Lecture 4:
Nonideal
Transistor
Theory
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 2
Outline
 Nonideal Transistor Behavior
– High Field Effects
• Mobility Degradation
• Velocity Saturation
– Channel Length Modulation
– Threshold Voltage Effects
• Body Effect
• Drain-Induced Barrier Lowering
• Short Channel Effect
– Leakage
• Subthreshold Leakage
• Gate Leakage
• Junction Leakage
 Process and Environmental Variations
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 3
Ideal Transistor I-V
 Shockley long-channel transistor models
 
2
cutoff
linear
saturatio
0
2
2
n
gs t
ds
ds gs t ds ds dsat
gs t ds dsat
V V
V
I V V V V V
V V V V



 

  
   
 

 


 


CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 4
Ideal vs. Simulated nMOS I-V Plot
 65 nm IBM process, VDD = 1.0 V
0 0.2 0.4 0.6 0.8 1
0
200
400
600
800
1000
1200
Vds
Ids (A)
Vgs = 1.0
Vgs = 1.0
Vgs = 0.8
Vgs = 0.6
Vgs = 0.4
Vgs = 0.8
Vgs = 0.6
Channel length modulation:
Saturation current increases
with Vds
Ion = 747 mA @
Vgs = Vds = VDD
Simulated
Ideal
Velocity saturation & Mobility degradation:
Saturation current increases less than
quadratically with Vgs
Velocity saturation & Mobility degradation:
Ion lower than ideal model predicts
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 5
ON and OFF Current
 Ion = Ids @ Vgs = Vds = VDD
– Saturation
 Ioff = Ids @ Vgs = 0, Vds = VDD
– Cutoff
0 0.2 0.4 0.6 0.8 1
0
200
400
600
800
1000
Vds
Ids (A)
Vgs = 1.0
Vgs = 0.4
Vgs = 0.8
Vgs = 0.6
Ion = 747 mA @
Vgs = Vds = VDD
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 6
Electric Fields Effects
 Vertical electric field: Evert = Vgs / tox
– Attracts carriers into channel
– Long channel: Qchannel proportional to Evert
 Lateral electric field: Elat = Vds / L
– Accelerates carriers from drain to source
– Long channel: v = μElat
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 7
Coffee Cart Analogy
 Tired student runs from VLSI lab to coffee cart
 Freshmen are pouring out of the physics lecture hall
 Vds is how long you have been up
– Your velocity = fatigue × mobility
 Vgs is a wind blowing you against the glass (SiO2) wall
 At high Vgs, you are buffeted against the wall
– Mobility degradation
 At high Vds, you scatter off freshmen, fall down, get up
– Velocity saturation
• Don’t confuse this with the saturation region
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 8
Mobility Degradation
 High Evert effectively reduces mobility
– Collisions with oxide interface
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 9
Velocity Saturation
 At high Elat, carrier velocity rolls off
– Carriers scatter off atoms in silicon lattice
– Velocity reaches vsat
• Electrons: 107
cm/s
• Holes: 8 x 106
cm/s
– Better model
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 10
Vel Sat I-V Effects
 Ideal transistor ON current increases with VDD
2
 Velocity-saturated ON current increases with VDD
 Real transistors are partially velocity saturated
– Approximate with α-power law model
– Ids scales with VDD
α
– 1 < α < 2 determined empirically (≈ 1.3 for 65 nm)
 
 
2
2
ox
2 2
gs t
ds gs t
V V
W
I C V V
L



  
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 11
-Power Model
0 cutoff
linear
saturation
gs t
ds
ds dsat ds dsat
dsat
dsat ds dsat
V V
V
I I V V
V
I V V
 


 


 

 
 
/2
2
dsat c gs t
dsat v gs t
I P V V
V P V V



 
 
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 12
Channel Length Modulation
 Reverse-biased p-n junctions form a depletion region
– Region between n and p with no carriers
– Width of depletion Ld region grows with reverse bias
– Leff = L – Ld
 Shorter Leff gives more current
– Ids increases with Vds
– Even in saturation
n
+
p
Gate
Source Drain
bulk Si
n
+
VDD
GND VDD
GND
L
Leff
Depletion Region
Width: Ld
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 13
Chan Length Mod I-V
 λ = channel length modulation coefficient
– not feature size
– Empirically fit to I-V characteristics
   
2
1
2
ds gs t ds
I V V V


  
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 14
Threshold Voltage Effects
 Vt is Vgs for which the channel starts to invert
 Ideal models assumed Vt is constant
 Really depends (weakly) on almost everything else:
– Body voltage: Body Effect
– Drain voltage: Drain-Induced Barrier Lowering
– Channel length: Short Channel Effect
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 15
Body Effect
 Body is a fourth transistor terminal
 Vsb affects the charge required to invert the channel
– Increasing Vs or decreasing Vb increases Vt
 Vt0 = nominal threshold voltage
 s = surface potential at threshold
– Depends on doping level NA
– And intrinsic carrier concentration ni
 γ = body effect coefficient
 
0
t t s sb s
V V V
  
   
2 ln A
s T
i
N
v
n
 
si
ox
si
ox ox
2q
2q A
A
N
t
N
C

 

 
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 16
Body Effect Cont.
 For small source-to-body voltage, treat as linear
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 17
DIBL
 Electric field from drain affects channel
 More pronounced in small transistors where the
drain is closer to the channel
 Drain-Induced Barrier Lowering
– Drain voltage also affect Vt
 High drain voltage causes current to increase.
t t ds
V V V

  
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 18
Short Channel Effect
 In small transistors, source/drain depletion regions
extend into the channel
– Impacts the amount of charge required to invert
the channel
– And thus makes Vt a function of channel length
 Short channel effect: Vt increases with L
– Some processes exhibit a reverse short channel
effect in which Vt decreases with L
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 19
Leakage
 What about current in cutoff?
 Simulated results
 What differs?
– Current doesn’t
go to 0 in cutoff
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 20
Leakage Sources
 Subthreshold conduction
– Transistors can’t abruptly turn ON or OFF
– Dominant source in contemporary transistors
 Gate leakage
– Tunneling through ultrathin gate dielectric
 Junction leakage
– Reverse-biased PN junction diode current
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 21
Subthreshold Leakage
 Subthreshold leakage exponential with Vgs
 n is process dependent
– typically 1.3-1.7
 Rewrite relative to Ioff on log scale
 S ≈ 100 mV/decade @ room temperature
0
0e 1 e
gs t ds sb ds
T T
V V V k V V
nv v
ds ds
I I


   
 
 
 
 
 
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 22
Gate Leakage
 Carriers tunnel thorough very thin gate oxides
 Exponentially sensitive to tox and VDD
– A and B are tech constants
– Greater for electrons
• So nMOS gates leak more
 Negligible for older processes (tox > 20 Å)
 Critically important at 65 nm and below (tox ≈ 10.5 Å)
From [Song01]
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 23
Junction Leakage
 Reverse-biased p-n junctions have some leakage
– Ordinary diode leakage
– Band-to-band tunneling (BTBT)
– Gate-induced drain leakage (GIDL)
n well
n+
n+ n+
p+
p+
p+
p substrate
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 24
Diode Leakage
 Reverse-biased p-n junctions have some leakage
 At any significant negative diode voltage, ID = -Is
 Is depends on doping levels
– And area and perimeter of diffusion regions
– Typically < 1 fA/μm2
(negligible)
e 1
D
T
V
v
D S
I I
 
 
 
 
 
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 25
Band-to-Band Tunneling
 Tunneling across heavily doped p-n junctions
– Especially sidewall between drain & channel
when halo doping is used to increase Vt
 Increases junction leakage to significant levels
– Xj: sidewall junction depth
– Eg: bandgap voltage
– A, B: tech constants
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 26
Gate-Induced Drain Leakage
 Occurs at overlap between gate and drain
– Most pronounced when drain is at VDD, gate is at
a negative voltage
– Thwarts efforts to reduce subthreshold leakage
using a negative gate voltage
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 27
Temperature Sensitivity
 Increasing temperature
– Reduces mobility
– Reduces Vt
 ION decreases with temperature
 IOFF increases with temperature
Vgs
ds
I
increasing
temperature
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 28
So What?
 So what if transistors are not ideal?
– They still behave like switches.
 But these effects matter for…
– Supply voltage choice
– Logical effort
– Quiescent power consumption
– Pass transistors
– Temperature of operation
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 29
Parameter Variation
 Transistors have uncertainty in parameters
– Process: Leff, Vt, tox of nMOS and pMOS
– Vary around typical (T) values
 Fast (F)
– Leff: short
– Vt: low
– tox: thin
 Slow (S): opposite
 Not all parameters are independent
for nMOS and pMOS
nMOS
pMOS
fast
slow
slow
fast
TT
FF
SS
FS
SF
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 30
Environmental Variation
 VDD and T also vary in time and space
 Fast:
– VDD: high
– T: low
Corner Voltage Temperature
F 1.98 0 C
T 1.8 70 C
S 1.62 125 C
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 31
Process Corners
 Process corners describe worst case variations
– If a design works in all corners, it will probably
work for any variation.
 Describe corner with four letters (T, F, S)
– nMOS speed
– pMOS speed
– Voltage
– Temperature
CMOS VLSI Design
CMOS VLSI Design 4th Ed.
4: Nonideal Transistor Theory 32
Important Corners
 Some critical simulation corners include
Purpose nMOS pMOS VDD Temp
Cycle time S S S S
Power F F F F
Subthreshold
leakage
F F F S

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Non Ideal Transistor Theory- Mosfet second order effects

  • 2. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 2 Outline  Nonideal Transistor Behavior – High Field Effects • Mobility Degradation • Velocity Saturation – Channel Length Modulation – Threshold Voltage Effects • Body Effect • Drain-Induced Barrier Lowering • Short Channel Effect – Leakage • Subthreshold Leakage • Gate Leakage • Junction Leakage  Process and Environmental Variations
  • 3. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 3 Ideal Transistor I-V  Shockley long-channel transistor models   2 cutoff linear saturatio 0 2 2 n gs t ds ds gs t ds ds dsat gs t ds dsat V V V I V V V V V V V V V                        
  • 4. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 4 Ideal vs. Simulated nMOS I-V Plot  65 nm IBM process, VDD = 1.0 V 0 0.2 0.4 0.6 0.8 1 0 200 400 600 800 1000 1200 Vds Ids (A) Vgs = 1.0 Vgs = 1.0 Vgs = 0.8 Vgs = 0.6 Vgs = 0.4 Vgs = 0.8 Vgs = 0.6 Channel length modulation: Saturation current increases with Vds Ion = 747 mA @ Vgs = Vds = VDD Simulated Ideal Velocity saturation & Mobility degradation: Saturation current increases less than quadratically with Vgs Velocity saturation & Mobility degradation: Ion lower than ideal model predicts
  • 5. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 5 ON and OFF Current  Ion = Ids @ Vgs = Vds = VDD – Saturation  Ioff = Ids @ Vgs = 0, Vds = VDD – Cutoff 0 0.2 0.4 0.6 0.8 1 0 200 400 600 800 1000 Vds Ids (A) Vgs = 1.0 Vgs = 0.4 Vgs = 0.8 Vgs = 0.6 Ion = 747 mA @ Vgs = Vds = VDD
  • 6. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 6 Electric Fields Effects  Vertical electric field: Evert = Vgs / tox – Attracts carriers into channel – Long channel: Qchannel proportional to Evert  Lateral electric field: Elat = Vds / L – Accelerates carriers from drain to source – Long channel: v = μElat
  • 7. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 7 Coffee Cart Analogy  Tired student runs from VLSI lab to coffee cart  Freshmen are pouring out of the physics lecture hall  Vds is how long you have been up – Your velocity = fatigue × mobility  Vgs is a wind blowing you against the glass (SiO2) wall  At high Vgs, you are buffeted against the wall – Mobility degradation  At high Vds, you scatter off freshmen, fall down, get up – Velocity saturation • Don’t confuse this with the saturation region
  • 8. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 8 Mobility Degradation  High Evert effectively reduces mobility – Collisions with oxide interface
  • 9. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 9 Velocity Saturation  At high Elat, carrier velocity rolls off – Carriers scatter off atoms in silicon lattice – Velocity reaches vsat • Electrons: 107 cm/s • Holes: 8 x 106 cm/s – Better model
  • 10. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 10 Vel Sat I-V Effects  Ideal transistor ON current increases with VDD 2  Velocity-saturated ON current increases with VDD  Real transistors are partially velocity saturated – Approximate with α-power law model – Ids scales with VDD α – 1 < α < 2 determined empirically (≈ 1.3 for 65 nm)     2 2 ox 2 2 gs t ds gs t V V W I C V V L      
  • 11. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 11 -Power Model 0 cutoff linear saturation gs t ds ds dsat ds dsat dsat dsat ds dsat V V V I I V V V I V V                /2 2 dsat c gs t dsat v gs t I P V V V P V V       
  • 12. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 12 Channel Length Modulation  Reverse-biased p-n junctions form a depletion region – Region between n and p with no carriers – Width of depletion Ld region grows with reverse bias – Leff = L – Ld  Shorter Leff gives more current – Ids increases with Vds – Even in saturation n + p Gate Source Drain bulk Si n + VDD GND VDD GND L Leff Depletion Region Width: Ld
  • 13. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 13 Chan Length Mod I-V  λ = channel length modulation coefficient – not feature size – Empirically fit to I-V characteristics     2 1 2 ds gs t ds I V V V     
  • 14. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 14 Threshold Voltage Effects  Vt is Vgs for which the channel starts to invert  Ideal models assumed Vt is constant  Really depends (weakly) on almost everything else: – Body voltage: Body Effect – Drain voltage: Drain-Induced Barrier Lowering – Channel length: Short Channel Effect
  • 15. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 15 Body Effect  Body is a fourth transistor terminal  Vsb affects the charge required to invert the channel – Increasing Vs or decreasing Vb increases Vt  Vt0 = nominal threshold voltage  s = surface potential at threshold – Depends on doping level NA – And intrinsic carrier concentration ni  γ = body effect coefficient   0 t t s sb s V V V        2 ln A s T i N v n   si ox si ox ox 2q 2q A A N t N C      
  • 16. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 16 Body Effect Cont.  For small source-to-body voltage, treat as linear
  • 17. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 17 DIBL  Electric field from drain affects channel  More pronounced in small transistors where the drain is closer to the channel  Drain-Induced Barrier Lowering – Drain voltage also affect Vt  High drain voltage causes current to increase. t t ds V V V    
  • 18. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 18 Short Channel Effect  In small transistors, source/drain depletion regions extend into the channel – Impacts the amount of charge required to invert the channel – And thus makes Vt a function of channel length  Short channel effect: Vt increases with L – Some processes exhibit a reverse short channel effect in which Vt decreases with L
  • 19. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 19 Leakage  What about current in cutoff?  Simulated results  What differs? – Current doesn’t go to 0 in cutoff
  • 20. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 20 Leakage Sources  Subthreshold conduction – Transistors can’t abruptly turn ON or OFF – Dominant source in contemporary transistors  Gate leakage – Tunneling through ultrathin gate dielectric  Junction leakage – Reverse-biased PN junction diode current
  • 21. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 21 Subthreshold Leakage  Subthreshold leakage exponential with Vgs  n is process dependent – typically 1.3-1.7  Rewrite relative to Ioff on log scale  S ≈ 100 mV/decade @ room temperature 0 0e 1 e gs t ds sb ds T T V V V k V V nv v ds ds I I                
  • 22. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 22 Gate Leakage  Carriers tunnel thorough very thin gate oxides  Exponentially sensitive to tox and VDD – A and B are tech constants – Greater for electrons • So nMOS gates leak more  Negligible for older processes (tox > 20 Å)  Critically important at 65 nm and below (tox ≈ 10.5 Å) From [Song01]
  • 23. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 23 Junction Leakage  Reverse-biased p-n junctions have some leakage – Ordinary diode leakage – Band-to-band tunneling (BTBT) – Gate-induced drain leakage (GIDL) n well n+ n+ n+ p+ p+ p+ p substrate
  • 24. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 24 Diode Leakage  Reverse-biased p-n junctions have some leakage  At any significant negative diode voltage, ID = -Is  Is depends on doping levels – And area and perimeter of diffusion regions – Typically < 1 fA/μm2 (negligible) e 1 D T V v D S I I          
  • 25. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 25 Band-to-Band Tunneling  Tunneling across heavily doped p-n junctions – Especially sidewall between drain & channel when halo doping is used to increase Vt  Increases junction leakage to significant levels – Xj: sidewall junction depth – Eg: bandgap voltage – A, B: tech constants
  • 26. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 26 Gate-Induced Drain Leakage  Occurs at overlap between gate and drain – Most pronounced when drain is at VDD, gate is at a negative voltage – Thwarts efforts to reduce subthreshold leakage using a negative gate voltage
  • 27. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 27 Temperature Sensitivity  Increasing temperature – Reduces mobility – Reduces Vt  ION decreases with temperature  IOFF increases with temperature Vgs ds I increasing temperature
  • 28. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 28 So What?  So what if transistors are not ideal? – They still behave like switches.  But these effects matter for… – Supply voltage choice – Logical effort – Quiescent power consumption – Pass transistors – Temperature of operation
  • 29. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 29 Parameter Variation  Transistors have uncertainty in parameters – Process: Leff, Vt, tox of nMOS and pMOS – Vary around typical (T) values  Fast (F) – Leff: short – Vt: low – tox: thin  Slow (S): opposite  Not all parameters are independent for nMOS and pMOS nMOS pMOS fast slow slow fast TT FF SS FS SF
  • 30. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 30 Environmental Variation  VDD and T also vary in time and space  Fast: – VDD: high – T: low Corner Voltage Temperature F 1.98 0 C T 1.8 70 C S 1.62 125 C
  • 31. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 31 Process Corners  Process corners describe worst case variations – If a design works in all corners, it will probably work for any variation.  Describe corner with four letters (T, F, S) – nMOS speed – pMOS speed – Voltage – Temperature
  • 32. CMOS VLSI Design CMOS VLSI Design 4th Ed. 4: Nonideal Transistor Theory 32 Important Corners  Some critical simulation corners include Purpose nMOS pMOS VDD Temp Cycle time S S S S Power F F F F Subthreshold leakage F F F S