A Novel Automated Approach for Ronchigram Alignment of a
Scanning Transmission Electron Microscope
Lining Wang, Daniel Groom, Paulo Ferreira
Materials Science and Engineering Program
Cockrell School of Engineering
The University of Texas at Austin, Texas, USA, 78712
Introduction
• The Scanning Transmission Electron Microscope (STEM) is one of
the most critical and unique scientific experimental tools today
• STEMs can achieve a high spatial resolution of approximately
0.05nm
• The alignment of STEMs will greatly affect the ultimate resolution
• The most effective way to align a STEM is via the Electron
Ronchigram
Original electron ronchigram
Canny Edge Detector Laplacian of Gaussians Edge Detector
Trainable WEKA Segmentation
• A Machine Learning type algorithm
Creating classifier
Training classifier
Training classifier on
a new electron
ronchigram
Training classifier based
on the resultElectron Ronchigram
• Electron Ronchigram or “shadow
image” is generated when the intensity
of a converged electron beam is formed
at the microscope Fraunhofer diffraction
plane of a specimen
• Electron Ronchigram is very sensitive to
Defocus, Two-fold Astigmatism and
Coma and thus needs adjustment
• A Ronchigram which shows a perfect
circular contour without the absence of
interference fringes and is maximized in
terms of radius, represents the ideal
alignment.
Challenge:
Finding the most accurate combination of
defocus, astigmatism and coma to obtain
the ideal alignment
Edge Detection
• Novel approach: image processing (Edge Detection) of the Electron
Ronchigram
• Most noise in Electron Ronchigram is reduced by using image filter
before processed by edge detector
• By edge detection, the contours of an Electron Ronchigram will be
highlighted from its background. Subsequently, the shape of the
contour will set up a basic criterion to determine the quality of the
Electron Ronchigram.
Objective
• To develop a computer program which can automatically align the
Ronchigram of a Scanning Transmission Electron Microscope
Acknowledgements
• This research is supported by the Office of the Vice President for
Research and the Equal Opportunity in Engineering Program at The
University of Texas at Austin
Future Work
• Create a database of around 100 electron ronchigrams to improve the
classifier’s accuracy of segmentation
• Explore new algorithms in image processing to improve the efficiency
and accuracy of segmentation
• Develop a software prototype to fully automate the alignment of STEMs
Default Edge Detector without image filter

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Lining Wang_Poster

  • 1. A Novel Automated Approach for Ronchigram Alignment of a Scanning Transmission Electron Microscope Lining Wang, Daniel Groom, Paulo Ferreira Materials Science and Engineering Program Cockrell School of Engineering The University of Texas at Austin, Texas, USA, 78712 Introduction • The Scanning Transmission Electron Microscope (STEM) is one of the most critical and unique scientific experimental tools today • STEMs can achieve a high spatial resolution of approximately 0.05nm • The alignment of STEMs will greatly affect the ultimate resolution • The most effective way to align a STEM is via the Electron Ronchigram Original electron ronchigram Canny Edge Detector Laplacian of Gaussians Edge Detector Trainable WEKA Segmentation • A Machine Learning type algorithm Creating classifier Training classifier Training classifier on a new electron ronchigram Training classifier based on the resultElectron Ronchigram • Electron Ronchigram or “shadow image” is generated when the intensity of a converged electron beam is formed at the microscope Fraunhofer diffraction plane of a specimen • Electron Ronchigram is very sensitive to Defocus, Two-fold Astigmatism and Coma and thus needs adjustment • A Ronchigram which shows a perfect circular contour without the absence of interference fringes and is maximized in terms of radius, represents the ideal alignment. Challenge: Finding the most accurate combination of defocus, astigmatism and coma to obtain the ideal alignment Edge Detection • Novel approach: image processing (Edge Detection) of the Electron Ronchigram • Most noise in Electron Ronchigram is reduced by using image filter before processed by edge detector • By edge detection, the contours of an Electron Ronchigram will be highlighted from its background. Subsequently, the shape of the contour will set up a basic criterion to determine the quality of the Electron Ronchigram. Objective • To develop a computer program which can automatically align the Ronchigram of a Scanning Transmission Electron Microscope Acknowledgements • This research is supported by the Office of the Vice President for Research and the Equal Opportunity in Engineering Program at The University of Texas at Austin Future Work • Create a database of around 100 electron ronchigrams to improve the classifier’s accuracy of segmentation • Explore new algorithms in image processing to improve the efficiency and accuracy of segmentation • Develop a software prototype to fully automate the alignment of STEMs Default Edge Detector without image filter