LVTS Advanced matching matching concept for CDSEM
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The document discusses advanced matching techniques for Critical Dimension Scanning Electron Microscopy (CDSEM) using LabVIEW software to optimize measurement procedures for various patterns and critical layers. It emphasizes the challenges of accurate measurements due to placement shifts and normalization issues, proposing solutions through software comparisons and monitoring techniques. Additionally, it highlights the benefits of implementing real-time matching measurements to improve tool calibration and stability.
LVTS Advanced matching matching concept for CDSEM
- 1. Advanced Matching for CDSEM By LV Tailoring Software
- 2. Tool A Iden tical waf er Labview Advanced Matching for CDSEM By LV Tailoring Software
- 3. Scaling Matching procedures. Qual matching procedures CLV and CLH patterns – pitch measurement 239.9 nm Just rough calculation of matching – high dependency of results on the X-Y placement. Statistically based, pitch measurement (not line or space). Inter site matching procedure. Back to back 2 runs of 4-6 different critical layers with 2 to 6 different measurements per layer. Everything should be matched in 1 nm to 5 nm (per layer). PM matching procedures. Daily monitor/Weekly monitor – impact of charging. See resolution monitor for results. Advanced Matching for CDSEM
- 4. Line/Space/Pitch dilemma CDD qual require matching up to 1 nm for most critical layers (95% CI) How we are measuring ? Why it is problematic ? No. Chip No. D No.1 D No.2 D No.3 D No.4 D No.5 D No.6 VSP VL VPTCH HS HL HPTCH Data P No. Data P No. Data P No. Data P No. Data P No. Data P No. 1 03,04 105.8 1 171.9 2 280.7 3 114.1 4 167.3 5 282.0 6 2 03,05 111.8 1 168.8 2 282.1 3 113.9 4 166.2 5 280.3 6 3 04,04 107.1 1 171.3 2 278.7 3 112.4 4 167.1 5 279.9 6 4 04,05 108.2 1 169.4 2 277.8 3 115.6 4 165.8 5 281.6 6 5 05,04 117.1 1 164.5 2 281.6 3 118.8 4 164.4 5 283.0 6 6 05,05 102.5 1 172.2 2 275.9 3 110.7 4 167.6 5 279.7 6 7 8 9 Maximum 117.1 172.2 282.1 118.8 167.6 283.0 Minimum 102.5 164.5 275.9 110.7 164.4 279.7 Mean 108.7 169.7 279.5 114.3 166.4 281.1 Max-Min 14.7 7.7 6.2 8.1 3.2 3.4 3 Sigma 15.3 8.6 7.3 8.3 3.6 4.0 Advanced Matching for CDSEM
- 5. Line/Space/Pitch dilemma – Normalization issue as result of 2 measurement gates application for pitch measurement On the specimen Line Space Pitch SE intensity profile 0 50 100 150 200 250 1 Pixel Brightness Line Threshold 60% SE intensity profile 0 50 100 150 200 250 1 Pixel Brightness Space Threshold 60% SE intensity profile 0 50 100 150 200 250 1 Pixel Brightness Pitch Threshold 60% Advanced Matching for CDSEM
- 6. Placement dilemma – Are we measuring on the same place? Line/Space/Pitch dilemma – Why Line + Space≠ Pitch ? How we could proceed in order to reduce impact of placement shift and normalization error Advanced Matching for CDSEM
- 7. Placement and Line/Space/Pitch dilemma – Solution by SW Compare just correlated parts of the images taken for matching. Correlated picture Shifted picture Shifted picture Advanced Matching for CDSEM
- 8. Impact of Placement dilemma – testing results Verticalsize1 0.992 0.993 0.994 0.995 0.996 0.997 0.998 0.999 1 After 1 After 2 Before 1 Before 2 ID Excluded Row s 1 After 1 After 2 Before 1 Before 2 Level 5 5 5 4 Number 0.994599 0.994521 0.994358 0.995913 Mean 0.001199 0.000896 0.002050 0.002302 Std Dev 0.00054 0.00040 0.00092 0.00115 Std Err Mean 0.99311 0.99341 0.99181 0.99225 Low er 95% 0.99609 0.99563 0.99690 0.99958 Upper 95% Means and Std Deviations Oneway Analysis of Vertical size 1 By ID Horizontalsize1 0.9875 0.99 0.9925 0.995 0.9975 1 1.0025 After 1 After 2 Before 1 Before 2 ID Excluded Row s 1 After 1 After 2 Before 1 Before 2 Level 5 5 5 4 Number 0.995852 0.995347 0.995519 0.994763 Mean 0.002431 0.000126 0.003779 0.000952 Std Dev 0.00109 0.00006 0.00169 0.00048 Std Err Mean 0.99283 0.99519 0.99083 0.99325 Low er 95% 0.9989 0.9955 1.0002 0.9963 Upper 95% Means and Std Deviations Oneway Analysis of Horizontal size 1 By ID Verticalsize2 0.99 0.992 0.994 0.996 0.998 1 1.002 After 1 After 2 Before 1 Before 2 ID Excluded Row s 1 After 1 After 2 Before 1 Before 2 Level 5 5 5 4 Number 0.994476 0.994563 0.994676 0.996406 Mean 0.001527 0.000808 0.003688 0.003328 Std Dev 0.00068 0.00036 0.00165 0.00166 Std Err Mean 0.99258 0.99356 0.99010 0.99111 Low er 95% 0.9964 0.9956 0.9993 1.0017 Upper 95% Means and Std Deviations Oneway Analysis of Vertical size 2 By ID Horizontalsize2 0.992 0.993 0.994 0.995 0.996 0.997 0.998 0.999 1 1.001 After 1 After 2 Before 1 Before 2 ID Excluded Row s 1 After 1 After 2 Before 1 Before 2 Level 5 5 5 4 Number 0.996068 0.995563 0.995640 0.994824 Mean 0.001704 0.000530 0.002962 0.000979 Std Dev 0.00076 0.00024 0.00132 0.00049 Std Err Mean 0.99395 0.99490 0.99196 0.99327 Low er 95% 0.99818 0.99622 0.99932 0.99638 Upper 95% Means and Std Deviations Oneway Analysis of Horizontal size 2 By ID Verticalsize3 0.99 0.9925 0.995 0.9975 1 1.0025 After 1 After 2 Before 1 Before 2 ID Excluded Row s 1 After 1 After 2 Before 1 Before 2 Level 5 5 5 4 Number 0.999648 0.994572 0.995677 0.993940 Mean 0.000996 0.001492 0.003655 0.003117 Std Dev 0.00045 0.00067 0.00163 0.00156 Std Err Mean 0.99841 0.99272 0.99114 0.98898 Low er 95% 1.0009 0.9964 1.0002 0.9989 Upper 95% Means and Std Deviations Oneway Analysis of Vertical size 3 By ID Horizontalsize3 0.99 0.9925 0.995 0.9975 1 1.0025 After 1 After 2 Before 1 Before 2 ID Excluded Row s 1 After 1 After 2 Before 1 Before 2 Level 5 5 5 4 Number 0.995766 0.995904 0.995919 0.996379 Mean 0.001444 0.001715 0.002354 0.004105 Std Dev 0.00065 0.00077 0.00105 0.00205 Std Err Mean 0.99397 0.99378 0.99300 0.98985 Low er 95% 0.9976 0.9980 0.9988 1.0029 Upper 95% Means and Std Deviations Oneway Analysis of Horizontal size 3 By ID Advanced Matching for CDSEM
- 9. Gain in implemented. 1. Qual speed up. 2. Reliable “of the fly” measure of matching. 3. As vendor application for tool calibration (image shift parameter). 4. In connection with resolution monitor powerful application for tool stability tracing. 5. PM elimination (from time based activity to performance based). Advanced Matching for CDSEM