The document presents an assessment of fuel cell applications for critical industrial processes. It discusses various fuel cell technologies and their current challenges. A case study examines using a 200 kW phosphoric acid fuel cell system for a semiconductor crystal growth facility to provide reliable premium power. The facility experiences power quality issues that cause shutdowns costing $50,000-$500,000 per hour. The fuel cell system integrated with the existing backup system would cost $9.6 million with an estimated payback period of 4-14 years depending on annual costs of power quality-related losses. The conclusions state that while installation costs are still high, fuel cells can provide clean reliable power for critical industries, and applications with major revenue impacts from outages are most