Engineering_capabilities_2015
- 1. Capabilities Overview Vacuum Chamber Design & Build Engineering Design / Analysis Process Automation Tools Precision Air Handlers and Sensor Systems Enclosures Power Distribution Boxes Electro-Mechanical Assembly and Integration Precision Metal Fabrication 150 Great Oaks Blvd, San Jose, CA 95119 TEL 408-414-5928 www.seminet.com
- 2. 2 About Seminet AES (Est 2004) merged with Seminet (est 1998) 65K ft2 facility in San Jose, CA Engineering Analysis, Design & Build and Build-To-Print services. Semiconductor Environmental Equip. and Enclosures. System Integration, Custom Mfg Patents for Precise Environmental control & N2 Purging. Vertically Integrated Facility: Eng: Mech, Elect, Thermal, Mfg, Software (PLC, GUI, Robot) In House Precision Sheetmetal, Machining, Frame Weldments Electrical-Mechanical Assembly and Integration System Level Test: Mech, Elect, Seismic, Noise, Vibration, Environ.
- 3. Should Costing Supplier & Component MGMT MFG Process MGMT Prototype Support DFA and DFM DFMEA FEA – Structural – Electro Magnetic – Thermal – Acoustic – Shock / Vibration – Design Optimization CFD – Laminar & Turbulent – Compressible / Incompressible – Heat Transfer – Rotor Dynamics – Multi Phase – Reaction & Combustion – FSI - Fluid Structure Interaction Product Data Mgmt (PDM) Product Life Cycle Mgmt (PLM) Configuration Mgmt Value Engineering Design Automation Problem or Compliance MGMT Concurrent Eng. 3D Models & ASSYs MFG DWGs GD&T Tolerance Analysis Part Spec Creation BOM Structuring Tech Manuals Installation Manuals ASSYs Animation Conceptual 3D Skeletons Systems Eng. Mechanical Electrical Electronics Product Upgrades CIP Programs Reliability Eng. Overview of Seminet Eng. Services
- 4. CAD Design & Legacy Conversion Competency in design & analysis tools such as, • CAD Tools – Mechanical - Unigraphics, Inventor, Solid Works, Pro/Engineer, CATIA, Inventor AutoCAD • Electrical – ECAD layout & Schematic tools • CAE Tools – FEA - Abacus, Ansys & Nastran – CFD – Fluent, CFX & Star CD • Engineering Calculators – MathCAD & Custom tools Data Migration/Legacy Conversion • 2D CAD drawings to 3D Parametric models • Design intent incorporation on existing CAD models • CAD switch (migration of one software to other) 4
- 5. Coupled Physics Design Optimization • Static/Transient • Dynamics • Multi-Body • Crash/Impact • Non-Linear • Fatigue • Fracture Mechanics Structural Electro Magnetic Thermal Acoustic • Conduction • Convection • Radiation • Thermo-Structural • Creep • FSI • Vibro Acoustic • Design Optimization • Size, Shape, Topology Optimization • FFT • Transfer Matrices Coefficients Calculation • Acoustic radiation • Fully-coupled Vibro-acoustics FEA Capabilities 5
- 6. Laminar & Turbulent Compressible/ Incompressible Heat Transfer Rotor Dynamics/ Turbo Machinery Multi Phase Reaction & Combustion FSI (Fluid Structure Interaction) CFD Capabilities 6
- 7. 7 Automation Systems Reticle Transfer Solutions Fully automated tools, ready to install on fab floor Clean Room Robot, 6 axis Staubli Integrated Enclosure Barcode reader RFID for SMIF Pod ID Reticle management software Buffering and storage for input & output of reticles Temperature and humidity controlled environment N2 Purged Environment optional Host communication interface
- 8. 8 Automation Systems Reticle Handling, Inspection, Cleaning
- 9. 9 System Control & Software Touchscreen User, supervisor, maintenance screens Real time system status Recipe creation Host communication HMI for system operation PC for process data collection and tracking Constant error checking with redundant sensors
- 10. Vacuum Chamber + RF Match box + RPSC - Use Ceramic, Teflon: Between Chamber and Susceptor, Diffuser to prevent from Arcing (Due to high RF source) - Use RF Ground strap with different thickness, width on Susceptor: Improve grounding - Use silver plating inside RF Match: Improve RF efficiency
- 11. 11 Design & Build Wafer Processor & Conveyor Silicon wafer conveyor High throughput, 50mm/sec Runs 24hrs/day Design, build, test & install to customer specifications.
- 12. 12 E-Box for Conveyor Design & Build in-house Electrical control box Power Distribution S2, S8, CE compliant
- 13. 13 Environmental Control Systems Mature Products: CD-E & RAM-E beginning 1990. High reliability, units run 24/7 for 10 yrs Patented temp and humidity control Temperature control of +/- .05° C Humidity control of +/- .3% RH Units from 100 CFM to 4000 CFM Single or multiple air outlets Class 1 air with appropriate filter Customization for specific applications
- 14. 14 Semifab Large ECU 750-4000 CFM Watlow PID controller Power dist panel Refrigeration All in-house CE Certified SEM S2, S8 Certified Custom versions per specifications Ethernet comm. optional
- 15. 15 Semifab Large ECU E-panel Electrical panel for ECU Size: 4ft x 3ft Power and Signal PLC control CE certified SEMI S2, S8 certified
- 16. 16 Fiber Optic Temperature Sensors High Accuracy, High Reliability Model Name 9-0105-03 9-0105-02 9-0105-01 Number of Channels 3 2 1 Analog Output 16 Bit, 4-20mA, Loop Powered 12-24 VDC Measurement Range -45°C to +425°C Resolution 0.01°C Accuracy* ±0.025°C - .1°C Update rate 10 Hz to 1000 Hz (Dynamic) USB 2.0 Protocol Modbus RTU RS-485 Protocol Modbus RTU, Half Duplex Status Indication 3 color Flashing and Solid LEDs Operating Temp. -20°C to +55°C Operating Humidity 0 to 90% RH (Non-Condensing) Dimensions 114mm Tall x 22.5mm Wide x 102mm Long Power 12-24 VDC (2.5W max) Mounting 35mm DIN Rail Software Seminet Proprietary * Measurement accuracy depends on Probe Accuracy and Transmitter configuration
- 17. 17 Tool-Specific Enclosures Industrial design, ergonomics, maintenance & safety OEM identity enhancements Engineered air flow dynamics Integration of temperature and humidity environment control Exterior finish: Painted, Mirror, Grained, etc.
- 18. 18 AMAT PDC: 180+ SST & commercial parts, electro-mech assy
- 19. 19 KLA Dual SMIF: 100+ CRS Frame, Skins, Machined Parts, Mech Assy
- 20. 20 AMAT DPS II: 200+ units CRS Frame & Skins, Paint, Assembly
- 21. 21 Our Advantage Vertically integrated company for system solution Engineering, Build, Assemble, Test, Integration, Installation Custom Manufacturing & System Integration reduces cost and leadtime, increases flexibility, and insures form, fit and function. Environmental Control Solutions integrated enclosures for process specific requirements. Complete Automation Systems for semiconductor, biotech, industrial applications.