2. What is MEMS?
• MEMS or Micro-Electro Mechanical System is a
technique of combining Electrical and Mechanical
components together on a chip, to produce a system of
miniature dimensions.
• Integration of a number of micro-components on a single
chip which allows the micro system to both sense and
control the environment.
• Made up of components between 1 to 100 micrometers
in size.
3. • Devices generally range in size from 20
micrometers to a millimeter.
• The components of MEMS are micro sensors,
micro actuator, micro electronics and micro
structures
4. What is NEMS?
• The term Nano electromechanical systems or
NEMS is used to describe devices integrating
electrical and mechanical functionality on the
nanoscale.
• NEMS form the logical next miniaturization
step from so-called micro electro mechanical
systems, or MEMS devices.
5. • NEMS is the integration of sensors, actuators,
electronics, photonics, energy, fluidics,
chemistry, and biology into a meaningful
system enabled by sub micrometer science
and engineering precision.
• NEMS can enhance the capability of certain
devices that required sensitive measurements.
• Researchers have developed NEMS sensors
using nanocantilevers, and NEMS resonator.
