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Nanometer Testing: Challenges and Solutions



                             Jais Abraham
                   AMD India Design Centre
Characteristics of Nanometer Devices

Design trends
 Increasing corners of operation (multiple frequencies,
 voltage, power scenarios)
 Increasing integration (SOCs, SIPs)
 Permeation of high bandwidth serial/ differential
 interfaces

Process issues
  Process variations becoming key concern
  Increasing wiring densities leading to complex signal
  integrity problems
  Dominance of new kinds of defects based on the metal
  subsystem
Test Challenges – Increased
Parametric Variations




  Source : “Parametric Failures in CMOS ICs- A Defect
       Based Analysis”, Hawkins et al., ITC2002
At Least Test will Find It?


                                             e-              e-
                                                  L TARGET


                                                                  L EFFECTIVE
                                                                                Minor bridging defects etc.
              Current vs. Speed Limit
Current




                                             L EFFECTIVE = L TARGET - X




            e-                    e-
                                                                                              X : Lot1
                     L TARGET                                                                 O : Lot2
                    L EFFECTIVE



              L EFFECTIVE = L TARGET + X



      Source: Madge, et. al., 2004
                                           Speed
Test Challenges – New Failure
Mechanisms


                            Cu Voids




     Open




                                   Shorts
Test Challenges - Cost of Test




        Source : International Technology Roadmap for Semiconductors, 2001
Test Challenges – Power

 Test power could be more than functional power
 – more regions of the device operating than in functional mode
 – switching of logic during scan shift


 With increasing design frequencies & integration
 – Can the tester supply the power required in the test mode
 – Can the package support the power required in the test mode
 – Will the part be able to withstand the power consumption during
   high voltage testing
Test Challenges - Yield Learning

Defect sizes scale as quickly or faster than the device features
 Difficulty in localizing faults increases one order of magnitude
 every six years
 Defective chips offer significant information on these failure
 mechanisms

Yield learning is becoming increasingly important
 To tune the manufacturing processes to achieve higher
 profits
 To reduce the time for volume production since product life
 cycles are coming down
SOLUTIONS
New Fault Models - Bridge Fault
Testing
Bridge fault testing detects shorts between interconnects




                    0
                           A             0
                    0


                    1
                    1     B              0
Bridge Fault Testing

Number of possible bridges in a design is exponential to
the number of nets
  Bridge node pair extraction is done from layout based
  on proximity analysis




                              Critical
                               Area
                              Analysis



Four possible bridge fault tests exist for a pair of nodes
 Could lead to a large test vector count
High resistance bridging faults




                              Bridge Resistance Data*

         Source: “Test challenges in nanometer”, Kundu et al., ITC2000
Delay Fault

DC tests (eg based on stuck-at, logic bridge model) are
no longer adequate
 AC tests which ensure that the design works at the
 rated speed are required
Delay Fault Testing

Delay fault tests check if any node in the design is slower
to rise or fall than it should

Requires design techniques to obtain high coverage
 On-chip PLL based clocking
 Support for multiple clock domains
 Knowledge of device timing exceptions

Consume 2x-5x times the number of test patterns for
stuck-at fault testing
Small Delay Defects




   Source: “Test Method Evaluation Experiments and Data”, Nigh et al., ITC2000
Small Delay Fault Testing




                                  small delay test
          0.4

                0.1               transition test

          0.3         0.3

                0.2         0.5
Reducing the Cost of Scan Tests




Scan in 1                                                            Scan out 1
Scan in 2                                                            Scan out 2

Scan in 3                                                            Scan out 3

Scan in 4                                                            Scan out 4

Scan in 5                                                            Scan out 5


     Test time   = length of scan chain x #patterns x (1/frequency of shifting)
     Test volume = length of scan chain x #patterns x 2
Scan Compression

                 Scan chain group 1          Scan chain group N
                              Scan chain group 2
 Scan in 1                                                C
             E                                            o
             x                                            m
 Scan in 2   p                                            p
             a                                            r
             n                                            e
             d                                            s
             e                                            s
 Scan in N   r                                            o
                                                          r
Reducing Power During Test

 Divide and conquer
      Switch lesser logic while reducing test time



 Prevent the functional logic from switching during
   scan shift using data gating



 Power aware ATPG patterns which prevent transitions
   that don’t result in additional coverage
What is the Problem?

   Design 1                        Design 2




               • Same Die Size
               • Same Complexity
               • Same Foundry
               • Same Process
What is the Problem?

   Design 1                          Design 2




   77% Yield                        42% Yield

  Interactions Between Design and Manufacturing
Scan based diagnostics

To enable effective use of scan patterns for yield
learning, the patterns should have
 Capability to identify failures
 – Requires high test coverage
 Capability to isolate the failures
 – Accurately map the failures to the physical location of the
   failures
Scan based diagnostics
                                       Layout
                           Defect     mapping
                          suspect
                        coordinates
    Physical
     Failure
    Analysis                                          Failure
                                                   Diagnostics
                                                   Information




         Defect
      information
                                                              ATPG based
                                                                 failure
                                                              diagnostics



   Manufacture



                    Wafer
                                                   Failure
                                                Information




                                      Test
Economics


                            $$$$

        Yield




                Accelerated Yield Learning

                Standard Yield Improvement




                  Time
Conclusion

Nanometer testing presents new challenges not seen
hitherto

Without a single-eyed focus on test, either of the
following scenarios are likely:
  Low Test Quality : High escape rates of defective
  devices
  High Test Cost : Affecting profitability
  Slow ramp to volume : Missing critical time-to-market
  windows

The solution to these problems requires a tight
interaction between the test experts, silicon technology
experts and ATE experts

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Abraham q3 2008

  • 1. Nanometer Testing: Challenges and Solutions Jais Abraham AMD India Design Centre
  • 2. Characteristics of Nanometer Devices Design trends Increasing corners of operation (multiple frequencies, voltage, power scenarios) Increasing integration (SOCs, SIPs) Permeation of high bandwidth serial/ differential interfaces Process issues Process variations becoming key concern Increasing wiring densities leading to complex signal integrity problems Dominance of new kinds of defects based on the metal subsystem
  • 3. Test Challenges – Increased Parametric Variations Source : “Parametric Failures in CMOS ICs- A Defect Based Analysis”, Hawkins et al., ITC2002
  • 4. At Least Test will Find It? e- e- L TARGET L EFFECTIVE Minor bridging defects etc. Current vs. Speed Limit Current L EFFECTIVE = L TARGET - X e- e- X : Lot1 L TARGET O : Lot2 L EFFECTIVE L EFFECTIVE = L TARGET + X Source: Madge, et. al., 2004 Speed
  • 5. Test Challenges – New Failure Mechanisms Cu Voids Open Shorts
  • 6. Test Challenges - Cost of Test Source : International Technology Roadmap for Semiconductors, 2001
  • 7. Test Challenges – Power Test power could be more than functional power – more regions of the device operating than in functional mode – switching of logic during scan shift With increasing design frequencies & integration – Can the tester supply the power required in the test mode – Can the package support the power required in the test mode – Will the part be able to withstand the power consumption during high voltage testing
  • 8. Test Challenges - Yield Learning Defect sizes scale as quickly or faster than the device features Difficulty in localizing faults increases one order of magnitude every six years Defective chips offer significant information on these failure mechanisms Yield learning is becoming increasingly important To tune the manufacturing processes to achieve higher profits To reduce the time for volume production since product life cycles are coming down
  • 10. New Fault Models - Bridge Fault Testing Bridge fault testing detects shorts between interconnects 0 A 0 0 1 1 B 0
  • 11. Bridge Fault Testing Number of possible bridges in a design is exponential to the number of nets Bridge node pair extraction is done from layout based on proximity analysis Critical Area Analysis Four possible bridge fault tests exist for a pair of nodes Could lead to a large test vector count
  • 12. High resistance bridging faults Bridge Resistance Data* Source: “Test challenges in nanometer”, Kundu et al., ITC2000
  • 13. Delay Fault DC tests (eg based on stuck-at, logic bridge model) are no longer adequate AC tests which ensure that the design works at the rated speed are required
  • 14. Delay Fault Testing Delay fault tests check if any node in the design is slower to rise or fall than it should Requires design techniques to obtain high coverage On-chip PLL based clocking Support for multiple clock domains Knowledge of device timing exceptions Consume 2x-5x times the number of test patterns for stuck-at fault testing
  • 15. Small Delay Defects Source: “Test Method Evaluation Experiments and Data”, Nigh et al., ITC2000
  • 16. Small Delay Fault Testing small delay test 0.4 0.1 transition test 0.3 0.3 0.2 0.5
  • 17. Reducing the Cost of Scan Tests Scan in 1 Scan out 1 Scan in 2 Scan out 2 Scan in 3 Scan out 3 Scan in 4 Scan out 4 Scan in 5 Scan out 5 Test time = length of scan chain x #patterns x (1/frequency of shifting) Test volume = length of scan chain x #patterns x 2
  • 18. Scan Compression Scan chain group 1 Scan chain group N Scan chain group 2 Scan in 1 C E o x m Scan in 2 p p a r n e d s e s Scan in N r o r
  • 19. Reducing Power During Test Divide and conquer Switch lesser logic while reducing test time Prevent the functional logic from switching during scan shift using data gating Power aware ATPG patterns which prevent transitions that don’t result in additional coverage
  • 20. What is the Problem? Design 1 Design 2 • Same Die Size • Same Complexity • Same Foundry • Same Process
  • 21. What is the Problem? Design 1 Design 2 77% Yield 42% Yield Interactions Between Design and Manufacturing
  • 22. Scan based diagnostics To enable effective use of scan patterns for yield learning, the patterns should have Capability to identify failures – Requires high test coverage Capability to isolate the failures – Accurately map the failures to the physical location of the failures
  • 23. Scan based diagnostics Layout Defect mapping suspect coordinates Physical Failure Analysis Failure Diagnostics Information Defect information ATPG based failure diagnostics Manufacture Wafer Failure Information Test
  • 24. Economics $$$$ Yield Accelerated Yield Learning Standard Yield Improvement Time
  • 25. Conclusion Nanometer testing presents new challenges not seen hitherto Without a single-eyed focus on test, either of the following scenarios are likely: Low Test Quality : High escape rates of defective devices High Test Cost : Affecting profitability Slow ramp to volume : Missing critical time-to-market windows The solution to these problems requires a tight interaction between the test experts, silicon technology experts and ATE experts