ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES FRAMEWORK ONE TECHNOLOGICAL PROCESS. ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL LAYERS

International Journal on Organic Electronics (IJOE) Vol.6, No.1, January 2017
DOI: 10.5121/ijoe.2017.6101 1
ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL
EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHAS-
ES FRAMEWORK ONE TECHNOLOGICAL PROCESS.
ON POSSIBILITY TO CHANGE PROPERTIES OF EPI-
TAXIAL LAYERS
E.L. Pankratov and E.A. Bulaeva
Nizhny Novgorod State University, 23 Gagarin avenue,
Nizhny Novgorod, 603950, Russia
ABSTRACT
We analyzed nonlinear model with varying in space and time coefficients of growth of epitaxial layers
from gas phase in a vertical reactor with account native convection. We formulate several conditions to
increase homogeneity of epitaxial layers with varying of technological process parameters.
KEYWORDS
Gas phase epitaxy; native convection; increasing of homogeneity of films; analytical approach for model-
ing
1. INTRODUCTION
In the present time different heterostructures are using to manufacture solid state electronic de-
vices. The most common methods for growing heterostructures are epitaxy from gas and liquid
phase, magnetron sputtering, molecular beam epitaxy. The are many experimental works de-
scribe manufacturing and growth of heterostructures [1-11]. At the same time essentially smaller
quantity of works describes prognosis of epitaxy processes [12]. Main aim of the present paper is
prognosis changing of properties of growing of epitaxial layers with changing of parameters of
technological process with account native convection.
Framework the paper we consider gas phase epitaxy vertical reactor (see Fig. 1). The reactor
consist of an external casing, keeper of substrate with a substrate and a spiral around the casing
in area of the substrate to generate induction heating to activate chemical reactions of decay of
reagents and to growth of the epitaxial layer. A mixture of gas reagents and gas-carrier inputs
into inlet of the reactor from Fig. 1. Our main aim framework the paper is analysis of properties
of growing of epitaxial layers on growth parameters with account native convection.

2
Fig. 1. Scheme of a reactor for gas phase epitaxy in area of reaction zone
2. METHOD OF SOLUTION
We solve our aim by calculation and analysis of distribution of temperature in space and time.
We calculate the distribution as solution of the following equation [13]
( ) ( ) ( )[ ]{ −⋅+= tzrTgraddivtzrp
t
tzrT
c ,,,,,,
,,,
ϕλϕ
∂
ϕ∂
( ) ( )[ ] ( ) ( ) ( )}tzrCtzrTTctzrvtzrv ,,,,,,,,,,,, ϕϕϕϕ ⋅⋅⋅−−
rr
. (1)
Here vector v
r
describes speed of flow of mixture of gases; c is the heat capacity; T (r,ϕ,z,t) is the
spatio-temporal distribution of temperature; p (r,ϕ,z,t) is the density of power in the system sub-
strate - keeper of substrate; r, ϕ, z and t are the cylindrical coordinates and time; C(r,ϕ,z,t) is the
spatio-temporal distribution of concentration of mixture of gases; λ is the heat conductivity.
Value of heat conductivity could be determine by the following relation: 3ρλ vclv= , where v
is the modulus of mean squared speed of the gas molecules. The modulus is equal to following
square root mTkv 2= , parameter l describes the average free path of gas molecules be-
tween collisions, parameter cv describes the specific heat at constant volume, parameter ρ de-
scribes the density of gas.
We solve the considered boundary problem with account moving of gases mixture. We calculate
the spatio-temporal distribution of speed of mixture by coupling solving the equation of Navier-
Stokes and the second Fourier law. We also assume that (i) radius of keeper of substrate R very
large in comparison with thickness of diffusion and near-boundary layers, (ii) stream of gas is
laminar. In this situation required equations to describe spatio-temporal distributions of tempera-
ture and concentration of mixture of gases
( ) v
P
vv
t
v rrr
r
∆+





−∇=∇⋅+ ν
ρ∂
∂
, (2)
( ) ( )[ ] ( )[ ] ( ){ }tzrCvtzrvtzrCgradDdiv
t
tzrC
,,,,,,,,,
,,,
ϕϕϕ
∂
ϕ∂
⋅−−⋅=
rr
. (3)
Here parameter D describes diffusion coefficient of mixture of gases (gases-carrier and gas-rea-
gents); P is the pressure; ρ is the density of mixture of gases; ν is the kinematic viscosity.

3
Framework the paper we consider regime of the limiting flow. In this situation all forthcoming to
the disk molecules of deposit material are deposing on the substrate, flow is homogenous and
one dimension. In this case boundary and initial conditions could be written as
C(r,ϕ,-L,t)=C0, C(r,ϕ,0,t)=0, C(r,0,z,t)=C(r,2π,z,t), C(r,ϕ,z,0)=C0δ(z+L), C(0,ϕ,z,t)≠∞,
( ) 0
,,,
=
∂
∂
=Rr
r
tzrC ϕ
,
( ) ( )
πϕϕ
ϕ
ϕ
ϕ
ϕ
20
,,,,,,
==
∂
∂
=
∂
∂ tzrCtzrC
,
( ) ( )tzRT
r
tzrT
Rr
,,,
,,, 4
ϕσ
ϕ
λ =
∂
∂
−
=
,
( ) ( )
πϕϕ
ϕ
ϕ
ϕ
ϕ
20
,,,,,,
==
∂
∂
=
∂
∂ tzrTtzrT
,
( ) ( )tLrT
z
tzrT
Lz
,,,
,,, 4
−=
∂
∂
−
−=
ϕσ
ϕ
λ ,
( ) 0
,,,
0
=
∂
∂
=r
r
r
tzrv ϕ
,
( ) ( )
πϕ
ϕ
ϕ
ϕ
ϕ
ϕ
ϕ
ϕ
20
,,,,,,
==
∂
∂
=
∂
∂ tzrvtzrv
,
( ) ( )
πϕ
ϕ
ϕ
ϕ
ϕ
ϕ
ϕ
ϕ
20
,,,,,,
==
∂
∂
=
∂
∂ tzrvtzrv
,
( ) 0
,,,
=
∂
∂
=Rr
r
r
tzrv ϕ
, (4)
( ) ( )tzrT
z
tzrT
Lz
,,,
,,, 4
ϕσ
ϕ
λ =
∂
∂
−
=
, T(r,0,z,t)=T(r,2π,z,t), T(r,ϕ,z,0)=Tr, T(0,ϕ,z,t) ≠ ∞, vr(r,ϕ,
-L,t)=0, vr(r,ϕ,0,t)=0, vr(r,ϕ,L,t)=0, vr(r,0,z,t)=vr(r,2π,z,t), vr(0,ϕ,z,t)≠∞, vϕ(r,ϕ,0,t)=ωr,
vϕ(r,ϕ,-L,t)=0,vϕ(r,ϕ,L,t)=0,vϕ(r,0,z,t)=vϕ(r,2π,z,t),vϕ(0,ϕ,z,t)≠∞, vz(r,ϕ,-L,t)=V0, vz(r,ϕ,L,t)=0,
( ) zz vtrv =,0,,ϕ ,vz(r,0,z,t)=vz(r,2π,z,t),vz(0,ϕ,z,t)≠∞,vr(r,ϕ,z,0)=0,vϕ(r,ϕ,z,0)=0,vz(r,ϕ,-L,0)=V0,
where σ =5,67⋅10-8
W⋅m-2
⋅K-4
, Tr is the room temperature, ω is the frequency of rotation of sub-
strate. We assume, that velocity of mixture of gases at z=L has been chosen as minimal to de-
crease energy cost during growth of heterostructure.
Equations for components of velocity of flow with account cylindrical system of coordinate
could be written as






∂
∂
−





+−++−−−=
ρ∂∂
∂
∂
∂
∂∂
∂
∂
∂
ν
∂
∂
ϕ∂
∂
∂
∂
∂
∂ ϕϕ P
rzr
v
z
v
zr
v
r
v
z
v
v
v
r
v
r
v
v
t
v zrrrz
z
r
r
r
2
2
22
2
2
(5a)
+−−−=
z
v
v
v
r
v
r
v
v
t
v z
z
r
r
∂
∂
ϕ∂
∂
∂
∂
∂
∂ ϕϕϕ






∂
∂
−







+−++
ρϕ∂
∂
∂ϕ∂
∂
ϕ∂
∂
ϕ∂∂
∂
ν ϕϕ P
rz
v
z
v
r
v
rr
v
r
rr 1121
2
22
22
2
2
2
(5b)






∂
∂
−





+++−−−=
ρϕ∂
∂
∂
∂
∂
∂
ν
∂
∂
ϕ∂
∂
∂
∂
∂
∂ ϕϕ P
z
v
rr
v
z
v
z
v
v
v
r
v
r
v
v
t
v zzrz
z
r
r
z
2
2
22
2
2
2
1
. (5c)
We solve the above equations by using of method of averaging of function corrections [14-19].
The solution is presented in Appendix.
We calculate all required values (speed of stream of mixture of materials in gas phase: gases-re-
agents and gas-carrier; concentration of mixture of gases; temperature of growth) framework the
second-order approximation framework method of averaging of function corrections. Recently
we obtain, that the second-order approximation gives enough good approximation to make quali-
tative analysis of obtained solution and to obtain some quantitative results. These approximations
are presented in Appendix.
To solve Eqs.(1) and (3) we re-write them by using cylindrical system of coordinate

4
( ) ( ) ( ) ( ) ( ){ ⋅
∂
∂
⋅−





++= tzrC
r
c
z
tzrTtzrT
rr
tzrT
t
tzrT
c ,,,
,,,,,,1,,,,,,
2
2
2
2
22
2
ϕ
∂
ϕ∂
ϕ∂
ϕ∂
∂
ϕ∂
λ
∂
ϕ∂
( ) ( ) ( )[ ]} ( ) ( )[ ] ( ){ ⋅⋅−
∂
∂
−−⋅⋅ tzrCtzrvtzrv
r
c
tzrvtzrvtzrT rr ,,,,,,,,,,,,,,,,,, ϕϕϕ
ϕ
ϕϕϕ ϕϕ
( )} ( ) ( )[ ] ( ) ( ){ } ( )tzrptzrTtzrCtzrvtzrv
z
ctzrT zz ,,,,,,,,,,,,,,,,,, ϕϕϕϕϕϕ +⋅⋅−
∂
∂
⋅−⋅ , (12)
( ) ( ) ( ) ( ) −





+





+





=
z
tzrC
D
z
tzrC
D
rr
tzrC
Dr
rrt
tzrC
∂
ϕ∂
∂
∂
ϕ∂
ϕ∂
ϕ∂
∂
∂
ϕ∂
∂
∂
∂
ϕ∂ ,,,,,,1,,,1,,,
2
( ) ( ) ( )[ ]{ } ( ) ( ) ( )[ ]{ }−−⋅−−⋅− tzrvtzrvtzrCr
r
tzrvtzrvtzrCr
rr
rr ,,,,,,,,,
1
,,,,,,,,,
1
ϕϕϕ
ϕ∂
∂
ϕϕϕ
∂
∂
ϕϕ
( ) ( ) ( )[ ]{ }tzrvtzrvtzrC
z
zz ,,,,,,,,, ϕϕϕ
∂
∂
−⋅− . (13)
3. DISCUSSION
In this paper we analyzed spatio-temporal distributions of gas and temperature during growth of
epitaxial layers from gas phase to formulate conditions for improvement of properties of epitaxi-
al layers. Fig.2 shows concentration of mixture of reagents near epitaxial layer on frequency of
rotation of substrate. Curve 1 describes dependence of concentration of reagents on the frequen-
cy of rotation of substrate at atmospheric pressure without taking into account native convection
(at low temperature of growth one can neglect by native convection). Curve 2 describes depend-
ence of concentration of reagents on the frequency of rotation of substrate at low pressure (10 %
of atmospheric pressure) without taking into account native convection. Curve 3 describes de-
pendence of concentration of reagents on the frequency of rotation of substrate at atmospheric
pressure with account native convection. Increasing of temperature of growth leads to increasing
of influence of native convection on growth process. The Fig.2 shows, that increasing of fre-
quency of rotation of substrate gives a possibility to increase homogeneity of distribution of con-
centration deposited on the substrate material on radius of the substrate. The Fig. 3 shows, that
concentration of concentration of material of epitaxial layer on diffusion coefficient D. Curve 1
describes dependence of concentration of reagents on the diffusion coefficient at atmospheric
pressure without taking into account native convection. Curve 2 describes dependence of concen-
tration of reagents on the diffusion coefficient at low pressure (10 % of atmospheric pressure)
without taking into account native convection. Curve 3 describes dependence of concentration of
reagents on the diffusion coefficient at atmospheric pressure with account native convection. One
can find from the figure, that monotonous decreasing of the considered concentration. With in-
creasing of diffusion coefficient one can find increasing of speed of transport of gases and de-
creasing of quantity of reagents in reaction zone due to higher speed of gases. In this situation
one can find decreasing of speed of growth of epitaxial layer. Value of diffusion coefficient will
be smaller with decreasing of temperature of grown. At the same time decreasing of growth tem-
perature leads to deceleration of chemical reaction.

5
0 2 4 6 8 10
ω, rad/s
0.0
0.5
1.0
C/C0
2
1
3
Fig. 2. Dependences of concentration of gaseous mixture on frequency of rotation of substrate
0 2 4 6 8 10
D, cm2
/s
0.0
0.5
1.0
C/C0
1
2
3
Fig. 3. Dependences of concentration of gaseous mixture on diffusion coefficient
Dependence of gaseous mixture concentration on kinematical viscosity ν is presented on Fig. 4.
Designations curves in this figure are the same as in the previous two. Increasing of the viscosity
leads to decreasing of the concentration due to deceleration of gas transport. Fig. 5 shows de-
pendences of the considered gaseous mixture concentration on inlet speed of gases V0 is present-
ed on Fig. 5. Curve 1 describes dependence of concentration of reagents on the speed V0 at at-
mospheric pressure without taking into account native convection. Curve 2 describes dependence
of concentration of reagents on the speed V0 at low pressure (10 % of atmospheric pressure)
without taking into account native convection. Curve 3 describes dependence of concentration of
reagents on the speed V0 at atmospheric pressure with account native convection. Increasing of
the parameter V0 gives a possibility to increasing the concentration of reagents in reaction zone
and to increase speed of growth of epitaxial layers.

6
Fig. 4. Dependence of concentration of mixture of gases on kinematical viscosity ν
0 5 10 15
V0 , cm/s
0.00
0.25
0.50
0.75
1.00
C/C0
1 2
3
Fig. 5. Dependences of concentration of mixture of gases on inlet speed
Analysis of spatio-temporal distribution of gaseous mixture concentration shows, that decreasing
of pressure in the reactor leads to reducing the inertness of the considered processes of mass and
heat transport. Native convection leads to deceleration of growth of epitaxial layers. It should be
noted, that it is necessary to choose value of power of induction heating of growth area to com-
pensate heat loss due to convective heat [21]. In this case heating time ϑ could be estimated
framework recently introduced approach [22] and could be calculated as ϑ ≈(6π -1)R2
/24λ0,
where λ0 is the average value of heat conductivity. In this case power, which is necessary to
compensate losing of heat during manufacturing of epitaxial layer, could be estimated by using
the following relation: ( ) ( ) ( ) 24
0
4,,,,,,,,, LRtzRvtzRTrdtzrpr z
R
πϕϕσϕ ⋅Θ+⋅≈∫ ⋅ .
4. CONCLUSIONS
In the present paper we analyzed dependences of dynamics of mass and heat transport in reactors
for epitaxy from gas phase on physical and technological parameters. We compare growth re-
gimes at atmospheric and at low pressure and analyzed influence of native convection on growth
of epitaxial layers. Accounting the calculated results it have been formulated recommendations
to improve properties of epitaxial layers.

7
ACKNOWLEDGEMENTS
This work is supported by the agreement of August 27, 2013 № 02.В.49.21.0003 be-
tween The Ministry of education and science of the Russian Federation and Lobachevsky
State University of Nizhni Novgorod.
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Authors:
Pankratov Evgeny Leonidovich was born at 1977. From 1985 to 1995 he was educated in a secondary
school in Nizhny Novgorod. From 1995 to 2004 he was educated in Nizhny Novgorod State University:
from 1995 to 1999 it was bachelor course in Radiophysics, from 1999 to 2001 it was master course in
Radiophysics with specialization in Statistical Radiophysics, from 2001 to 2004 it was PhD course in
Radiophysics. From 2004 to 2008 E.L. Pankratov was a leading technologist in Institute for Physics of
Microstructures. From 2008 to 2012 E.L. Pankratov was a senior lecture/Associate Professor of Nizhny
Novgorod State University of Architecture and Civil Engineering. Now E.L. Pankratov is in his Full Doc-
tor course in Radiophysical Department of Nizhny Novgorod State University. He has 140 published pa-
pers in area of his researches.
Bulaeva Elena Alexeevna was born at 1991. From 1997 to 2007 she was educated in secondary school of
village Kochunovo of Nizhny Novgorod region. From 2007 to 2009 she was educated in boarding school
“Center for gifted children”. From 2009 she is a student of Nizhny Novgorod State University of Architec-
ture and Civil Engineering (spatiality “Assessment and management of real estate”). At the same time she
is a student of courses “Translator in the field of professional communication” and “Design (interior art)”
in the University. E.A. Bulaeva was a contributor of grant of President of Russia (grant № MK-
548.2010.2). She has 75 published papers in area of her researches.
Appendix
We determine solution of system of equations for components of speed of mixture by using of
method of averaging of function corrections. Framework this approach to determine the first-
order approximation of components of speed of flow of mixture of gases we replace of the re-
quired functions on their average values vr→α1r, vϕ→α1ϕ, vz→α1z in right sides of equations of
system (5). After the replacement we obtain equations for the first-order approximations of the
components






∂
∂
−=
ρ∂
∂ P
rt
v r1
, 





∂
∂
−=
ρϕ∂
∂ ϕ P
rt
v 11
, 





∂
∂
−=
ρ∂
∂ P
zt
v z1
. (6)
Solutions of the Eqs.(6) could be written as
∫
∂
∂
−=
t
r d
P
r
v
0
1 τ
ρ
, ∫
∂
∂
−=
t
d
P
r
v
0
1
1
τ
ρϕ
ϕ , ∫
∂
∂
−=
t
z d
P
z
v
0
1 τ
ρ
. (7)
One can obtain the second-order approximations of components of speed of flow by replacement
of the required functions on the following sums vr→α1r, vϕ→α1ϕ, vz→ α1z. Approximations for
the components could be written as
−





∂
∂
−





+−+=
ρ∂∂
∂
∂
∂
∂∂
∂
∂
∂
ν
∂
∂ P
rzr
v
z
v
zr
v
r
v
t
v zrrrr 1
2
2
1
2
1
2
2
1
2
2
( )
( ) ( )
z
v
v
v
r
v
r
v
v r
zz
rr
rr
∂
∂
α
ϕ∂
∂α
∂
∂
α ϕϕ 1
12
1121
12 +−
+
−+− , (8a)

9
−





∂
∂
−







+−+=
ρϕ∂
∂
∂ϕ∂
∂
ϕ∂
∂
ϕ∂∂
∂
ν
∂
∂ ϕϕϕ P
rz
v
z
v
r
v
rr
v
rt
v rr 1121
2
1
2
1
2
22
1
2
2
1
2
2
( )
( ) ( )
z
v
v
v
r
v
r
v
v zzrr
∂
∂
α
ϕ∂
∂α
∂
∂
α ϕϕϕϕϕ 1
12
1121
12 +−
+
−+− , (8b)
−





∂
∂
−





++=
ρϕ∂
∂
∂
∂
∂
∂
ν
∂
∂ P
z
v
rr
v
z
v
t
v zzrz
2
1
2
22
1
2
2
1
2
2 1
( )
( ) ( )
z
v
v
v
r
v
r
v
v z
zz
zz
rr
∂
∂
α
ϕ∂
∂α
∂
∂
α ϕϕ 1
12
1121
12 +−
+
−+− . (8c)
Integration of the above equations leads to the following result
−





∫
∂
∂
−∫ 





+−+=
tt
zrrr
r d
P
r
d
zr
v
z
v
zr
v
r
v
v
00
1
2
2
1
2
1
2
2
1
2
2 τ
ρ
τ
∂∂
∂
∂
∂
∂∂
∂
∂
∂
ν
( )
( ) ( )∫ +−∫
+
−∫ +−
t
r
zz
t
r
t
r
rr d
z
v
vd
v
r
v
d
r
v
v
0
1
12
0
112
0
1
12 τ
∂
∂
ατ
ϕ∂
∂α
τ
∂
∂
α ϕϕ
, (8d)
−





∫
∂
∂
−∫ 







+−+=
tt
rr
d
P
r
d
z
v
z
v
r
v
rr
v
r
v
00
2
1
2
1
2
22
1
2
2
1
2
2
1121
τ
ρϕ
τ
∂
∂
∂ϕ∂
∂
ϕ∂
∂
ϕ∂∂
∂
ν ϕϕ
ϕ
( )
( ) ( )∫ +−∫
+
−∫ +−
t
zz
tt
rr d
z
v
vd
v
r
v
d
r
v
v
0
1
12
0
112
0
1
12 τ
∂
∂
ατ
ϕ∂
∂α
τ
∂
∂
α ϕϕϕϕϕ
, (8e)
−





∫
∂
∂
−∫ 





++=
tt
zzr
z d
P
z
d
v
rr
v
z
v
v
00
2
1
2
22
1
2
2
1
2
2
1
τ
ρ
τ
ϕ∂
∂
∂
∂
∂
∂
ν
( )
( )( ) ( )∫ +−∫ +
+
−∫ +−
t
z
zz
t
z
t
z
rr d
z
v
vd
v
v
r
v
d
r
v
v
0
1
12
0
1
12
12
0
1
12 τ
∂
∂
ατ
ϕ∂
∂
α
α
τ
∂
∂
α ϕϕ
ϕϕ
. (8f)
We determine average values α2r, α2ϕ, α2z by the following relations
( )∫ ∫ ∫ ∫ −
Θ
=
Θ
−0 0
2
0
1222
1 R L
L
rrr tdrddzdvvr
LR
π
ϕ
π
α , ( )∫ ∫ ∫ ∫ −
Θ
=
Θ
−0 0
2
0
1222
1 R L
L
tdrddzdvvr
LR
π
ϕϕϕ ϕ
π
α ,
( )∫ ∫ ∫ ∫ −
Θ
=
Θ
−0 0
2
0
1222
1 R L
L
zzz tdrddzdvvr
LR
π
ϕ
π
α , (9)
where Θ is the continuance of moving of mixture of gases through reactor. Substitution of both
(the first- and the second-order) approximations of the required components of the considered
speed into the relation (9) give us possibility to obtain system of equations to determine required
average values





=++
=++
=++
3232323
2222222
1212121
DCBA
DCBA
DCBA
zr
zr
zr
ααα
ααα
ααα
ϕ
ϕ
ϕ
(10)

10
Here ( )∫ ∫ ∫ ∫−Θ+=
Θ
−0 0
2
0
1
1 1
R L
L
r
tdrddzd
r
v
rtA
π
ϕ
∂
∂
, ( )∫ ∫ ∫ ∫−Θ=
Θ
−0 0
2
0
1
1
R L
L
r
tdrddzd
v
tB
π
ϕ
ϕ∂
∂
, == 21 CC
0
22
2
VRΘ=
π
, ( ) ×Θ−∫ ∫ ∫ ∫ 





+−+−Θ=
Θ
−
22
0 0
2
0
1
2
2
1
2
1
2
2
1
2
1
8
Rtdrddzd
zr
v
z
v
zr
v
r
v
rtD
R L
L
zrrr π
ϕ
∂∂
∂
∂
∂
∂∂
∂
∂
∂
ν
π
( ) ( )∫ ∫ ∫ ∫−Θ−∫ ∫ ∫ ∫−Θ−×
Θ
−
Θ
− 0 0
2
0
1
1
0 0
2
0
1
1
2
0
R L
L
r
R L
L
r
r tdrddzd
v
vttdrddzd
r
v
vrtV
π
ϕ
π
ϕ
ϕ∂
∂
ϕ
∂
∂
, ( )×∫ −Θ=
Θ
0
2 tA
∫ ∫ ∫×
−
R L
L
r
tdrddzd
r
v
r
0
2
0
1
π
ϕ
∂
∂
, ( )∫ ∫ ∫ ∫−Θ+=
Θ
−0 0
2
0
1
2 1
R L
L
r
tdrddzd
v
tB
π
ϕ
ϕ∂
∂
, ( ) ×∫ ∫ ∫ ∫ 


−Θ=
Θ
−0 0
2
0
2
1R L
L r
rtD
π
ν
( ) ×∫ ∫ ∫ ∫−Θ−Θ−




+−+×
Θ
−0 0
2
0
12
0
22
2
1
2
1
2
22
1
2
2
1
2
8
12 R L
L
rrr
r
v
rtVRtdrddzd
z
v
z
v
r
v
rr
v π
ϕϕ
∂
∂π
ϕ
∂
∂
∂ϕ∂
∂
ϕ∂
∂
ϕ∂∂
∂
( )∫ ∫ ∫ ∫−Θ−×
Θ
−0 0
2
0
1
11
R L
L
r
r tdrddzd
v
vttdrddzdv
π
ϕ ϕ
ϕ∂
∂
ϕ , ( ) ∫ ∫∫ ∫−Θ=
−
Θ π
ϕ
∂
∂2
0
1
0 0
3
L
L
z
R
tdrddzd
r
v
rtA ,
( )∫ ∫ ∫ ∫−Θ=
Θ
−0 0
2
0
1
3
R L
L
z
tdrddzd
v
rtB
π
ϕ
ϕ∂
∂
, 0
22
3
2
1 VRC Θ+=
π
, ( )∫ ∫ ∫ ∫


++−Θ=
Θ
−0 0
2
0
2
1
2
2
1
2
3
R L
L
zr
r
v
z
v
rtD
π
∂
∂
∂
∂
ν
( ) ×∫ ∫ ∫ ∫−∫ ∫ ∫ ∫−Θ−


+
Θ
−
Θ
− 0 0
2
0
1
1
0 0
2
0
1
12
1
2
2
1 R L
L
z
R L
L
z
r
z
rddzd
v
vrtdrddzd
r
v
vrttdrddzd
v
r
π
ϕ
π
ϕ
ϕ∂
∂
ϕ
∂
∂
ϕ
ϕ∂
∂
( ) 82
0
22
VRtdt Θ−−Θ× π .
Solution of the above system of equations could be determined by standard approaches [19] and
could be written as
∆∆= rr2α , ∆∆= ϕϕα2 , ∆∆= zz2α , (11)
where ( ) ( ) ( )233212332123321 BABACCACABCBCBA −+−−−=∆ , ( ) ( −−−=∆ 3223321 CDCBCBDr
) ( )23321123 BDBDCBCD −+− , ( ) ( ) ( )233212332123321 BDBDCCDCDBCBCBD −+−−−=∆ϕ ,
( ) ( ) ( )233212332123321 BABADDADABDBDBAz −+−−−=∆ .
We solve Eqs.(12) and (13) we used method of average of function corrections. We calculate the
first- order approximations of the by replacement of them on their not yet known average values
α1T and α1C in right sides of the above equations. Farther we used recently consider algorithm to
obtain the first-order approximations of temperature and concentration of gas mixture
( ) ( ) ( ) ( )[ ] −∫
∂
−∂
−∫+=
t
rr
CT
t
r d
r
zrvzrv
d
c
zrp
TtzrT
0
11
0
1
,,,,,,,,,
,,, τ
τϕτϕ
αατ
τϕ
ϕ
( ) ( )[ ] ( ) ( )[ ]
∫
∂
−∂
−∫
∂
−∂
−
t
zz
CT
t
CT
d
z
zrvzrv
d
zrvzrv
r 0
11
0
11 ,,,,,,,,,,,,
τ
τϕτϕ
αατ
ϕ
τϕτϕαα ϕϕ
, (14)
( ) ( ) ( )[ ]{ } −∫
−
−=
t
rrC
d
r
zrvzrvr
r
CtzrC
0
1
01
,,,,,,
,,, τ
∂
τϕτϕ∂α
ϕ
( ) ( )[ ] ( ) ( )[ ]
∫
−
−∫
−
−
t
zz
C
t
C
d
z
zrvzrv
d
zrvzrv
r 0
1
0
1 ,,,,,,,,,,,,
τ
∂
τϕτϕ∂
ατ
ϕ∂
τϕτϕ∂α ϕϕ
. (15)
The above not yet known average values could be determined by the standard relations

11
( )∫ ∫ ∫ ∫
Θ
=
Θ
−0 0
2
0
121 ,,,
1 R L
L
T tdrddzdzrTr
LR
π
ϕτϕ
π
α ,
( )∫ ∫ ∫ ∫
Θ
=
Θ
−0 0
2
0
121 ,,,
1 R L
L
C tdrddzdzrCr
LR
π
ϕτϕ
π
α . (16)
Substitution of the first-order approximations of temperature and concentration of gas mixture
into relations (16) gives us the following results [20]
( ) ( ) ( )[ ]





 Θ
+∫ ∫ ∫ −−Θ
Θ
+⋅=
Θ
− LR
V
tddzdtzRvtzRvt
LR
LC
L
L
rrC
0
0
2
0
01 ,,,,,,
1
1
π
ϕϕϕ
π
α ,
( ) ( ) ( )[





∫ ∫ ∫ −
Θ
+





∫ ∫ ∫ ∫−Θ
Θ
+=
Θ
−
Θ
− 0
2
0
2
0
0 0
2
0
21 ,,,1
,,,1 ππ
τϕ
π
ϕ
ϕ
π
α
L
L
r
R L
L
rT zRv
RL
C
tdrddzd
c
tzrp
rt
LR
T
( )] ( ) ( ) ( ) ( )[ ] ×∫ ∫ ∫ ∫ −−Θ
Θ
−−Θ−
Θ
−0 0
2
0
2
,,,,,,
1
,,,
R L
L
rrr tdrddzdtzrvtzrvt
R
tdtdzdzRv
π
ϕϕϕ
π
ϕτϕ
( ) ( ) ( )[ ] 








 Θ
++∫ ∫ ∫ −−Θ
Θ


+
−
Θ
−
1
0
0
2
0
0
1,,,,,,
1
2 LR
V
tddzdzRvzRvt
LR
V L
L
rr
π
ϕτϕτϕ
π
.
The second-order approximations of temperature and concentration of gaseous mixture have
been calculated framework the method of averaging of function corrections [14-19], i.e. by re-
placement of the required functions in right sides of equations (12) and (13) on the following
sums T→α2T +T1, C→α2C +C1. In this case the second-order approximations of the above re-
quired functions could be written as
( )
( ) ( ) ( )
++∫+∫+∫=⋅ r
ttt
Td
z
zrT
d
zrT
r
d
r
zrT
tzrTc
0
2
1
2
0
2
1
2
2
0
2
1
2
2
,,,,,,1,,,
,,, τ
∂
τϕ∂
λτ
ϕ∂
τϕ∂
λτ
∂
τϕ∂
λϕ
( ) ( ) ( )[ ] ( )[ ] ( )[ ]{ } −∫ +⋅+⋅−
∂
∂
⋅−∫+
t
TCrr
t
dzrTzrCzrvzrv
r
cdzrp
0
1212
0
,,,,,,,,,,,,,,, ττϕατϕατϕτϕττϕ
( )[ ] ( ) ( )[ ] ( )[ ]{ } −∫ +⋅−⋅+
∂
∂
−
t
TC dzrTzrvzrvzrC
r
c
0
1212 ,,,,,,,,,,,, ττϕατϕτϕτϕα
ϕ
ϕϕ
( ) ( )[ ] ( )[ ] ( )[ ]{ }∫ +⋅+⋅−
∂
∂
⋅−
t
TCzz dzrTzrCzrvzrv
z
c
0
1212 ,,,,,,,,,,,, ττϕατϕατϕτϕ
( ) ( )[ ] ( )[ ] ( )[ ]{ }∫ +⋅+⋅−
∂
∂
⋅−
t
TCzz dzrTzrCzrvzrv
z
c
0
1212 ,,,,,,,,,,,, ττϕατϕατϕτϕ (16)
( )
( ) ( )
( )+++∫+∫= LzCd
zrC
D
r
d
r
zrC
Dr
rr
tzrC
tt
δτ
ϕ∂
τϕ∂
ϕ∂
∂
τ
∂
τϕ∂
∂
∂
ϕ 0
0
1
2
0
1
2
,,,1,,,1
,,,
( ) ( )[ ] ( ) ( )[ ] −






∫ −⋅+−∫+
t
rrC
t
dzrvzrvzrCr
rr
d
z
zrC
D
z 0
12
0
1
,,,,,,,,,
1,,,
ττϕτϕτϕα
∂
∂
τ
∂
τϕ∂
∂
∂
( )[ ] ( ) ( )[ ] −∫ −⋅+−
t
C dzrvzrvzrC
r 0
12 ,,,,,,,,,
1
ττϕτϕτϕα
ϕ∂
∂
ϕϕ
( )[ ] ( ) ( )[ ]∫ −⋅+−
t
zzC dzrvzrvzrC
z 0
12 ,,,,,,,,, ττϕτϕτϕα
∂
∂
. (17)

12
Averages values of the second-order approximations of temperature and concentration of mixture
α2T and α2C have been calculated by using the following standard relations
( )∫ ∫ ∫ ∫ −
Θ
=
Θ
−0 0
2
0
1222
1 R L
L
T tdrddzdTTr
LR
π
ϕ
π
α , ( )∫ ∫ ∫ ∫ −
Θ
=
Θ
−0 0
2
0
1222
1 R L
L
C tdrddzdCCr
LR
π
ϕ
π
α . (18)
Substitution of the first- and the second-order approximations of temperature and concentration
of mixture into relations (18) gives us possibility to obtain equations to determine required aver-
age values
( ) ( ) ( ) ( )


×∫ ∫ ∫−Θ
Θ
−∫ ∫ ∫−Θ
Θ
=
Θ
−
Θ
− 0
2
0
12
0
2
0
4
2 ,,,,,,
ππ
ϕϕ
π
λ
ϕϕ
π
σλ
α
L
L
L
L
T tddzdtzRTt
LRc
tddzdtzRTt
LRc
( ) ( ) ( ) ( ) ( )[ ]{∫ ∫ ∫ −+−Θ−∫ ∫ ∫−Θ
Θ
+
Θ
−
Θ
− 0
2
0
121
0
2
0
12
,,,,,,,,,0
ππ
ϕαϕϕϕ
π
λ L
L
C
L
L
tzRCtzRTttddzdtzTt
LRc
} ( ) ( )[ ] ( ) ( )[ ]×∫ ∫ ∫ ∫ −−
Θ
−−
Θ
−0 0
2
0
11 ,,,,,,
1
,,,,,,
R L
L
rrrrCT tzrvtzrvr
LR
tddzdtzRvtzRv
π
ϕϕ
π
ϕϕϕαα
( ) ( )[ ]{ } ( ) ( )×∫ −Θ
Θ
−
Θ
−Θ⋅−+×
Θ
0
2
0
211121
1
,,,,,, t
LR
V
LR
tdtrddzdtzrCtzrT CTC
ππ
ϕααϕαϕ
( )( )[ ] ( ) ( )[ ]×



∫ ∫ ∫ +−Θ×
Θ
∫ ∫ −+
Θ
−0
2
0
12
0
2
0
11021 ,,,
1
,,,
ππ
ϕα
π
ϕαααϕ
L
L
C
R
CTC tzRCt
LR
tdrddCtLrTr
( ) ( )[ ] ( ) ( )[ ]×∫ ∫ ∫ ∫ +−Θ
Θ
−+−×
Θ
−0 0
2
0
122
,,,
1
1,,,,,,
R L
L
Crr tzrCrt
LR
tddzdtzRvtzRv
π
ϕα
π
ϕϕϕ
( ) ( )[ ] ( ) } 1
0202,,,,,,
−
+Θ+−× LCVtdrddzdtzrvtzrv Crr αϕϕϕ ,
( )
( ) ( )
×
Θ
−∫ ∫ ∫








−−Θ
Θ
=
Θ
−==
LR
tdrdd
z
zrC
z
zrC
Drt
LR
R
LzLz
C 2
0 0
2
0
11
22
1,,,,,,1
π
ϕ
∂
τϕ∂
∂
τϕ∂
π
α
π
( ) ( )[ ] ( ) ( )[ ]{ } ×
Θ
−∫ ∫ ∫ −⋅+−−Θ×
Θ
− LR
V
tddzdzRvzRvzRCrt
L
L
rrCC 2
0
0
2
0
112 ,,,,,,,,,
π
ϕτϕτϕτϕαα
π
( ) ( )∫ ∫ ∫ +−−Θ×
Θ
0 0
2
0
012
R
CC tdrddzdCrt
π
ϕαα .

ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES FRAMEWORK ONE TECHNOLOGICAL PROCESS. ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL LAYERS

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