Optical metrology is a field that uses light-based methods to measure the physical features of objects with high accuracy, crucial in industries like manufacturing and semiconductors for maintaining quality control. Techniques such as interferometry enable non-contact measurements, allowing for the detection of minute defects without damaging sensitive materials. Various optical measuring systems, including coordinate measuring machines, optical comparators, and vision measuring systems, are employed to assess surface topography, dimensional accuracy, thickness, and defects.