Micro Electro Mechanical Systems (MEMS) Class Materials - Lecture 01
6 likes5,102 views
This document discusses Micro Electro Mechanical Systems (MEMS). It defines MEMS as the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology. It provides a brief history of MEMS development from the 1950s to present day. It also discusses Moore's Law and the need to go beyond Moore's Law to continue advancing semiconductor chip technology.
Micro Electro Mechanical Systems (MEMS) Class Materials - Lecture 01
- 1. S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal Micro Electro Mechanical Systems MEMS - Small Devices for Large Jobs S. Meenatchisundaram Faculty ICE, MIT, Manipal meenasundar@gmail.com 1
- 2. S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal Lecture #01 Micro Electro Mechanical Systems – An Overview 2
- 3. S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal Reference Books & Materials Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata Mc Graw Hill, 2002. Chang Liu, Foundations of MEMS, 2 ed., Prentice Hall, 2012. M. Bao, Analysis and Design Principles of MEMS Devices, 1 ed., Elsevier, 2005. S. Beebey, G. Ensell and N. White, MEMS Mechanical Sensors, Boston: Artech House, 2004. Stephen Senturia, Microsystem Design, Springer, 2001. An Introduction to MEMS, Prime Faraday Technology Watch – January 2002 3
- 4. S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal Contents 1. What is MEMS? 2. Evolution of MEMS 3. Moore’s law and beyond 4
- 5. Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology. A technology to create any integrated devices or systems that combine mechanical and electrical components. These devices have the ability to sense, control and actuate on a micro scale and generate effects on macro scale. A device that consists of micro machines and microelectronics where micro machines are controlled by microelectronics. A system or a device that has static and movable components with some dimension on the scale of micron. By combining IC’s with mechanical parts, MEMS are complete systems on a chip. What is MEMS? 5S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 6. What is MEMS? 6S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 7. In the most general form, MEMS consist of mechanical microstructures, microsensors, microactuators and microelectronics, all integrated onto the same silicon chip. What is MEMS? 7S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 8. What is MEMS? 8S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 9. What is MEMS? 9S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 10. Evolution of MEMS 10S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 11. 1950’s • 1958 Silicon strain gauges commercially available • 1959 “There’s Plenty of Room at the Bottom” – Richard Feynman gives a milestone presentation at California Institute of Technology. Issues a public challenge by offering $1000 to the first person to create an electrical motor smaller than 1/64th of an inch. 1960’s • 1961 First silicon pressure sensor demonstrated • 1967 Invention of surface micromachining. Westinghouse creates the Resonant Gate Field Effect Transistor, (RGT). Description of use of sacrificial material to free micromechanical devices from the silicon substrate. 1970’s • 1970 First silicon accelerometer demonstrated • 1979 First micro machined inkjet nozzle History of MEMS 11S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 12. 1980’s • Early 1980’s first experiments in surface micro machined silicon. Late 1980’s micromachining leverages microelectronics industry and widespread experimentation and documentation increases public interest. • 1982 Disposable blood pressure transducer • 1982 “Silicon as a Mechanical Material”. Instrumental paper to entice the scientific community – reference for material properties and etching data for silicon. • 1982 LIGA Process • 1988 First MEMS Conference 1990’s • Methods of micromachining aimed toward improving sensors. • 1992 MCNC starts the Multi-User MEMS Process (MUMPS) sponsored by Defense Advanced Research Projects Agency (DARPA) • 1992 First micro machined hinge • 1993 First surface micro machined accelerometer sold (Analog Devices, ADXL50) • 1994 Deep Reactive Ion Etching is patented • 1995 BioMEMS rapidly develop • 2000 MEMS Optical-networking components become big business History of MEMS 12S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 13. History of MEMS 13S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 14. Moore’s Law Gordon Moore (Co-founder of Intel) predicted in 1965 that the transistor density of semiconductor chips would double roughly every 18 months. 14S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
- 15. Beyond Moore’s Law MOSFETs using new materials must be fabricated on Si substrates in order to fully utilize Si CMOS platform, meaning the necessity of the co-integration of III-V/Ge on Si. 15S.Meenatchisundaram, Department of Instrumentation & Control Engineering, MIT, Manipal