wet etching
- 1. Submitted By, Md.Mizanur Rahman ID.183001016 Department of EEE Green University of Bangladesh Submitted To, DR. A. A. MOHAMMAD MONZUR-UL-AKHIR Assistant Professor Department of EEE Green University of Bangladesh
- 4. OUTLINE: What is Etching ? Types of Etching What is Wet Etching ? What is Wet etching process? Advantages of Wet Etching Disadvantages of Wet Etching
- 5. What is Etching ? Simply removing unwanted materials from the surface to form a required pattern.
- 6. Types of Etching Wet Etching: Dry Etching(plasma Etching):
- 7. What is Wet Etching ? Wet etching is a material removal process that uses liquid chemicals or etchants to remove materials from a wafer.
- 8. 1.Wet etching is a material removal process that uses liquid chemicals or etchants to remove materials from a wafer. 2.This reaction entails the oxidation of the material then dissolving the oxidized material. 3.Diffusion of the byproducts in the reaction from the reacted surface. What is wet etching process?
- 9. Advantages of Wet Etching Damage-free finish to wafer surface. Simple and direct etching process. Occur at atomaspheric environment. Cheaper cost. High etch selective. Good etch uniformity.
- 10. Disadvantages of Wet Etching Isotropic etching. No control for precision etching. The resist cumming when the resist is incompletely expoxd or insufficiently developed and this residual resist act as etching mask .