This document analyzes the polarization and transmission effects of antireflection coatings for silicon-on-insulator (SOI) material systems using simulation software. Without a coating, transmission of transverse magnetic (TM) polarized light is slightly higher than transverse electric (TE) polarized light. A single-layer antireflection coating is designed and optimized to increase average transmission by 19%, reducing the polarization effect. However, multilayer coatings did not further increase transmission over the optimized single layer. In conclusion, antireflection coatings can effectively reduce polarization dependence for SOI materials while improving overall light transmission.
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