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Microsystems at Georgia Tech

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                                                                             microelectronics

                                        Electronic
                                                                                                                                 QuickTime™ and a

                                        sciences and                                                                  TIFF (Uncompressed) decompressor
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Electronics and                         solid-state
classical physics                       physics
                                                                                                                      microsystems
So, you wanna study
         microsystems…
• Undergraduate coursework opportunities
• Graduate coursework opportunities
• Research opportunities
  – UROP/special problems
  – MS thesis work
  – PhD thesis work
Undergraduate Pathway
Core Graduate Pathway

*
*
*




*

        * = microsystems core
Microelectronics/Microsystems Research Areas


Microsystems and Nanosystems Faculty:
Mark G. Allen, Farrokh Ayazi, Oliver Brand, Albert B. Frazier

Photovoltaics Faculty:
Christiana Honsberg, Bernard Kippelen, Ajeet Rohatgi

Microelectronics Systems Packaging Faculty:
Farrokh Ayazi, Gary S. May, Rao R. Tummala

Manufacturing and Gigascale Integration Faculty:
John D. Cressler, Gary S. May, James D. Meindl

Compound Semiconductors Faculty:
William A. Doolittle, Ian T. Ferguson

Biomedical Microsystems Faculty:
Mark G. Allen, Albert B. Frazier, William D. Hunt
Microelectronics Research Center

   • 10,000 m2 building
   • 2,000 m2 annex
   • 700 m2 clean room space
   • 18 individual laboratories
   • 470 graduate student researchers
   • 230 clean room users
   • 76 affiliated faculty
Engineering: ECE, MSE, ME, ChE
Sciences: Chemistry, Physics, Mathematics      Complete facilities list & info:
                                               www.mirc.gatech.edu
7 Startup Companies utilize facilities under
negotiated arrangements with Georgia Tech

                       Coming soon: the ‘Nanocenter’
What about Microelectronics Research?




                    Almost 10% of GT research !?
Some Current Microsystems Programs
Complementary Metal Oxide Semiconductor Platform (CMOS)
Microelectromechanical Systems
Nanofabrication
Packaging Research Center (resource)
University Center of Excellence in Photovoltaics

Wide Bandgap Materials: Lasers, Lighting, Devices
Chemical Process Research
Computational Electronics
Optoelectronics
Quantum Devices
Computer Aided Manufacturing
Wireless RF Electronics
Ultrafast Fiber Optical Communications
Center Research Possibilities

    TIFFQuickTime™ thisdecompressor
                       and a
          (Uncompressed) picture.
     are needed to see
                                                       QuickTime™ and a
                                                TIFF (Uncompressed) decompressor
                                                  are needed to see this picture.




University Center of
Excellence in Photovoltaics
                                               Packaging
                   QuickTime™ and a            Research Center
           TIFF (Uncompressed) decompressor
             are needed to see this picture.




   Center for MEMS and
   Microsystem Technologies
Polylithic integration of optical
        interconnection for
fiber-to-the-chip communication
Magnetic Micromachined Materials and Devices

                                              relays
                                        Upper plate
                  Springs
    inductors




                                       Pads




                high energy product magnets
RF MEMS




                                    LC filters



surface micromachined inductors                  RF switches
High Temperature Wireless Sensors
                                        Pratt and Whitney
                         Compressor
                                                Combustor




                   Sensor placed here




DC sputtered         3.8mm                                   3.8mm
                                                Conductive
Cu electrode
                                                  Paste
           161µm



                                Electroplated
Electroplated
                                Cu electrode
  Cu Coil
Biomedical Devices
                                      microneedles




flexible microelectrode arrays

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Microsystems Concentration

  • 1. Microsystems at Georgia Tech QuickTime™ and a TIFF (Uncompressed) decompressor QuickTime™ and a TIFF (Uncompressed) decompressor are needed to see this picture. are needed to see this picture. QuickTime™ and a TIFF (Uncompressed) decompressor are needed to see this picture. microelectronics Electronic QuickTime™ and a sciences and TIFF (Uncompressed) decompressor are needed to see this picture. Electronics and solid-state classical physics physics microsystems
  • 2. So, you wanna study microsystems… • Undergraduate coursework opportunities • Graduate coursework opportunities • Research opportunities – UROP/special problems – MS thesis work – PhD thesis work
  • 4. Core Graduate Pathway * * * * * = microsystems core
  • 5. Microelectronics/Microsystems Research Areas Microsystems and Nanosystems Faculty: Mark G. Allen, Farrokh Ayazi, Oliver Brand, Albert B. Frazier Photovoltaics Faculty: Christiana Honsberg, Bernard Kippelen, Ajeet Rohatgi Microelectronics Systems Packaging Faculty: Farrokh Ayazi, Gary S. May, Rao R. Tummala Manufacturing and Gigascale Integration Faculty: John D. Cressler, Gary S. May, James D. Meindl Compound Semiconductors Faculty: William A. Doolittle, Ian T. Ferguson Biomedical Microsystems Faculty: Mark G. Allen, Albert B. Frazier, William D. Hunt
  • 6. Microelectronics Research Center • 10,000 m2 building • 2,000 m2 annex • 700 m2 clean room space • 18 individual laboratories • 470 graduate student researchers • 230 clean room users • 76 affiliated faculty Engineering: ECE, MSE, ME, ChE Sciences: Chemistry, Physics, Mathematics Complete facilities list & info: www.mirc.gatech.edu 7 Startup Companies utilize facilities under negotiated arrangements with Georgia Tech Coming soon: the ‘Nanocenter’
  • 7. What about Microelectronics Research? Almost 10% of GT research !?
  • 8. Some Current Microsystems Programs Complementary Metal Oxide Semiconductor Platform (CMOS) Microelectromechanical Systems Nanofabrication Packaging Research Center (resource) University Center of Excellence in Photovoltaics Wide Bandgap Materials: Lasers, Lighting, Devices Chemical Process Research Computational Electronics Optoelectronics Quantum Devices Computer Aided Manufacturing Wireless RF Electronics Ultrafast Fiber Optical Communications
  • 9. Center Research Possibilities TIFFQuickTime™ thisdecompressor and a (Uncompressed) picture. are needed to see QuickTime™ and a TIFF (Uncompressed) decompressor are needed to see this picture. University Center of Excellence in Photovoltaics Packaging QuickTime™ and a Research Center TIFF (Uncompressed) decompressor are needed to see this picture. Center for MEMS and Microsystem Technologies
  • 10. Polylithic integration of optical interconnection for fiber-to-the-chip communication
  • 11. Magnetic Micromachined Materials and Devices relays Upper plate Springs inductors Pads high energy product magnets
  • 12. RF MEMS LC filters surface micromachined inductors RF switches
  • 13. High Temperature Wireless Sensors Pratt and Whitney Compressor Combustor Sensor placed here DC sputtered 3.8mm 3.8mm Conductive Cu electrode Paste 161µm Electroplated Electroplated Cu electrode Cu Coil
  • 14. Biomedical Devices microneedles flexible microelectrode arrays