bonde Close 4.5475e- 9.0949e- 16. 0. 0. 0.25178 45. - Part 10 t d d 013 013
- 26. 25 To Left Bonded Bonde Close 9.0949e- 4.5475e- - Part 10 Target 36. 0. 0. 0.16123 46. d d 013 013 To Left Bonded Contac Bonde Close 4.5475e- 4.5475e- - Part 11 52. 0. 0. 0.30566 47. t d d 013 013 To Right Bonded Bonde Close 9.0949e- 4.5475e- - Part 11 Target 16. 0. 0. 1.8932 48. d d 013 013 To Right Bonded Contac Bonde Close 2.2737e- 4.5475e- - Part 12 52. 0. 0. 0.29754 49. t d d 013 013 To Left Bonded Bonde Close 9.0949e- 9.0949e- - Part 12 Target 16. 0. 0. 1.6997 50. d d 013 013 To Left Bonded Contac Bonde Close 4.5475e- 4.5475e- - Part 13 52. 0. 0. 0.30566 51. t d d 013 013 To Right Bonded Bonde Close 9.0949e- 9.0949e- - Part 13 Target 16. 0. 0. 1.9022 52. d d 013 013 To Right Bonded Contac Bonde Close 4.5475e- 4.5475e- - Part 14 16. 0. 0. 0.25178 53. t d d 013 013 To Right Bonded Bonde Close 9.0949e- 4.5475e- - Part 14 Target 36. 0. 0. 0.17247 54. d d 013 013 To Right Bonded Contac Bonde Close 2.2737e- 4.5475e- - Part 15 52. 0. 0. 0.30566 55. t d d 013 013 To Left Bonded Bonde Close 1.3642e- 4.5475e- - Part 15 Target 16. 0. 0. 1.7209 56. d d 012 013 To Left Bonded Contac Bonde Close 4.5475e- 4.5475e- - Part 16 52. 0. 0. 0.29754 57. t d d 013 013 To Left Bonded Bonde Close 9.0949e- 4.5475e- - Part 16 Target 16. 0. 0. 1.8058 58. d d 013 013 To Left Bonded - Right Contac Bonde Close 8.8818e- 1.7764e- 6. 0. 0. 1.2151 59. To t d d 016 015 Spring Bonded - Right Bonde Close 1.7764e- 8.8818e- Target 98. 0. 0. 0.28404 60. To d d 015 016 Spring Bonded Contac Bonde Close 8.8818e- - Left To 6. 0. 0. 0. 1.2295 61. t d d 016 Spring Bonded Bonde Close 8.8818e- 8.8818e- Target 98. 0. 0. 0.27719 62. - Left To d d 016 016
- 27. 26 Spring Bonded Contac Bonde Close 5.3291e- 1.7764e- - Spring 189. 0. 0. 0.5566 63. t d d 015 015 To Plate Bonded Bonde Close 1.7764e- 7.1054e- - Spring Target 224. 0. 0. 0.48926 64. d d 015 015 To Plate Bonded Contac Bonde Close 4.4409e- 1.3323e- - Part 5 50. 0. 0. 0.42916 65. t d d 016 015 To Poly0 Bonded Bonde Close 4.4409e- 8.8818e- - Part 5 Target 28. 0. 0. 0.49999 66. d d 016 016 To Poly0 Bonded Contac Bonde Close 8.8818e- 1.3323e- - Part 6 50. 0. 0. 0.42916 67. t d d 016 015 To Poly0 Bonded Bonde Close 8.8818e- - Part 6 Target 28. 0. 0. 0. 0.49999 68. d d 016 To Poly0 Mesh TABLE 21 Mirror (A4, B4) > Mesh Object Name Mesh State Solved Defaults Physics Preference Mechanical Relevance 0 Sizing Use Advanced Size Function Off Relevance Center Medium Element Size Default Initial Size Seed Active Assembly Smoothing High Transition Fast Span Angle Center Fine Minimum Edge Length 0.30 µm Inflation Use Automatic Tet Inflation None Inflation Option Smooth Transition Transition Ratio 0.272 Maximum Layers 5 Growth Rate 1.2 Inflation Algorithm Pre View Advanced Options No Advanced Shape Checking Standard Mechanical Element Midside Nodes Program Controlled Straight Sided Elements No Number of Retries Default (4) Rigid Body Behavior Dimensionally Reduced
- 28. 27 Mesh Morphing Disabled Pinch Pinch Tolerance Please Define Generate on Refresh No Statistics Nodes 63251 Elements 20598 Mesh Metric None TABLE 22 Mirror (A4, B4) > Mesh > Mesh Controls Object Name Mapped Face Meshing Body Sizing Body Sizing 2 Body Sizing 3 State Ignored Fully Defined Scope Scoping Method Geometry Selection Geometry Selection Geometry 6 Faces 1 Body 4 Bodies 1 Body Definition Suppressed No No Constrain Boundary No Type Element Size Element Size 100. µm 50. µm 10. µm Behavior Soft Advanced Specified Sides None Specified Corners None Specified Ends None FIGURE 1 Mirror (A4, B4) > Mesh > Image Static Structural (A5) TABLE 23 Mirror (A4, B4) > Analysis Object Name Static Structural (A5) State Solved Definition Physics Type Structural Analysis Type Static Structural Solver Target ANSYS Mechanical Options Environment Temperature 22. °C Generate Input Only No TABLE 24 Mirror (A4, B4) > Static Structural (A5) > Analysis Settings Object Name Analysis Settings State Fully Defined Step Controls Number Of Steps 1. Current Step Number 1. Step End Time 1. s Auto Time Stepping Program Controlled Solver Controls
- 29. 28 Solver Type Program Controlled Weak Springs Off Large Deflection Off Inertia Relief Off Nonlinear Controls Force Convergence Program Controlled Moment Convergence Program Controlled Displacement Convergence Program Controlled Rotation Convergence Program Controlled Line Search Program Controlled Output Controls Calculate Stress Yes Calculate Strain Yes Calculate Contact No Calculate Results At All Time Points Analysis Data Management Solver Files Directory C:Documents and SettingsStudentDesktopwbwb_filesdp0SYSMECH Future Analysis Prestressed analysis Scratch Solver Files Directory Save ANSYS db Yes Delete Unneeded Files Yes Nonlinear Solution No Solver Units Active System Solver Unit System µmks TABLE 25 Mirror (A4, B4) > Static Structural (A5) > Loads Object Name Moment Fixed Support 4 State Fully Defined Scope Scoping Method Geometry Selection Geometry 1 Face Definition Type Moment Fixed Support Define By Components Coordinate System Global Coordinate System X Component -0.36117 µN·µm (ramped) Y Component 0. µN·µm (ramped) Z Component 0. µN·µm (ramped) Suppressed No Behavior Deformable Advanced Pinball Region All