Mems switches as an alternative to CMOS Technology
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The document discusses MEMS switches as alternatives to CMOS technology, highlighting their advantages such as lower switching losses and efficiency compared to traditional transistors. It covers the operational characteristics of MEMS switches, including resonating switches and the implications of their design parameters on performance metrics like on and off resistance. Additionally, it provides examples of commercial applications and references for further reading.
![MOTIVATION
Transistors have leakage
resistances and capacitances.
They become less efficient
and consume power (nW or
uW) even when OFF or in
quiescent state. [7]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-3-320.jpg)
![WINE-GLASS RESO-SWITCH FOR AMPLIFIERS [2]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-12-320.jpg)
![SUSPENDED GATE RELAY FOR DIGITAL LOGIC
[1,3]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-16-320.jpg)
![BAND SELECTOR SINGLE POLE 4 THROW RF
SWITCH [4]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-19-320.jpg)
![RF MEMS SWITCH
• GE's tiny MEMS switch
measures just 100 microns
square and yet can switch up
to 5 kilowatts of power at 3
GHz.
(Source: General Electric) [5]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-20-320.jpg)
![COMMERCIAL RF MEMS SWITCH BY OMRON [6]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-21-320.jpg)
![RATINGS [6]](https://image.slidesharecdn.com/memsswitchespresentation-160809183119/85/Mems-switches-as-an-alternative-to-CMOS-Technology-22-320.jpg)
Mems switches as an alternative to CMOS Technology
- 1. MEMS SWITCHES AS AN ALTERNATIVE TO CMOS TECHNOLOGY DEVANG SANKHALA DGS150030 4/11/2016
- 2. INTRODUCTION • Switches are easy to use: push, toggle or turn. But they are BIG. • Transistors are used to scale down electronics devices and make them lighter, power efficient and easy to use
- 3. MOTIVATION Transistors have leakage resistances and capacitances. They become less efficient and consume power (nW or uW) even when OFF or in quiescent state. [7]
- 4. WHY MEMS SWITCHES ARE SUPERIOR THAT WAY? • For an ideal switch, requirements are: • On resistance is zero • Off resistance is infinite • Off capacitance is zero
- 5. REAL MEMS SWITCHES • In a real switch: • On resistance is lower as it can have metal as a conductor rather than semiconductor • Off resistance is infinite due to air gap • Capacitance still dominates the model and is to be reduced by the designer.
- 6. FIGURE OF MERIT (FOM) FOR A SWITCH • 𝐹𝑂𝑀 = 1 2π𝑅 𝑜𝑛 𝐶 𝑜𝑓𝑓 •For a higher FOM, the characteristics should match that of an ideal switch, thus FOM tends to infinity.
- 7. SWITCHING LOSSES • 𝑃 = 1 2 𝐶𝑉2 𝑓2 • Higher the switching voltage and frequency, higher the losses. • Scaled for lowest power dissipation
- 8. THE OPERATING REGION PROBLEM As per the Bode plot for a mechanical system, we have 3 regions: • Below resonance • At resonance (3dB bandwidth) • Above resonance
- 9. THE OPERATING REGIONS FOR MEMS SWITCH 1. At resonance (resonating switch) 2. Below resonance
- 10. THE RESONATING SWITCH (RESOSWITCH) • A cross-product of a resonator and a switch • Operates in narrow 3db Bandwidth • 𝑋 = 𝑄𝐹 𝑘
- 11. THE RESONATING SWITCH (RESO-SWITCH) • Theoretically allows large gap sizes due to Q, thus small parasitic losses. • Phase of system is non-zero and varies sharply • Large switching losses
- 12. WINE-GLASS RESO-SWITCH FOR AMPLIFIERS [2]
- 13. SWITCHING BELOW RESONANCE • Operates in the flat region between DC and a decade before resonant frequency • 𝑋 = 𝐹 𝑘
- 14. SWITCHING BELOW RESONANCE • Low switching losses • Phase is ideally zero
- 15. DRIVING SWITCHES WITH HIGH PULL IN VOLTAGE • When pull in voltages are high for a given design which operates below resonance, input voltage can be amplified using: • Charge pumps • Gate drivers
- 16. SUSPENDED GATE RELAY FOR DIGITAL LOGIC [1,3]
- 19. BAND SELECTOR SINGLE POLE 4 THROW RF SWITCH [4]
- 20. RF MEMS SWITCH • GE's tiny MEMS switch measures just 100 microns square and yet can switch up to 5 kilowatts of power at 3 GHz. (Source: General Electric) [5]
- 21. COMMERCIAL RF MEMS SWITCH BY OMRON [6]
- 22. RATINGS [6]
- 23. REFERENCES 1. Manohar et. al, “Heterogeneous NEMS-CMOS DCM Buck Regulator for Improved Area and Enhanced Power Efficiency”, IEEE TRANSACTIONS ON NANOTECHNOLOGY, VOL. 14, NO. 1, JANUARY 2015 2. Nguyen et. al, “A resonance dynamical approach to faster, more reliable micromechanical switches,” Proceedings, 2008 IEEE Int. Frequency Control Symp., Honolulu, Hawaii, May 19-21, 2008, pp. 640-645 3. Hei Kam et. al, :Design and Reliability of a Micro-Relay Technology for Zero-Standby-Power Digital Logic Applications”, 4. Kang et. al, “Single Pole Four Throw Rf Mems Switch With Double Stop”, MEMS 2008, Tucson, AZ, USA, January 13-17, 2008 5. http://www.eetimes.com/document.asp?doc_id=1321677 6. http://www.mouser.com/ds/2/307/2SMES-01_0911-15621.pdf 7. Paul Gray Et Al, Analysis and Design of Analog Integrated Circuits, 5e