PacTec 2nd Source ASML Replacement Parts List
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The document provides a detailed list of OEM part numbers and descriptions for various components related to the 5500 series, including filters and lasers. It includes specific part numbers for UV and ARF filters and mentions configurations for different positions within the series. Contact information for Ed West is provided, along with a confidentiality notice.
PacTec 2nd Source ASML Replacement Parts List
- 1. Model OEM Part Number Part Description Image PacTec Part # 5500 (116539-8501/321) 4022.454.73941 Included: 116539- 0003.020/376 Blocking Filter Assy (may be called WG UV Filter Halter 400 c Zeiss, 4022.454.7394.1), 82014 5500 SERV.502.27023 OFF-AXIS RED LASER (JDSU 1135P,10mW) 85001 5500 SERV.455.09864 OFF-AXIS GREEN LASER 4711-050-1001 (silver controller) 4802-1001 85006 5500 SERV.455.09864 OFF-AXIS GREEN LASER (bronze controller) 85002 - RE 5500 4022.454.3311.1 Interference Filter (Exchange Frame) 82011 5500 4022.454.3311.1 Interference Filter (Frame Included) 82013 5500 /300/350/500/550 /700/750 454.48131 Position A 248nm (KrF) UVFS 82003 ASML New Replacement Parts Confidential Page 1 Ed West (360) 719-1822 11/12/2015
- 2. Model OEM Part Number Part Description Image PacTec Part # 5500 /300/350/500/550 /700/750 454.48121 Position B 248nm (KrF) UVFS 82004 5500 /300/350/500/550 /700/750 454.48111 Position C 248nm (KrF) UVFS 82005 5500 /300/350/500/550 /700/750 454.48131 Position A 248nm (KrF) CaF2 86001 5500 /300/350/500/550 /700/750 454.48121 Position B 248nm (KrF) CaF2 86002 5500 /300/350/500/550 /700/750 454.48111 Position C 248nm (KrF) CaF2 86003 PAS + AT 5500 800/850/860 4022.456.12101 Position A 248nm (KrF) UVFS 82018 PAS + AT 5500 800/850/860 4022.456.12112 Position B 248nm (KrF) UVFS 82019 PAS + AT 5500 800/850/860 4022.456.12122 Position C 248nm (KrF) UVFS 82020 Confidential Page 2 Ed West (360) 719-1822 11/12/2015
- 3. Model OEM Part Number Part Description Image PacTec Part # PAS + AT 5500 800/850/860 SERV.456.12101 Position A 248nm (KrF) CaF2 86010 PAS + AT 5500 800/850/860 SERV.456.12112 Position B 248nm (KrF) CaF2 86011 PAS + AT 5500 800/850/860 SERV.456.12122 Position C 248nm (KrF) CaF2 86012 PAS + AT 1100 4022.456.00752 Position A 193nm (ARF) S03 CaF2 82015 PAS + AT 1100 4022.456.00762 Position B 193nm (ARF) S03 CaF2 82016 PAS + AT 1100 4022.456.00772 Position C 193nm (ARF) S03 CaF2 82017 XT 1400/1400i/1450 G SERV.486.25383 Position A 193nm (ARF) Dry CYMER XLA-165 CaF2 86015 XT 1400/1400i/1450 G SERV.486.25393 Position B 193 nm (ARF) Dry CYMER XLA-165 CaF2 86016 Confidential Page 3 Ed West (360) 719-1822 11/12/2015
- 4. Model OEM Part Number Part Description Image PacTec Part # XT 1400/1400i/1450 G SERV.486.25403 Position C 193nm (ARF) Dry CYMER XLA-165 CaF2 86017 5500 /300/350/500/550 SERV.454.54371 4022.454.54371 Beam Delivery Entrance Window BS Assy 248nm 82006 5500 /60/80/125 4022.435.6771.1 Blockfilter 1000W Stepper, UV Filter 82010 5500 /300,/350,/500,/5 50,/700,/750,/800 ,/850,/860,/8TFH- SERV.454.54832 4022.454.54832 BMU Coupling Mirror Beam Measuring Unit Mirror 1% 82023 5500 /500/550/700/750 /800/850/860/8T FH-A SERV 455.80902 4022.455.80902 Beam Delivery Entrance Window BMU Stepper, 248nm 82026 Confidential Page 4 Ed West (360) 719-1822 11/12/2015