Automotive sensors mems
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Microelectromechanical systems (MEMS) are tiny devices capable of sensing or manipulating physical phenomena, with components typically ranging from 10 to 100 micrometers. The document discusses the history, fabrication methods, applications, advantages, and challenges of MEMS, highlighting their critical role in modern technology, including automotive applications. Key fabrication techniques mentioned include bulk micromachining and LIGA, which enable the production of high-performance MEMS devices.
![6/8/2017
The
Technology
for
Everything!
presented by-Godwin Lobo
Micro Electro Mechanical System
[MEMS]](https://image.slidesharecdn.com/automotivesensors-mems-170608160947/85/Automotive-sensors-mems-1-320.jpg)
Automotive sensors mems
- 1. 6/8/2017 The Technology for Everything! presented by-Godwin Lobo Micro Electro Mechanical System [MEMS]
- 2. 6/8/2017 Outlines Introduction History Components Fabrication Of MEMS Typical Applications Advantages Of MEMS Relationship To Other Topics Automotive MEMS Summery
- 3. 6/8/2017 Introduction Microelectromechanical systems (MEMS) are micron-size devices that can sense or manipulate the physical world. MEMS are made up of components between 10 to 100 micrometers in size (i.e. 0.01 to 0.1 mm) and MEMS devices generally range in size from a 20 micrometers (20 millionth of a meter) to a millimeter (thousandth of a meter). Miniaturized System
- 4. 6/8/2017 History.... Transister invention: 1947 IC Invention:1958 Micromachining :1982 Turning Point Of Machine World :1987-1988 First MEMS :1990s
- 5. 6/8/2017 Components MEMS can include two or more of the following subsystems: sensors, actuators, a power supply, a central processing unit (CPU) Also microprocessor, and/or a communication interface.
- 6. 6/8/2017 Fabrication Of MEMS Bulk Micromachining : Bulk micromachining is the oldest paradigm of silicon based MEMS. The whole thickness of a substrate is used for building the micro- mechanical structures. Bulk micromachining has been essential in enabling high performance sensors. Can be formed by wet and dry etching of Si substrate.
- 7. LIGA : LIGA, a German acronym for (X-ray) lithography (Lithographie), Electroplating (Galvanoformung), and Molding (Abformung), is a process in microtechnology. LIGA is a relatively inexpensive fabrication technology. LIGA is a technology which creates small, but relatively high aspect ratio devices using x-ray lithography 6/8/2017
- 8. 6/8/2017 Typical Applications Accelerometer Magnetometer Microphone Bridge To Nanotechnology
- 9. Advantage Of MEMS Improved Performance Reduced Manufacturing Cost & Time Ruggedness Low Power Consumption Easily Maintained & Replaced
- 10. 6/8/2017 MEMS Current Challenges Young Industry- MEMS Industry in many aspects is still young industry. More Devolopment- Long Development cycle. Training- MEMS engineers are need to be trained.