![“…You know, in the atomic energy plants they have materials and machines that they can’t handle directly because they have become radioactive. To unscrew nuts and put on bolts and so on, they have a set of master and slave hands, so that by operating a set of levers here, you control the “hands” there, and can turn them this way and that so you can handle things quite nicely.” - Richard Feynmen[1]3motivation[1] There's plenty of room at the bottom, Feynman, R.P.; IEEE JMEMS, vol 1, issue 1, 1992 , pp 60 - 66](https://image.slidesharecdn.com/mastersthesispresentation-12877224729247-phpapp01/85/Three-axis-positioning-system-3-320.jpg)
![4objectiveAbility to handle micro-scale objects in the range 0-100µm.Ability to manipulate the micro-objects at sub-micron resolution (~0.5µm) with meso-scale (~25mm) travel.Provide tactile interaction with micro-scale objects (Haptic interface).50 µmZygote [2]Novint Falcon[3][2] Pronuclear Injection – Transgenic mice production, Eppendorf®[3] Image reproduced from Novint® Falcon™, Novint Technologies Inc.](https://image.slidesharecdn.com/mastersthesispresentation-12877224729247-phpapp01/85/Three-axis-positioning-system-4-320.jpg)
![7LITERATURE REVIEWMicromanipulation of micro-objects using electrostatic microgripper and its bio-compatibility was reported by Felix et al.[3].Handling of microbeads aligned in a ultrasonic field [6][3] B. Felix, N. Adrian, O. Stefano, J. B. Dominik, S. Yu, D. Jurg, J. N. Bradley, “Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field”, in JMEMS, vol. 16, Iss. 1, 2007, pp. 7-15.](https://image.slidesharecdn.com/mastersthesispresentation-12877224729247-phpapp01/85/Three-axis-positioning-system-8-320.jpg)
![8LITERATURE REVIEWOur method differs from the work discussed by Trinh Chu et al.[4]. They do not have haptic based control of axial motion and gripper actuation.Handling of glassbeads [4][4] D. Trinh Chu, L. Gih-Keong, J.F. Creemer, P.M. Sarro, “Electrothermal microgripper with large jaw displacement and integrated force sensors”, in JMEMS, vol. 17, Iss. 6, 2008, pp. 1546-1555.](https://image.slidesharecdn.com/mastersthesispresentation-12877224729247-phpapp01/85/Three-axis-positioning-system-9-320.jpg)
![LITERATURE REVIEWOur method differs from the work discussed by Kim et al.[5] in the electrostatic gripper design by improving compatibility to various biological samples.Handling of He-la cells [5][5] K. Kim, X. Liu, Y. Zhang, Y. Sun, “Micronewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback” in IEEE Int. conf. on robotics and automation, 2008, pp. 3100-3105.9](https://image.slidesharecdn.com/mastersthesispresentation-12877224729247-phpapp01/85/Three-axis-positioning-system-10-320.jpg)
Three axis positioning system
- 1. M.S. Thesis defense – 06/30/2010Haptic controlled X-Y-ZMEMS gripper system1Presented by: AshwinVijayasaiCommittee membersDr. Tim Dallas (Chair)Dr. Richard GaleDr. Stephen Bayne
- 2. OutlineMotivationObjectiveIntroductionLiterature reviewSetup overviewMEMS microgripper: description and characterizationHaptic InterfaceThree axis positionerStepper-motor CharacterizationExperimental SetupHandling and manipulation results2
- 3. “…You know, in the atomic energy plants they have materials and machines that they can’t handle directly because they have become radioactive. To unscrew nuts and put on bolts and so on, they have a set of master and slave hands, so that by operating a set of levers here, you control the “hands” there, and can turn them this way and that so you can handle things quite nicely.” - Richard Feynmen[1]3motivation[1] There's plenty of room at the bottom, Feynman, R.P.; IEEE JMEMS, vol 1, issue 1, 1992 , pp 60 - 66
- 4. 4objectiveAbility to handle micro-scale objects in the range 0-100µm.Ability to manipulate the micro-objects at sub-micron resolution (~0.5µm) with meso-scale (~25mm) travel.Provide tactile interaction with micro-scale objects (Haptic interface).50 µmZygote [2]Novint Falcon[3][2] Pronuclear Injection – Transgenic mice production, Eppendorf®[3] Image reproduced from Novint® Falcon™, Novint Technologies Inc.
- 5. 5INTRODUCTIONResearchers have integrated MEMS devices in micro-positioning tools and demonstrated handling, grasping, and construction of micro-structures, micro-beads, and other devices.
- 6. MEMS based micro-positioning and handling tools can be used in various applicationsMicro-assemblyTransgenic miceIVF and ICSISingle cell analysisCell sorting
- 7. 6Design considerationsReliabilityTravel rangeStep resolutionOperating speedHandling forcesExperimental setupBio-compatibility
- 8. 7LITERATURE REVIEWMicromanipulation of micro-objects using electrostatic microgripper and its bio-compatibility was reported by Felix et al.[3].Handling of microbeads aligned in a ultrasonic field [6][3] B. Felix, N. Adrian, O. Stefano, J. B. Dominik, S. Yu, D. Jurg, J. N. Bradley, “Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field”, in JMEMS, vol. 16, Iss. 1, 2007, pp. 7-15.
- 9. 8LITERATURE REVIEWOur method differs from the work discussed by Trinh Chu et al.[4]. They do not have haptic based control of axial motion and gripper actuation.Handling of glassbeads [4][4] D. Trinh Chu, L. Gih-Keong, J.F. Creemer, P.M. Sarro, “Electrothermal microgripper with large jaw displacement and integrated force sensors”, in JMEMS, vol. 17, Iss. 6, 2008, pp. 1546-1555.
- 10. LITERATURE REVIEWOur method differs from the work discussed by Kim et al.[5] in the electrostatic gripper design by improving compatibility to various biological samples.Handling of He-la cells [5][5] K. Kim, X. Liu, Y. Zhang, Y. Sun, “Micronewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback” in IEEE Int. conf. on robotics and automation, 2008, pp. 3100-3105.9
- 11. 10SETUP OVERVIEW
- 12. MEMS microgripperFT-G100FT-G60F = k . VoltageA’ – Gripper actuating armA’’ – Comb-fingersB – Force sense circuitC’ – Gripper actuating armsC’’ – Comb fingers11
- 13. 12Displacement characteristicsFT-G100FT-G60R2 = 0.99R2 = 0.99…(ii)…(i)
- 14. 13Haptic interfaceSchematic Diagram of Haptic ControlsHaptic gives the ability to perceive and manipulate micro-scale objects.It is a 3 DOF deviceThe X,Y,Z on the diagram shows the axial operation of manipulator assembly.
- 15. Micromanipulator, Probing Solutions Inc.Rotary motion of Y, Z couplers produces axial motion of rodThe Y, Z from the diagram shows the axial operation of manipulator assemblyCoupled screw causes deviation of orthogonal axial motion in the rod14Three axis positionerSchematic representation of Y, Z positioner
- 16. 15Three axis positionerSchematic representation of X positionerAssembly of X positionerLinear stage (Newport)Rotary motion of X coupler produces axial motion of stageThe stage motion is shown in the assembly
- 17. Comparison of axial motion and lateral motion16ResultsCalibration conditions:Half-step mode of stepper motor1 complete rotation of stepper motorClockwise and counter clockwise10 iterations
- 18. Stepper motor resolutionAxial step resolution of all X-Y-Z axes operating at Half step mode Operational Step modes17X and Y combined result
- 20. 19Labview controls (VI)Video Feed Automatic PositionerOperation Speed Haptic ControlsForce sense
- 21. Manipulation results polystyrene beadsmems devicesmems chessboard20
- 22. 21Manipulation sequenceManipulation of Polystyrene beads to form assembled structure
- 23. 22Assembled microspheresPolystyrenebead ˜ 45µmGlass SlideMicroscope image of assembled polymer beads taking the shape of a double T (TTU symbol).
- 24. Manipulation resultspolystyrene beads mems devicesmems chessboard23
- 25. 24Summit – V Process AutoCAD layout Cross-sectional view of SUMMiT - V process Packaged chip
- 26. 252009 nano category MEMS chipA – Microscopic bird’s eye view of chipB – Portion of the chip with detachable devicesC – Microscopic image: Microgripper is positioned for handling MEMS devices
- 27. 26SUMMiT-V Microgripper (SMG)DESIGNMODELINGFEA modeling using ANSYSApplied voltage 4 voltsObserved total opening 31µmA – SMG arm tip initial opening 7µmB – bond pad with steps at endC – Mechanical stop (spring )D – Hot/ Cold arm actuator
- 28. 27SUMMiT-V Microgripper (smg)Cross-sectional view of slider mechanismSlider travel distance ~27µmExperimental setup showing FT-G60 on a holder, assembly platform, Y-Z manipulator rod, X stage.
- 29. Off-chip devices - SMG28
- 30. Manipulation resultspolystyrene beadsmems devicesmems chessboard29
- 31. Micro-chessboardFabricated by Sandia National Labs, 2009 1mm x 1mm
- 32. Inspiration from SPICE (Susan Polger)
- 33. P1 – P4 (P4 – stub)
- 34. Off – chip manipulation
- 35. Test the limits of X-Y-Z positioner30
- 36. 31Game on – ‘queen’ calls check!123 456789
- 37. 32Recent media attentionSandia Lab news, June 4 2010TTU daily news, July 16 2010 450µm x 450µm
- 38. Robotic arm moving pieces
- 39. P1 – P4 (P4 – stub)
- 40. On – chip manipulationhttp://www.sandia.gov/LabNews/100604.htmlhttp://www.popsci.com/gadgets/article/2010-06/microbarbershop-micro-chessboard-actually-work-winning-sandia-design-awards
- 41. CONCLUSIONA mesoscale (~24mm) to microscale (~0.3µm) controlled manipulation system has been designed, developed and integrated with a high-fidelity three-dimensional force feedback haptic device.
- 42. Demonstrated micro – object handling using MEMS gripper and haptic interface.
- 43. This system will be used for precision handling of biological cells, other small objects, and micro assembly applications.Results achieved:Travel range – ~0 to ± 12mmStep resolution – ~<0.5µmOperating speed achieved ~100µm/min. (VI controlled)Handling forces – observed 50µN while handling SF-9 cells1 conf. paper published, SPIE – MEMS MOEMS, Jan 2010. MEMS micropositioning tool, RSI AIP (exp. Jul, 2010).MEMS device handling and assembly (exp. Jul-Aug, 2010).33
- 44. 34AcknowledgmentsDr. Tim DallasDr. Richard GaleDr.Stephen BayneKim Zinsmeyer, Phil Cruzan (Phy.)Dr.GullermoAltenberg (TTU HSC)Dr. Michael Sanfrancisco (Biology)Dr. Brenda Rodgers (Biology)Dr. Lauren Gollahon (ESB & Biol.)Dr. Siva Vanapalli (Chemical)GanapathySivakumarAlex Holness (MANDE 2009)KiranKolluruCharlie AndersonGabriel RamirezPiyush GuptaSahil OakSandeshRawoolSunder RajanFUNDING & SUPPORT
- 45. 35
- 46. 36BACKUPSLIDES
- 48. OTHER SIMILAR WORK Y. Sun and B.J. Nelson, “Biological cell injection using an autonomous microrobotic system,” Int. J. Robot. Res., Vol. 21, No. 10-11, pp. 861- 868, 2002. W.H. Wang, X.Y. Liu, D. Gelinas, B. Ciruna, and Y. Sun, “A fully automated robotic system for microinjection of zebrafish embryos,” PLoS ONE, Vol. 2, No. 9, e862. doi:10.1371/ journal. pone.0000862, 2007. Y. Kimura and R. Yanagimachi, “Intracytoplasmic sperm injection in the mouse,” Biol. Reprod., Vol. 52, pp. 709-720, 1995.38
- 49. VOLTAGE COMPARISON39*Results obtained from fluid media environment
- 50. 40Off-chip devices - chevronOff – chip Chevron fabricated using SUMMiT V process.100μm100μmDevice operating range:V = 0 – 15V (at 22mA)Displacement 0μm to 12μmGlass slide
- 51. 41Off-chip devices - SMGSandia Microgripper (SMG) fabricated using SUMMiT V process.60μmLiquid mediaDevice operating range:V = 0 – 15V (at 22mA)Working range 8μm to 32μm
Editor's Notes
- #18: Join graph 1 and 2