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Don’t just think outside the box.
See outside the box.
MEMS-based Laser Beam Scanning Technology
Platform; Basis for Applications from Displays to 3D
Sensors and 3D Printers
Jari Honkanen
April 27, 2017
5/18/20172 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.
Outline
 Problem Statement
 Why Platform Strategy?
 What is Laser Beam Scanning (LBS) Technology?
 9 Laser Beam Scanning Applications
 Wrap-up
3 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS Business Challenge: Decreasing Average Selling Price
$0.00
$0.50
$1.00
$1.50
$2.00
$2.50
$3.00
$3.50
$4.00
2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020
MEMSASP
Year
MEMS Average Selling Price (ASP) 2000-2020
Source: Yole Developpment
4 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Business Challenge: Increasing Development Cost
[Above illustrative Data for ASICs]
Source: http://archive.cotsjournalonline.com
5 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Business Challenge
 Lower Prices … Lower Contribution Margin … and … Higher Development Costs
 Need huge volumes to justify development and to achieve positive ROI
 Are there markets large enough to produce needed volumes?
 Any strategies how to buck the trend?
6 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
6
Commodity - $0.05
Goods - $0.25
Service - $1.50
Experience - $4
Component
Feature
Application or System
Platform
Value
How to increase value? Food for thought …
7
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2016. ALL RIGHTS RESERVED.
5/18/2017
A group of technologies that are used as a
base upon which other applications are
developed
8
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2014. ALL RIGHTS RESERVED.
5/18/2017
MEMS Platform & ASIC Platform for Laser Beam Scanning Engine
MEMS Mirror Analog & Digital
ASICs
Application Software
Laser Diodes
Optical Elements
Electronics
Laser Beam Scanning Engine
Embedded
FW
Integrated Photonics Module Electronics Module
MEMS Laser Beam Scanning
Technology
Creating Applications
One Pixel at a Time
10
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2016. ALL RIGHTS RESERVED.
5/18/2017
Laser Beam Scanning Bi-axial MEMS Mirror Platform
Flexures
PZRs
Coil
Mirror
~Φ1mm
11
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2016. ALL RIGHTS RESERVED.
5/18/2017
SLOW SCAN AXIS
(Vertical)
FAST SCAN AXIS
(Horizontal)
Laser Beam Scanning Technology - MEMS
12
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2016. ALL RIGHTS RESERVED.
5/18/2017
Laser Beam
Laser Beam Scanning Technology – MEMS Horizontal Scan
13
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2016. ALL RIGHTS RESERVED.
5/18/2017
Laser Beam Scanning Technology – MEMS Vertical Scan
14 MICROVISION, INC. COPYRIGHT 2013. ALL RIGHTS RESERVED.5/18/2017
Coil Vertical
Drive Input
(Ramp Drive)
Magnetic Field
Laser Beam Scanning Technology – MEMS Electromagnetic Actuation
15 MICROVISION, INC. COPYRIGHT 2013. ALL RIGHTS RESERVED.5/18/2017
Coil Horizontal
Drive Input
(Sinusoidal drive)
Fast scan resonant scanner
f = 26.5 ~ 29.0 kHz
Magnetic Field
Laser Beam Scanning Technology – MEMS Electromagnetic Actuation
Laser Beam Scanning Applications
17 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Disclosure
 The following presents 9 LBS applications as “food for though” demonstrating how to a
single MicroVision platform MEMS design has been utilized for multiple applications
 Applications are presented at the high level of abstraction focusing to the MEMS-based
Laser Beam Scanning part of the system
 Rest of the System complexities have been severely simplified or simply omitted
LBS Display Applications
19 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Laser Beam Scanning for Displays – How it works
Red laser
Green laserBlue laser
2D MEMS
Micro mirror
Raster Scan
20 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
PicoP® Scanning Technology - Projection DisplayRaster ScanLaser Beam Scanning for Displays – How it works
22 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: Pico Projector
3 Laser RGB Pico Projector 5 Laser RRGGB Pico Projector
+ +
Image Source: Sony Corp.
Platform MEMS RGB Laser Diodes
Platform MEMS
RRGGB Laser
Diodes
23 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: 3D Pico Projector
+ +
Platform MEMS RGB Laser Diodes
24 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: Heads-Up Display (HUD)
Aftermarket HUD Original Equipment
(Embedded) HUD
Relay Optics
+
Platform MEMS RGB Laser Diodes
+
25 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: Augmented Reality Eyewear
Relay Optics
++
Viewing OpticsPlatform MEMS RGB Laser Diodes
+
LBS Sensing Applications
27
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
COPYRIGHT 2016. ALL RIGHTS RESERVED.
5/18/2017
Red laser
Green laser
Blue laser
2D MEMS
Micro mirror
IR laser
IR Photodetector
Laser Beam Scanning with Sensing – How does it work
• X,Y location of object known because of
knowledge of MEMS pointing angle.
• Z determined by Time-of-Flight
28 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: Interactive Projection
+
IR
+
IR Photodetector
Platform MEMS RGBIr Laser Diodes
29 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: Interactive AR Eyewear
+
IR
+
IR Photodetector
+
Beam Splitter
AR Display
Gesture Field
Platform MEMS RGBIr Laser Diodes
30 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: Mid-range LiDAR
+ IR
+
IR PhotodetectorPlatform MEMS IR Laser Diode
Other LBS Applications
32 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: 3D Printing
+
UV
a) UV MEMS Scanner
b) UV curable resin
c) Transparent tank bottom
d) Solidified resin
e) Lifting platform
Image Source: https://en.wikipedia.org/wiki/3D_printing
Platform MEMS UV Laser Diode
33 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS-based LBS Application: OCT (Optical Coherence Tomography)
+ + +
Image Source: Utku Baran, Wei Wei, Jingjiang Xu, Xiaoli Qi, Wyatt O. Davis, Ruikang K.
Wang, “Video-rate volumetric optical coherence tomography-based microangiography,”
Optial Engineering 55(4), 040503 (2016), doi: 10.1117/1.OE.55.4.040503.
Beam Splitters
IR Photodetector
Platform MEMS
1300nm IR
Laser Diode
Wrap-up
35 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Summary
 Produce MEMS, Sell Systems
Images Source: https://en.wikipedia.org/wiki/Amphicar
 Think platform to increase value, lifetime, and number of applications for your MEMS
device.
 But stay within reason, do not try to target too many non synergistic applications or
markets
 1961 Amphicar – Drove like a boat, floated like a car
DON’T JUST THINK OUTSIDE THE BOX.
SEE OUTSIDE THE BOX.
© 2016 MICROVISION, INC. ALL RIGHTS RESERVED.
PICOP IS A REGISTERED TRADEMARK OF MICROVISION, INC. ALL OTHER TRADEMARKS ARE
THE PROPERTY OF THEIR RESPECTIVE OWNERS.

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MEMS-based Laser Beam Scanning Technology Platform; Basis for Applications from Displays to 3D Sensors and 3D Printers

  • 1. Don’t just think outside the box. See outside the box. MEMS-based Laser Beam Scanning Technology Platform; Basis for Applications from Displays to 3D Sensors and 3D Printers Jari Honkanen April 27, 2017
  • 2. 5/18/20172 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED. Outline  Problem Statement  Why Platform Strategy?  What is Laser Beam Scanning (LBS) Technology?  9 Laser Beam Scanning Applications  Wrap-up
  • 3. 3 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS Business Challenge: Decreasing Average Selling Price $0.00 $0.50 $1.00 $1.50 $2.00 $2.50 $3.00 $3.50 $4.00 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020 MEMSASP Year MEMS Average Selling Price (ASP) 2000-2020 Source: Yole Developpment
  • 4. 4 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 Business Challenge: Increasing Development Cost [Above illustrative Data for ASICs] Source: http://archive.cotsjournalonline.com
  • 5. 5 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 Business Challenge  Lower Prices … Lower Contribution Margin … and … Higher Development Costs  Need huge volumes to justify development and to achieve positive ROI  Are there markets large enough to produce needed volumes?  Any strategies how to buck the trend?
  • 6. 6 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 6 Commodity - $0.05 Goods - $0.25 Service - $1.50 Experience - $4 Component Feature Application or System Platform Value How to increase value? Food for thought …
  • 7. 7 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2016. ALL RIGHTS RESERVED. 5/18/2017 A group of technologies that are used as a base upon which other applications are developed
  • 8. 8 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2014. ALL RIGHTS RESERVED. 5/18/2017 MEMS Platform & ASIC Platform for Laser Beam Scanning Engine MEMS Mirror Analog & Digital ASICs Application Software Laser Diodes Optical Elements Electronics Laser Beam Scanning Engine Embedded FW Integrated Photonics Module Electronics Module
  • 9. MEMS Laser Beam Scanning Technology Creating Applications One Pixel at a Time
  • 10. 10 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2016. ALL RIGHTS RESERVED. 5/18/2017 Laser Beam Scanning Bi-axial MEMS Mirror Platform Flexures PZRs Coil Mirror ~Φ1mm
  • 11. 11 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2016. ALL RIGHTS RESERVED. 5/18/2017 SLOW SCAN AXIS (Vertical) FAST SCAN AXIS (Horizontal) Laser Beam Scanning Technology - MEMS
  • 12. 12 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2016. ALL RIGHTS RESERVED. 5/18/2017 Laser Beam Laser Beam Scanning Technology – MEMS Horizontal Scan
  • 13. 13 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2016. ALL RIGHTS RESERVED. 5/18/2017 Laser Beam Scanning Technology – MEMS Vertical Scan
  • 14. 14 MICROVISION, INC. COPYRIGHT 2013. ALL RIGHTS RESERVED.5/18/2017 Coil Vertical Drive Input (Ramp Drive) Magnetic Field Laser Beam Scanning Technology – MEMS Electromagnetic Actuation
  • 15. 15 MICROVISION, INC. COPYRIGHT 2013. ALL RIGHTS RESERVED.5/18/2017 Coil Horizontal Drive Input (Sinusoidal drive) Fast scan resonant scanner f = 26.5 ~ 29.0 kHz Magnetic Field Laser Beam Scanning Technology – MEMS Electromagnetic Actuation
  • 16. Laser Beam Scanning Applications
  • 17. 17 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 Disclosure  The following presents 9 LBS applications as “food for though” demonstrating how to a single MicroVision platform MEMS design has been utilized for multiple applications  Applications are presented at the high level of abstraction focusing to the MEMS-based Laser Beam Scanning part of the system  Rest of the System complexities have been severely simplified or simply omitted
  • 19. 19 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 Laser Beam Scanning for Displays – How it works Red laser Green laserBlue laser 2D MEMS Micro mirror Raster Scan
  • 20. 20 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 PicoP® Scanning Technology - Projection DisplayRaster ScanLaser Beam Scanning for Displays – How it works
  • 21. 22 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: Pico Projector 3 Laser RGB Pico Projector 5 Laser RRGGB Pico Projector + + Image Source: Sony Corp. Platform MEMS RGB Laser Diodes Platform MEMS RRGGB Laser Diodes
  • 22. 23 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: 3D Pico Projector + + Platform MEMS RGB Laser Diodes
  • 23. 24 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: Heads-Up Display (HUD) Aftermarket HUD Original Equipment (Embedded) HUD Relay Optics + Platform MEMS RGB Laser Diodes +
  • 24. 25 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: Augmented Reality Eyewear Relay Optics ++ Viewing OpticsPlatform MEMS RGB Laser Diodes +
  • 26. 27 MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL COPYRIGHT 2016. ALL RIGHTS RESERVED. 5/18/2017 Red laser Green laser Blue laser 2D MEMS Micro mirror IR laser IR Photodetector Laser Beam Scanning with Sensing – How does it work • X,Y location of object known because of knowledge of MEMS pointing angle. • Z determined by Time-of-Flight
  • 27. 28 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: Interactive Projection + IR + IR Photodetector Platform MEMS RGBIr Laser Diodes
  • 28. 29 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: Interactive AR Eyewear + IR + IR Photodetector + Beam Splitter AR Display Gesture Field Platform MEMS RGBIr Laser Diodes
  • 29. 30 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: Mid-range LiDAR + IR + IR PhotodetectorPlatform MEMS IR Laser Diode
  • 31. 32 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: 3D Printing + UV a) UV MEMS Scanner b) UV curable resin c) Transparent tank bottom d) Solidified resin e) Lifting platform Image Source: https://en.wikipedia.org/wiki/3D_printing Platform MEMS UV Laser Diode
  • 32. 33 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 MEMS-based LBS Application: OCT (Optical Coherence Tomography) + + + Image Source: Utku Baran, Wei Wei, Jingjiang Xu, Xiaoli Qi, Wyatt O. Davis, Ruikang K. Wang, “Video-rate volumetric optical coherence tomography-based microangiography,” Optial Engineering 55(4), 040503 (2016), doi: 10.1117/1.OE.55.4.040503. Beam Splitters IR Photodetector Platform MEMS 1300nm IR Laser Diode
  • 34. 35 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017 Summary  Produce MEMS, Sell Systems Images Source: https://en.wikipedia.org/wiki/Amphicar  Think platform to increase value, lifetime, and number of applications for your MEMS device.  But stay within reason, do not try to target too many non synergistic applications or markets  1961 Amphicar – Drove like a boat, floated like a car
  • 35. DON’T JUST THINK OUTSIDE THE BOX. SEE OUTSIDE THE BOX. © 2016 MICROVISION, INC. ALL RIGHTS RESERVED. PICOP IS A REGISTERED TRADEMARK OF MICROVISION, INC. ALL OTHER TRADEMARKS ARE THE PROPERTY OF THEIR RESPECTIVE OWNERS.