NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing.ppt
- 1. NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing Director: Ahmed Busnaina, NEU Deputy Director: Joey Mead, UML, Associate Directors: Carol Barry, UML; Nick McGruer, NEU; Glen Miller, UNH; Jacqueline Isaacs, NEU, Group Leader: David Tomanek, MSU Collaboration and Outreach: Museum of Science-Boston, City College of New York, Hampton Univ., Rice Univ., Hanyang Univ., Korean Center for Nanoscale Mechatronics and Manufacturing (CNMM), University of Hyogo, Japan Thrust 3: Testbeds Thrust 3: Testbeds Nick McGruer Nick McGruer
- 2. Thrust 3: Testbeds Memory Device and Biosensor NEU; UML; UNH Thrust 1: Manufacture Nanotemplates and Nanotubes NEU; UNH Thrust 4: Societal Implications NEU; UML Thrust 2: High-rate Assembly and Transfer NEU; UML; UNH Education & Outreach NEU; UML; UNH CHN Path to Nanomanufacturing Biosensors Testbed Nanotube Devices Testbed Reliability and Defect Control Alignment Processes Developing Testbeds and Applications
- 3. NSF Center for High-rate Nanomanufacturing Application Road Map
- 4. Thrust 3: Testbeds, Memory Device and Biosensor PIs: Joey Mead, Carol Barry, Susan Braunhut, Ken Marx, Sandy McDonald, UML, Ahmed Busnaina, NEU. Post Docs:, Lisa Clarizia, UML. Students: Vikram Shankar, UML. PIs: Ahmed Busnaina, Nick McGruer, George Adams, NEU Post Docs: Siva Somu, Nam Goo Cha, NEU. Students: Taehoon Kim, Anup Sing, Suchit Shah, NEU. PIs: Ahmed Busnaina, Nick McGruer, NEU, Jim Whitten, UML, Howard Mayne, UNH. Students: Jose Medina, Jagdeep Singh, UML. PIs: Ahmed Busnaina, Nick McGruer, George Adams, NEU. Students: Juan Aceros, Peter Ryan, NEU. Biosensors Testbeds Nanotube Devices Testbed Reliability and Defect Control Alignment Processes Developing Testbeds and Applications PIs: Sanjeev Mukerjee, Nick McGruer, Ahmed Busnaina, Mehmet Dokmeci, Jung Joon Jung, NEU, Glen Miller, UNH, Joey Mead, Carol Barry, UML
- 5. Barrier 2. How can we scale up assembly processes in a continuous or high rate manner? Demonstration of assembly processes; scale-up; technology transfer. Barrier 3. How can we test for reliability in nanoelemnts and connections? How can we efficiently detect and remove defects? MEMS Testbed for accelerated test of nanoelements. Collaboration with the Center for Microcontamination Control on removal of nanoscale defects. Barrier 4. Do nanoproducts and processes require new economic, environmental, and ethical/regulatory assessment and new socially- accepted values? Testbed process can be case studies for environmental, economic, and regulatory needs. What are the Critical Barriers to Nanomanufacturing?
- 6. Biosensor Partner: Triton Systems developed antibody attachment for medical applications Properties: increased sensitivity, smaller sample size, detection of multiple antigens with one device, small/low cost. Nanotube Memory Device Partner: Nantero first to make memory devices using nanotubes Chosen to verify CHN- Developed manufacturing processes. Easy to measure to validate functionality. Strong industry partnership for product realization. Two Established Proof of Concept Testbeds Properties: nonvolatile, high speed programming at <3ns, lifetime goal >1015 cycles, resistant to heat, cold, magnetism, vibration, and radiation.
- 7. Four Examples of Carbon Nanotube Switches Carbon Nanotube Non-Volatile Memory Device, Ward, J.W.; Meinhold, M.; Segal, B.M.; Berg, J.; Sen, R.; Sivarajan, R.; Brock, D.K.; Rueckes, T. IEEE, 2004, 34-38. MWNT Mechanical Switch Jang et al., Appl. Phys. Lett. (2005) 87, 163114. Self-assembled switches based on electroactuated multiwalled nanotubes E. Dujardin,a V. Derycke,b M. F. Goffman, R. Lefèvre, and J. P. Bourgoin Applied Physics Letters 87, 193107 2005
- 8. High Density Memory Chip Testbed Electrodes (~100nm with 300 nm period) ON state OFF state CHN Nanomanufacturing Processes: •Nanotemplates will enable aligned CNT. •Near Term, smaller linewidth, better process control. •Ultimately, single CNT switches. Current Nantero process Uses conventional optical lithography to pattern carbon nanotube films Switches are made from belts of nanotubes (Nantero, 2004)
- 9. Template Transfer Technology Validation in Memory Device Testbed Testbeds: Memory Devices and Biosensor Manufacture Nanotemplates and Nanotubes CNTs on trenches form memory elements. Testbeds: Memory Devices Carbon nanotubes assembled from solution Assemble and Transfer Nanoelements
- 10. Type II CHN Nanotube Switch for Non-Volatile Memory Schematic of state I and II. • Type II Switch has two symmetric non-volatile states. • Simple process. • CNTs assembled directly on chip using dielectrophoresis or using template transfer. • Measurements in progress. • CNT/Surface interaction critical, measurements in progress.
- 11. Directed Assembly of a Single SWCNT by Dielectrophoresis
- 12. SWNT Memory Testbed Status and Plan • Why Important? – We need new manufacturing methods to scale beyond CMOS (to approach terabytes/cm2 in memory density for example). – CHN templates will reduce current line width by 10X (10 nm line width) in the initial phase. – Developing manufacturing processes for manipulating nanotubes/nanoelements. Can be applied to FETs, molecular switches. • Current Status – Developing templated and template-less SWNT assembly techniques. – Preparing silicon-based and polymer-based templates to develop transfer processes. – Fabricating Nantero-style switches and switches with a symmetrical two-state design. • Transition Plan – In 2009 will have large scale directed assembly of SWNT over 4” wafers – Technology transfer anticipated by 2012
- 13. Adsorb primary antibody onto a solid substrate Antigen binding sites Bind antigen (biomarker for specific disease) to antibody Add labeled detection antibody Detection of fluorescence or color change of substrate ELISA (Enzyme-Linked ImmunoSorbent Assay), Background Elisa analysis of a serum sample with breast cancer. Source: Richard Zangar, Nature
- 14. Biosensor; State of the Art • Commercial ELISA systems • Cantilevers for detection – M. Calleja et al, IMM-Centro Nacional de Microelectronias, Tres Cantos, Spain – V. Dauksaite et al, University of Aarhus, Aarhus, Denmark • Nanowire sensors – Antibodies are not patterned (immobilized), so maximum sensitivity is not attained Cantilevers are coated with antibodies to PSA, When PSA binds to the antibodies, the cantilever is deflected, Mujumdar, UC BERKELEY Elisa analysis of a serum sample with breast cancer. Source: Richard Zangar, Nature F. Patolsky and C.M. Lieber, "Nanowire nanosensors," Materials Today, 8, 20-28 (2005)
- 15. Increase Performance of Antibody-Based Sensors Spacing too close for antigen detection Spacing too wide for maximum sensitivity Controlled orientation: Can increase sensitivity by 5-10x. Templates not required. Method 1: Chemical attachment May disrupt antibody activity. Must evaluate for a specific antibody. Method 2: Protein G based attachment. Opportunity: • Random orientation and spacing of antibodies. • Want to control: •Orientation of antibodies (Functional antibodies estimated to be : 10-20%) •Spacing of antibodies. Controlled spacing: Can increase sensitivity by 5-10x? Less non-specific binding. Use templates to pattern polymer blends. High-rate, high-volume process. Wide choice of polymers.
- 16. Fab to Fc Response Ratios 0 2 4 6 8 UHB HB MB PMMA •Ratio of Oriented (Fab) to disOriented (Fc) response was much higher for the CHN system. POLYMER RATIO CHN FAB FC Orientation
- 17. Keck Nano Bio Chip Biosensor Goals – Simultaneous measurement of multiple biomarkers with one device – Very small size (can be as small as 100 µm x 100 µm) – Can be made of all biocompatible material – Low cost – Future development will lead to a device where drugs are released based on the detected antigen. – In-vivo measurement – No issues with sample collection and storage
- 18. BioSensor Status, Plan and Goals • Why Important? – CHN templates will improve sensitivity by 10-100X and provide selectivity not available now by improving both antibody orientation and spacing. – Potential for physically smaller, less expensive arrays with more sensitivity and functionality. (Detect multiple antibodies/diseases in one test, for example.) • Current Status – Developed oriented attachment approaches for antibodies on candidate components of polymer blends. – Assembly of polymer blends using templates. • Biosensor Goals – Demonstrate high-rate assembly of antibody selective polymer blends. – Demonstrate selective antibody attachment to one component of a template- assembled polymer blend. – Demonstrate control of antibody spacing with appropriate assembled polymer blend pattern.
- 19. Reliability, Accelerated Test, Properties SiO2 (2um) Si Substrate Si (2um) Si Contacts SiO2 Nanowire Contacts Nanow ire • Monitor reliability of materials, interfaces, and systems to ensure manufacturing readiness. – Changes in material or contact properties with environmental exposure, stress, temperature … • Accelerated testing for reduced manufacturing risk. – Rapid mechanical, electrical, and thermal cycling with measurement capability. – Example: MEMS devices to rapidly cycle strain or temperature while measuring resistance and imaging in SEM or STM. UHV compatible. • Nanoscale material, contact, and interface property monitoring. – Example: Measure adherance force and friction between functionalized nanoelements and functionalized substrates. – Example: Measure Young’s modulus and yield strength of nanoelements. MEMS Devices for Accelerated Test Interaction of AFM Cantilever with Suspended Nanotube
- 20. MEMS Nanoscale Characterization and Reliability Testbed, Introduction SiO2 (2um) Si Substrate Si (2um) Si Contacts SiO2 Nanowire Contacts N anowire •Considerable work on MEMS resonators – properties of the resonator itself: •C. L. Muhlstein, S. B. Brown, R. O. Ritchie, High-Cycle fatigue of Single –Crystal Silicon Thin Films, J. MEMS, 10, 4 (2001) pp. 593-600. •Work on MEMS material properties, much less quantative work on properties/reliability of nanoscale structures or interfaces. •M. A. Haque, M. T. A. Saif, “Mechanical Behavior of 30- 50 nm thick Aluminum Films Under Uniaxial Tension”, Scripta Mat. pp 863, Vol 47 (2002). •T. Yi, C. J. Kim, "Measurement of Mechanical Properties for MEMS Materials", Meas. Sci. Technol., pp. 706-716, Vol 10, (1999). •M. T. A. Saif, N. C. MacDonald, “Measurement of Forces and Spring Constants of Microinstruments”, Rev. Scien. Inst. pp 1410, Vol 69, 3 (1998). •M. Yu, B. S. Files, S. Arepalli, R. S. Ruoff, “Tensile Loading of Ropes of Single Wall Carbon Nanotubes and their Mechanical Properties”, Phys. Rev. Lett. pp 5552, Vol 84, 24 (2000). •A. V. Desai, M. A. Haque, “Test Bed for Mechanical Characterization of Nanowires”, JNN Proc. IMechE. Part N. pp 57-65, Vol 219, N2 (2006).
- 21. MEMS Testbed for Accelerated Test and Properties Measurement Test Devices Tensile Test Bend Test Horizontal Resonator MicroHotPlate Angular Resonator Test Devices Tensile Test Bend Test Horizontal Resonator MicroHotPlate Angular Resonator Innovative MEMS devices characterize nanowires (also nanotubes, nanorods and nanofibers) and conduct accelerated lifetime testing allowing rapid mechanical, electrical, and thermal cycling which can be combined with AFM/SEM/UHV SPM observation. Suitable for remote testing: Space or radiation environments. Small, lightweight, low-power.
- 22. MEMS Nanoscale Characterization and Reliability Testbed, Nano Pull Test Currently characterizing electrospun fibers from UML.
- 23. MEMS Nanoscale Characterization and Reliability Testbed, Hot Plate with Nanowire Au, Ru, and RuO2 nanowires tested, currently testing CNT bundles.
- 24. AFM Measurement of CNT-Surface Interaction (in support of assembly, transfer and CNT switches). RMS and A-B Data Plotted for a 100 nm Z-Piezo Displacement Below the Substrate F/d On Suspended CNT F/d On neighboring Substrate • What: Development of techniques for measurement of interactions between functionalized nanotubes and functionalized surfaces. • Purpose: Process control for single nanotube switch process.
- 25. Summary and Goal • Generally Applicable Tools Available Now for: 1. Measurements of Reliability of Nanoelements, Contacts, and Systems. 2. Accelerated Test of Nanoelements, Contacts, and Systems. 3. Measurements of Properties of Nanoscale Elements and Interactions between Elements. • These tools will help to ensure manufacturing readiness and will help to reduce the time for technology transition to manufacturing.
- 26. Low Cost, High Power and Energy Density Low Cost, High Power and Energy Density Secondary Storage Batteries Secondary Storage Batteries SWNTs Assembled within polymer 260 nm trenches over 100long in 60 Sec. P-type SWNT Assembly Si N-type SWNT Assembly SiO2 N type P type N type P type High rate 2D templates for Microbatteries •Sanjeev Mukerjee, Professor, Dept. of Chemistry and Chemical Biology Director, Energy Research Center, Northeastern University •Collaborate with CHN to develop unique micro-arrays for 2-D and 3-D batteries based on Li-ion chemistry. 3-D designs will have up to 350 times higher energy and power density as compared to the conventional designs.
- 27. 3D templates for Microbatteries Grown SWNT pillars Jung, NEU SWNT network grown between SiO2 nano pillars. Jung, NEU Si/SiO2 Substrate SWNT Co Seed Catalyst Patterning CVD Growth
- 28. Lightweight Structural Materials with Integrated Wiring, Thermal Management, and EMI Shielding • Controlled orientation of CNTs • Patterned conducting elements (thermal and electrical) • Embed in polymeric matrix assembly transfer Reduced time to implement since process has been developed
- 29. Lightweight Structural Materials Process can be advanced to produce large sheets • Widths: 3-6 feet • Rates: 60 48,000 feet per hour Lightweight structural materials Carbon nanotubes Template roller with nano or micro patterns Patterned surface Polymer film CNT supply
- 30. Lightweight Structural Materials Nanocomposites (e.g. carbon nanotubes, nanowhiskers, etc.) • Compared to conventional reinforcements 40X greater strength to weight ratio • Lighter weight and lower cost Material Modulus, GPa Strength, GPa Density, g/cm3 SWNT 1054 150 1.40 MWNT 1200 150 2.60 Glass fiber 87 4.6 2.50 Carbon fiber 228 3.8 1.80 Kevlar 186 3.6 --- Steel 208 1.0 7.80
- 31. Thermal Management Nanoparticles and carbon nanotubes • Greater thermal conductivity than polymers Material Thermal Conductivity, W/m-K Density, g/cm3 CNT 2000 1.4 Silver 418 10.5 Copper 386 8.95 Gold 143 2.8 Silica 1.40 2.2 Kapton (PI) 0.37 1.5
- 32. Summary, Lightweight Multifunctional Materials • CHN provides manufacturing ready processes for light- weight, flexible materials with – High strength • 40X greater strength-to-weight ratio – Tailored thermal management • Thermal conductivity at < 10% particle loading • Placement of thermal management layers or wires where required – Multiple functionalities • Strength and thermal management • Also, internal wires, EMI shielding, and stealth capabilities
Editor's Notes
- #19: Innovative MEMS-based test beds are designed and fabricated to characterize nanowires (also nanotubes, nanorods & nanofibers) and conduct accelerated lifetime testing allowing rapid mechanical, electrical, and thermal cycling. Conceptual layout of a MEMs test structure capable of applyings maximum strain at the nanowire location. Nanowire contacts allow the testing of the nanowire electrical properties with time while the structure is oscillating at the resonant mechanical frequency of the system
- #20: Innovative MEMS-based test beds are designed and fabricated to characterize nanowires (also nanotubes, nanorods & nanofibers) and conduct accelerated lifetime testing allowing rapid mechanical, electrical, and thermal cycling. Conceptual layout of a MEMs test structure capable of applyings maximum strain at the nanowire location. Nanowire contacts allow the testing of the nanowire electrical properties with time while the structure is oscillating at the resonant mechanical frequency of the system
- #21: Innovative MEMS-based test beds are designed and fabricated to characterize nanowires (also nanotubes, nanorods & nanofibers) and conduct accelerated lifetime testing allowing rapid mechanical, electrical, and thermal cycling. Conceptual layout of a MEMs test structure capable of applyings maximum strain at the nanowire location. Nanowire contacts allow the testing of the nanowire electrical properties with time while the structure is oscillating at the resonant mechanical frequency of the system