mems ppt
- 1. MEMS TECHNOLOGY BY S.APPA RAO
- 2. MEMS: micro-electro-mechanical systems Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology. INTRODUCTION
- 3. Same as the process steps used for making conventional electronic circuits MEMS PROCESS PowerPoint
- 5. CHEMICAL DEPOSITION Chemical vapour deposition PHYSICAL DEPOSITION Sputtering DEPOSITION:
- 6. Application of photo resist Optical exposure to print an image of the mask onto the resist Immersion in an aqueous developer solution to dissolve the exposed resist LITHIOGRAPHY:
- 7. ETCHING: DRY ETCHING WET ETCHING
- 8. Materials are the basic things required to develop micro sensors Metals Polymers Ceramic materials Semiconductors Composite materials MATERIALS FOR MEMS:
- 9. Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices MICRO MACHINING TECHNOLOGY:
- 10. BULK micromachining: SURFACE micromachining: LIGA process: TYPES OF MICROMACHINING:
- 11. MEMS ACCELEROMETRER: CONVENTIONAL ACCELEROMETER SENSOR Made of bulky and heavy metal parts Require high operating voltage/current Needs careful maintenance Highly expensive not throwaway type
- 13. LAYOUT OF THE RESISTOR:
- 14. MASKS that are used 4 ACCELEROMETER:
- 16. Contd….
- 17. INTERFACE ELECTRONIC CKT
- 19. Significantly lower manufacturing costs Small inertial mass Particularly realized in the area of: – sensors – signal switching ADVANTAGES:
- 20. Imprecise fabrication methods Expensive and complex packaging CAD Design tool inaccuracies TECHNICAL LIMITATIONS:
- 21. Accelerometers in consumer electronics devices such as game controllers Communications biotechnology APPLICATIONS:
- 22. As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives. It has the potential to change our daily life as much as computer FUTURE:
- 23. THANK YOU!!!
- 24. QUIRIES?????