This document presents a finite element solution to analyze the effects of viscous dissipation and diffusion thermo on an unsteady magnetohydrodynamic (MHD) flow past an impulsively started inclined oscillating plate with variable temperature and mass diffusion. The governing nonlinear partial differential equations describing the flow are non-dimensionalized and solved using the finite element method. The effects of various flow parameters on flow variables are discussed and results are analyzed graphically.