An introduction to mems technology
- 1. An introduction to MEMS Technology Presented by S.Sathish. P.Santhosh.
- 2. WHAT ARE MEMS ? MICRO - small size , micro fabricated structure ELECTRO - electrical signal / control MECHANICAL- mechanical functionality SYSTEM - device, structure , system control 2
- 3. BIG QUESTION? What is MEMS Technology ? Why is it Important? 3
- 4. What is MEMS Technology? • Mems is technology of very small devices. It is a combination of mechanical functions and electrical functions on the same chip using micro fabrication technology .. • Mems are made up of components between 1 to 100 micrometres in size • Mems device generally ranging size from 20 micrometres to millimetre 4
- 5. FABRICATION DEPOSITION: Physical Chemical PATTTERING: ETCHING Dry Wet 5
- 6. BUILDING BLOCKS in MEMS There are three basic blocks in MEMS technology…. DEPOSITION – The ability to deposit thin films of material on a substrate LITHOGRAPHY- To apply a patterned mask on top of the films by photolithographic imaging ETCHING – To etch the films selectively to the mask . Materials used are- silicon, polymers ,metals, ceramics.. 6
- 7. MEMS manufacturing Technology 1) Bulk micromachining 2) Surface micromachining 3) High aspect ratio (HAR) silicon micromachining 7
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- 9. MEMS Applications Medical and bio field A mems is a device that can be implant in the human body Mems surgical tools provide the flexibility and accuracy to perform surgery BioMEMS are used to refer to the science and technology of operating at the micro scale for biological and bio medical applications 9
- 10. In military MEMS technology help projectiles to reach their targets accurately In sensors A micro sensors reaches a significantly higher speed and sensitivity compared with microscopic approaches 10
- 11. IN-AUTOMOTIVES Heavy use of MEMS is used in airbag system, vehicle security ,inertial brake lights, automatic door lock etc. IN- MICROPHONES The MEMS microphone also called as microphone chip is widely used in the present day communication world. 11
- 12. Advantages of MEMS Minimize energy and materials MEMS can be mass-produced and are inexpensive to make. Improved accuracy and reproducibility Higher reliability than their macro scale counterparts 12
- 13. Disadvantages a. Due to their size, it is physically impossible for MEMS to transfer any significant power. b. MEMS are made up of Poly-Si (a brittle material), so they cannot be loaded with large forces. c. Micro components are costly compared to macro components 13
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- 15. Queries????? 15