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Microengineering MEMS and Interfacing A Practical
Guide 1st Edition Danny Banks Digital Instant Download
Author(s): Danny Banks
ISBN(s): 9781420015416, 1420015419
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Year: 2006
Language: english

DK3182_half 1/18/06 11:31 AM Page 1
Microengineering,MEMS,
andInterfacing
APracticalGuide
Copyright © 2006 Taylor & Francis Group, LLC

MECHANICAL ENGINEERING
A Series of Textbooks and Reference Books
Founding Editor
L. L. Faulkner
Columbus Division, Battelle Memorial Institute
and Department of Mechanical Engineering
The Ohio State University
Columbus, Ohio
1. Spring Designer’s Handbook, Harold Carlson
2. Computer-Aided Graphics and Design, Daniel L. Ryan
3. Lubrication Fundamentals, J. George Wills
4. Solar Engineering for Domestic Buildings, William A. Himmelman
5. Applied Engineering Mechanics: Statics and Dynamics, G. Boothroyd
and C. Poli
6. Centrifugal Pump Clinic, Igor J. Karassik
7. Computer-Aided Kinetics for Machine Design, Daniel L. Ryan
8. Plastics Products Design Handbook, Part A: Materials
and Components; Part B: Processes and Design for Processes,
edited by Edward Miller
9. Turbomachinery: Basic Theory and Applications, Earl Logan, Jr.
10. Vibrations of Shells and Plates, Werner Soedel
11. Flat and Corrugated Diaphragm Design Handbook, Mario Di Giovanni
12. Practical Stress Analysis in Engineering Design, Alexander Blake
13. An Introduction to the Design and Behavior of Bolted Joints,
John H. Bickford
14. Optimal Engineering Design: Principles and Applications,
James N. Siddall
15. Spring Manufacturing Handbook, Harold Carlson
16. Industrial Noise Control: Fundamentals and Applications,
edited by Lewis H. Bell
17. Gears and Their Vibration: A Basic Approach to Understanding Gear
Noise, J. Derek Smith
18. Chains for Power Transmission and Material Handling:
Design and Applications Handbook, American Chain Association
19. Corrosion and Corrosion Protection Handbook, edited by
Philip A. Schweitzer
20. Gear Drive Systems: Design and Application, Peter Lynwander
21. Controlling In-Plant Airborne Contaminants: Systems Design
and Calculations, John D. Constance
22. CAD/CAM Systems Planning and Implementation, Charles S. Knox
23. Probabilistic Engineering Design: Principles and Applications,
James N. Siddall
DK3182_series.qxd 1/19/06 8:35 AM Page 1

24. Traction Drives: Selection and Application, Frederick W. Heilich III
and Eugene E. Shube
25. Finite Element Methods: An Introduction, Ronald L. Huston
and Chris E. Passerello
26. Mechanical Fastening of Plastics: An Engineering Handbook,
Brayton Lincoln, Kenneth J. Gomes, and James F. Braden
27. Lubrication in Practice: Second Edition, edited by W. S. Robertson
28. Principles of Automated Drafting, Daniel L. Ryan
29. Practical Seal Design, edited by Leonard J. Martini
30. Engineering Documentation for CAD/CAM Applications, Charles S. Knox
31. Design Dimensioning with Computer Graphics Applications,
Jerome C. Lange
32. Mechanism Analysis: Simplified Graphical and Analytical Techniques,
Lyndon O. Barton
33. CAD/CAM Systems: Justification, Implementation, Productivity
Measurement, Edward J. Preston, George W. Crawford,
and Mark E. Coticchia
34. Steam Plant Calculations Manual, V. Ganapathy
35. Design Assurance for Engineers and Managers, John A. Burgess
36. Heat Transfer Fluids and Systems for Process and Energy Applications,
Jasbir Singh
37. Potential Flows: Computer Graphic Solutions, Robert H. Kirchhoff
38. Computer-Aided Graphics and Design: Second Edition, Daniel L. Ryan
39. Electronically Controlled Proportional Valves: Selection
and Application, Michael J. Tonyan, edited by Tobi Goldoftas
40. Pressure Gauge Handbook, AMETEK, U.S. Gauge Division,
edited by Philip W. Harland
41. Fabric Filtration for Combustion Sources: Fundamentals and Basic
Technology, R. P. Donovan
42. Design of Mechanical Joints, Alexander Blake
43. CAD/CAM Dictionary, Edward J. Preston, George W. Crawford,
and Mark E. Coticchia
44. Machinery Adhesives for Locking, Retaining, and Sealing,
Girard S. Haviland
45. Couplings and Joints: Design, Selection, and Application, Jon R. Mancuso
46. Shaft Alignment Handbook, John Piotrowski
47. BASIC Programs for Steam Plant Engineers: Boilers, Combustion,
Fluid Flow, and Heat Transfer, V. Ganapathy
48. Solving Mechanical Design Problems with Computer Graphics,
Jerome C. Lange
49. Plastics Gearing: Selection and Application, Clifford E. Adams
50. Clutches and Brakes: Design and Selection, William C. Orthwein
51. Transducers in Mechanical and Electronic Design, Harry L. Trietley
52. Metallurgical Applications of Shock-Wave and High-Strain-Rate
Phenomena, edited by Lawrence E. Murr, Karl P. Staudhammer,
and Marc A. Meyers
53. Magnesium Products Design, Robert S. Busk
54. How to Integrate CAD/CAM Systems: Management and Technology,
William D. Engelke

55. Cam Design and Manufacture: Second Edition; with cam design software
for the IBM PC and compatibles, disk included, Preben W. Jensen
56. Solid-State AC Motor Controls: Selection and Application,
Sylvester Campbell
57. Fundamentals of Robotics, David D. Ardayfio
58. Belt Selection and Application for Engineers, edited by
Wallace D. Erickson
59. Developing Three-Dimensional CAD Software with the IBM PC,
C. Stan Wei
60. Organizing Data for CIM Applications, Charles S. Knox, with contributions
by Thomas C. Boos, Ross S. Culverhouse, and Paul F. Muchnicki
61. Computer-Aided Simulation in Railway Dynamics, by Rao V. Dukkipati
and Joseph R. Amyot
62. Fiber-Reinforced Composites: Materials, Manufacturing, and Design,
P. K. Mallick
63. Photoelectric Sensors and Controls: Selection and Application,
Scott M. Juds
64. Finite Element Analysis with Personal Computers, Edward R. Champion,
Jr. and J. Michael Ensminger
65. Ultrasonics: Fundamentals, Technology, Applications: Second Edition,
Revised and Expanded, Dale Ensminger
66. Applied Finite Element Modeling: Practical Problem Solving for Engineers,
Jeffrey M. Steele
67. Measurement and Instrumentation in Engineering: Principles and Basic
Laboratory Experiments, Francis S. Tse and Ivan E. Morse
68. Centrifugal Pump Clinic: Second Edition, Revised and Expanded,
Igor J. Karassik
69. Practical Stress Analysis in Engineering Design: Second Edition,
Revised and Expanded, Alexander Blake
70. An Introduction to the Design and Behavior of Bolted Joints:
Second Edition, Revised and Expanded, John H. Bickford
71. High Vacuum Technology: A Practical Guide, Marsbed H. Hablanian
72. Pressure Sensors: Selection and Application, Duane Tandeske
73. Zinc Handbook: Properties, Processing, and Use in Design, Frank Porter
74. Thermal Fatigue of Metals, Andrzej Weronski and Tadeusz Hejwowski
75. Classical and Modern Mechanisms for Engineers and Inventors,
Preben W. Jensen
76. Handbook of Electronic Package Design, edited by Michael Pecht
77. Shock-Wave and High-Strain-Rate Phenomena in Materials, edited by
Marc A. Meyers, Lawrence E. Murr, and Karl P. Staudhammer
78. Industrial Refrigeration: Principles, Design and Applications, P. C. Koelet
79. Applied Combustion, Eugene L. Keating
80. Engine Oils and Automotive Lubrication, edited by Wilfried J. Bartz
81. Mechanism Analysis: Simplified and Graphical Techniques, Second
Edition, Revised and Expanded, Lyndon O. Barton
82. Fundamental Fluid Mechanics for the Practicing Engineer,
James W. Murdock
83. Fiber-Reinforced Composites: Materials, Manufacturing, and Design,
Second Edition, Revised and Expanded, P. K. Mallick

84. Numerical Methods for Engineering Applications,
Edward R. Champion, Jr.
85. Turbomachinery: Basic Theory and Applications, Second Edition,
Revised and Expanded, Earl Logan, Jr.
86. Vibrations of Shells and Plates: Second Edition, Revised and Expanded,
Werner Soedel
87. Steam Plant Calculations Manual: Second Edition, Revised
and Expanded, V. Ganapathy
88. Industrial Noise Control: Fundamentals and Applications, Second Edition,
Revised and Expanded, Lewis H. Bell and Douglas H. Bell
89. Finite Elements: Their Design and Performance, Richard H. MacNeal
90. Mechanical Properties of Polymers and Composites:
Second Edition, Revised and Expanded, Lawrence E. Nielsen
and Robert F. Landel
91. Mechanical Wear Prediction and Prevention, Raymond G. Bayer
92. Mechanical Power Transmission Components, edited by
David W. South and Jon R. Mancuso
93. Handbook of Turbomachinery, edited by Earl Logan, Jr.
94. Engineering Documentation Control Practices and Procedures,
Ray E. Monahan
95. Refractory Linings Thermomechanical Design and Applications,
Charles A. Schacht
96. Geometric Dimensioning and Tolerancing: Applications and Techniques
for Use in Design, Manufacturing,
and Inspection, James D. Meadows
97. An Introduction to the Design and Behavior of Bolted Joints: Third Edition,
Revised and Expanded, John H. Bickford
98. Shaft Alignment Handbook: Second Edition, Revised and Expanded,
John Piotrowski
99. Computer-Aided Design of Polymer-Matrix Composite Structures,
edited by Suong Van Hoa
100. Friction Science and Technology, Peter J. Blau
101. Introduction to Plastics and Composites: Mechanical Properties
and Engineering Applications, Edward Miller
102. Practical Fracture Mechanics in Design, Alexander Blake
103. Pump Characteristics and Applications, Michael W. Volk
104. Optical Principles and Technology for Engineers, James E. Stewart
105. Optimizing the Shape of Mechanical Elements and Structures,
A. A. Seireg and Jorge Rodriguez
106. Kinematics and Dynamics of Machinery, Vladimír Stejskal
and Michael Valásek
107. Shaft Seals for Dynamic Applications, Les Horve
108. Reliability-Based Mechanical Design, edited by Thomas A. Cruse
109. Mechanical Fastening, Joining, and Assembly, James A. Speck
110. Turbomachinery Fluid Dynamics and Heat Transfer, edited by Chunill Hah
111. High-Vacuum Technology: A Practical Guide, Second Edition,
Revised and Expanded, Marsbed H. Hablanian
112. Geometric Dimensioning and Tolerancing: Workbook and Answerbook,
James D. Meadows

113. Handbook of Materials Selection for Engineering Applications,
edited by G. T. Murray
114. Handbook of Thermoplastic Piping System Design, Thomas Sixsmith
and Reinhard Hanselka
115. Practical Guide to Finite Elements: A Solid Mechanics Approach,
Steven M. Lepi
116. Applied Computational Fluid Dynamics, edited by Vijay K. Garg
117. Fluid Sealing Technology, Heinz K. Muller and Bernard S. Nau
118. Friction and Lubrication in Mechanical Design, A. A. Seireg
119. Influence Functions and Matrices, Yuri A. Melnikov
120. Mechanical Analysis of Electronic Packaging Systems,
Stephen A. McKeown
121. Couplings and Joints: Design, Selection, and Application, Second Edition,
Revised and Expanded, Jon R. Mancuso
122. Thermodynamics: Processes and Applications, Earl Logan, Jr.
123. Gear Noise and Vibration, J. Derek Smith
124. Practical Fluid Mechanics for Engineering Applications, John J. Bloomer
125. Handbook of Hydraulic Fluid Technology, edited by George E. Totten
126. Heat Exchanger Design Handbook, T. Kuppan
127. Designing for Product Sound Quality, Richard H. Lyon
128. Probability Applications in Mechanical Design, Franklin E. Fisher
and Joy R. Fisher
129. Nickel Alloys, edited by Ulrich Heubner
130. Rotating Machinery Vibration: Problem Analysis and Troubleshooting,
Maurice L. Adams, Jr.
131. Formulas for Dynamic Analysis, Ronald L. Huston and C. Q. Liu
132. Handbook of Machinery Dynamics, Lynn L. Faulkner and Earl Logan, Jr.
133. Rapid Prototyping Technology: Selection and Application,
Kenneth G. Cooper
134. Reciprocating Machinery Dynamics: Design and Analysis,
Abdulla S. Rangwala
135. Maintenance Excellence: Optimizing Equipment Life-Cycle Decisions,
edited by John D. Campbell and Andrew K. S. Jardine
136. Practical Guide to Industrial Boiler Systems, Ralph L. Vandagriff
137. Lubrication Fundamentals: Second Edition, Revised and Expanded,
D. M. Pirro and A. A. Wessol
138. Mechanical Life Cycle Handbook: Good Environmental Design
and Manufacturing, edited by Mahendra S. Hundal
139. Micromachining of Engineering Materials, edited by Joseph McGeough
140. Control Strategies for Dynamic Systems: Design and Implementation,
John H. Lumkes, Jr.
141. Practical Guide to Pressure Vessel Manufacturing, Sunil Pullarcot
142. Nondestructive Evaluation: Theory, Techniques, and Applications,
edited by Peter J. Shull
143. Diesel Engine Engineering: Thermodynamics, Dynamics, Design,
and Control, Andrei Makartchouk
144. Handbook of Machine Tool Analysis, Ioan D. Marinescu, Constantin Ispas,
and Dan Boboc

145. Implementing Concurrent Engineering in Small Companies,
Susan Carlson Skalak
146. Practical Guide to the Packaging of Electronics: Thermal and Mechanical
Design and Analysis, Ali Jamnia
147. Bearing Design in Machinery: Engineering Tribology and Lubrication,
Avraham Harnoy
148. Mechanical Reliability Improvement: Probability and Statistics for
Experimental Testing, R. E. Little
149. Industrial Boilers and Heat Recovery Steam Generators: Design,
Applications, and Calculations, V. Ganapathy
150. The CAD Guidebook: A Basic Manual for Understanding
and Improving Computer-Aided Design, Stephen J. Schoonmaker
151. Industrial Noise Control and Acoustics, Randall F. Barron
152. Mechanical Properties of Engineered Materials, Wolé Soboyejo
153. Reliability Verification, Testing, and Analysis in Engineering Design,
Gary S. Wasserman
154. Fundamental Mechanics of Fluids: Third Edition, I. G. Currie
155. Intermediate Heat Transfer, Kau-Fui Vincent Wong
156. HVAC Water Chillers and Cooling Towers: Fundamentals, Application,
and Operation, Herbert W. Stanford III
157. Gear Noise and Vibration: Second Edition, Revised and Expanded,
J. Derek Smith
158. Handbook of Turbomachinery: Second Edition, Revised and Expanded,
edited by Earl Logan, Jr. and Ramendra Roy
159. Piping and Pipeline Engineering: Design, Construction, Maintenance,
Integrity, and Repair, George A. Antaki
160. Turbomachinery: Design and Theory, Rama S. R. Gorla
and Aijaz Ahmed Khan
161. Target Costing: Market-Driven Product Design, M. Bradford Clifton,
Henry M. B. Bird, Robert E. Albano, and Wesley P. Townsend
162. Fluidized Bed Combustion, Simeon N. Oka
163. Theory of Dimensioning: An Introduction to Parameterizing Geometric
Models, Vijay Srinivasan
164. Handbook of Mechanical Alloy Design, edited by George E. Totten,
Lin Xie, and Kiyoshi Funatani
165. Structural Analysis of Polymeric Composite Materials, Mark E. Tuttle
166. Modeling and Simulation for Material Selection and Mechanical Design,
edited by George E. Totten, Lin Xie, and Kiyoshi Funatani
167. Handbook of Pneumatic Conveying Engineering, David Mills,
Mark G. Jones, and Vijay K. Agarwal
168. Clutches and Brakes: Design and Selection, Second Edition,
William C. Orthwein
169. Fundamentals of Fluid Film Lubrication: Second Edition,
Bernard J. Hamrock, Steven R. Schmid, and Bo O. Jacobson
170. Handbook of Lead-Free Solder Technology for Microelectronic
Assemblies, edited by Karl J. Puttlitz and Kathleen A. Stalter
171. Vehicle Stability, Dean Karnopp
172. Mechanical Wear Fundamentals and Testing: Second Edition,
Revised and Expanded, Raymond G. Bayer
173. Liquid Pipeline Hydraulics, E. Shashi Menon

174. Solid Fuels Combustion and Gasification, Marcio L. de Souza-Santos
175. Mechanical Tolerance Stackup and Analysis, Bryan R. Fischer
176. Engineering Design for Wear, Raymond G. Bayer
177. Vibrations of Shells and Plates: Third Edition, Revised and Expanded,
Werner Soedel
178. Refractories Handbook, edited by Charles A. Schacht
179. Practical Engineering Failure Analysis, Hani M. Tawancy, Anwar Ul-Hamid,
and Nureddin M. Abbas
180. Mechanical Alloying and Milling, C. Suryanarayana
181. Mechanical Vibration: Analysis, Uncertainties, and Control,
Second Edition, Revised and Expanded, Haym Benaroya
182. Design of Automatic Machinery, Stephen J. Derby
183. Practical Fracture Mechanics in Design: Second Edition,
Revised and Expanded, Arun Shukla
184. Practical Guide to Designed Experiments, Paul D. Funkenbusch
185. Gigacycle Fatigue in Mechanical Practive, Claude Bathias
and Paul C. Paris
186. Selection of Engineering Materials and Adhesives, Lawrence W. Fisher
187. Boundary Methods: Elements, Contours, and Nodes, Subrata Mukherjee
and Yu Xie Mukherjee
188. Rotordynamics, Agnieszka (Agnes) Muszńyska
189. Pump Characteristics and Applications: Second Edition, Michael W. Volk
190. Reliability Engineering: Probability Models and Maintenance Methods,
Joel A. Nachlas
191. Industrial Heating: Principles, Techniques, Materials, Applications,
and Design, Yeshvant V. Deshmukh
192. Micro Electro Mechanical System Design, James J. Allen
193. Probability Models in Engineering and Science, Haym Benaroya
and Seon Han
194. Damage Mechanics, George Z. Voyiadjis and Peter I. Kattan
195. Standard Handbook of Chains: Chains for Power Transmission
and Material Handling, Second Edition, American Chain Association
and John L. Wright, Technical Consultant
196. Standards for Engineering Design and Manufacturing,
Wasim Ahmed Khan and Abdul Raouf S.I.
197. Maintenance, Replacement, and Reliability: Theory and Applications,
Andrew K. S. Jardine and Albert H. C. Tsang
198. Finite Element Method: Applications in Solids, Structures, and Heat
Transfer, Michael R. Gosz
199. Microengineering, MEMS, and Interfacing: A Practical Guide,
Danny Banks

DK3182_title 1/19/06 8:35 AM Page 1
Microengineering,MEMS,
andInterfacing
APracticalGuide
DannyBanks
Monisys Ltd.
Birmingham, England
A CRC title, part of the Taylor & Francis imprint, a member of the
Taylor & Francis Group, the academic division of T&F Informa plc.
Boca Raton London New York

Published in 2006 by
CRC Press
Taylor & Francis Group
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© 2006 by Taylor & Francis Group, LLC
CRC Press is an imprint of Taylor & Francis Group
No claim to original U.S. Government works
Printed in the United States of America on acid-free paper
10 9 8 7 6 5 4 3 2 1
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DK3182_Discl.fm Page 1 Monday, January 23, 2006 2:10 PM

Dedication
To Amanda Lamb
DK3182_C000.fm Page v Thursday, February 2, 2006 4:41 PM

Acknowledgments
I would like to thank everyone who has contributed material and assistance. Material
contributions should be acknowledged in the text, and I can only apologize if any
of these have been accidentally omitted. To you, and everyone else, many thanks.
DK3182_C000.fm Page vii Monday, February 13, 2006 10:25 AM

The Author
Danny Banks first studied electronic engineering at Leicester Polytechnic (now
DeMontfort University), U.K., graduating in 1990 with a B.Eng. (Hons). He then
joined the University of Surrey, U.K., as a Ph.D. student. His research involved
modeling and experimental investigation of micromachined microelectrodes for
recording neural signals from peripheral nerve trunks. He was awarded his Ph.D.
in 1995. Subsequently, he was employed as a postdoctoral research fellow in the
biomedical engineering group and was able to spend a further three years on this
research. From 1997 to 1999, he was employed as a postdoctoral fellow at the
European Molecular Biology Laboratory in Heidelberg, Germany. His work
involved the investigation of microfabricated devices for biochemical analysis of
single cells. He was also involved in the promotion of artificial microstructures
for applications in molecular biology.
Since 1999 Dr. Banks has been employed at Monisys, a small company
specializing in embedded systems, sensors, and instrumentation R&D, located in
Birmingham, U.K. He is presently technical director.
Dr. Banks is a member of the Institute of Electrical Engineers (IEE), the
Society for Experimental Biology of the Institute of Electrical and Electronics
Engineers (IEEE) and Euroscience.
DK3182_C000.fm Page ix Thursday, February 2, 2006 4:41 PM

Table of Contents
Part 1
Micromachining.......................................................1
I.1 Introduction..................................................................................................1
I.1.1 What Is Microengineering?.............................................................1
I.1.2 Why Is Microengineering Important?.............................................3
I.1.3 How Can I Make Money out of Microengineering?......................5
References .............................................................................................................7
Chapter 1 Photolithography..............................................................................9
1.1 Introduction..................................................................................................9
1.2 UV Photolithography.................................................................................10
1.2.1 UV Exposure Systems...................................................................11
1.2.1.1 Mask Aligners .................................................................12
1.2.1.2 UV Light Sources ...........................................................15
1.2.1.3 Optical Systems...............................................................15
1.2.1.3.1 Contact and Proximity Printing .....................16
1.2.1.3.2 Projection Printing..........................................17
1.2.1.3.3 Projection and Contact Printing Compared...18
1.2.1.4 Optical Oddities ..............................................................19
1.2.1.4.1 The Difference between Negative
and Positive Resists........................................19
1.2.1.4.2 Optical Aberrations and Distortions ..............19
1.2.1.4.3 Optical Proximity Effects...............................20
1.2.1.4.4 Reflection from the Substrate ........................20
1.2.2 Shadow Masks...............................................................................21
1.2.3 Photoresists and Resist Processing ...............................................21
1.2.3.1 Photoresists......................................................................22
1.2.3.2 Photoresist Processing.....................................................24
1.2.3.2.1 Cleaning the Substrate ...................................25
1.2.3.2.2 Applying Photoresists ....................................27
1.2.3.2.3 Postexposure Processing ................................28
1.3 X-Ray Lithography....................................................................................28
1.3.1 Masks for X-Ray Lithography......................................................29
1.4 Direct-Write (E-Beam) Lithography.........................................................30
1.5 Low-Cost Photolithography ......................................................................32
1.6 Photolithography — Key Points ...............................................................34
References ...........................................................................................................35
DK3182_C000.fm Page xi Thursday, February 2, 2006 4:41 PM

Chapter 2 Silicon Micromachining................................................................37
2.1 Introduction................................................................................................37
2.2 Silicon........................................................................................................37
2.2.1 Miller Indices.................................................................................39
2.3 Crystal Growth ..........................................................................................39
2.4 Doping .......................................................................................................40
2.4.1 Thermal Diffusion .........................................................................41
2.4.2 Ion Implantation ............................................................................41
2.5 Wafer Specifications..................................................................................42
2.6 Thin Films .................................................................................................45
2.6.1 Materials and Deposition ..............................................................45
2.6.1.1 Depositing Thin Films ....................................................47
2.6.1.1.1 Thermal Oxidation .........................................47
2.6.1.1.2 Chemical Vapor Deposition ...........................47
2.6.1.1.3 Sputter Deposition..........................................49
2.6.1.1.4 Evaporation.....................................................50
2.6.1.1.5 Spinning..........................................................50
2.6.1.1.6 Summary.........................................................50
2.6.2 Wet Etching ...................................................................................52
2.6.3 Dry Etching ...................................................................................56
2.6.3.1 Relative Ion Etching .......................................................56
2.6.3.2 Ion-Beam Milling............................................................57
2.6.4 Liftoff.............................................................................................58
2.7 Structures in Silicon ..................................................................................59
2.7.1 Bulk Silicon Micromachining.......................................................59
2.7.1.1 Pits, Mesas, Bridges, Beams, and Membranes
with KOH........................................................................59
2.7.1.2 Fine Points through Wet and Dry Etching .....................63
2.7.1.3 RIE Pattern Transfer .......................................................64
2.7.1.4 Reflow .............................................................................64
2.7.2 Surface Micromachining ...............................................................64
2.7.3 Electrochemical Etching of Silicon ..............................................67
2.7.4 Porous Silicon................................................................................67
2.7.5 Wafer Bonding...............................................................................67
2.8 Wafer Dicing .............................................................................................68
2.8.1 The Dicing Saw.............................................................................68
2.8.2 Diamond and Laser Scribe............................................................69
2.8.3 Releasing Structures by KOH Etching .........................................70
References ...........................................................................................................72
Chapter 3 Nonsilicon Processes.....................................................................73
3.1 Introduction................................................................................................73
3.2 Chemical–Mechanical Polishing...............................................................73
3.3 LIGA and Electroplating...........................................................................74
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3.4 Photochemical Machining.........................................................................75
3.5 Laser Machining........................................................................................75
3.5.1 IR Lasers........................................................................................76
3.5.2 Excimer Laser Micromachining....................................................77
3.6 Polymer Microforming..............................................................................79
3.6.1 Polyimides .....................................................................................80
3.6.2 Photoformable Epoxies (SU-8).....................................................80
3.6.3 Parylene and PTFE........................................................................81
3.6.4 Dry Film Resists............................................................................81
3.6.5 Embossing......................................................................................82
3.6.6 PDMS Casting...............................................................................83
3.6.7 Microcontact Printing....................................................................86
3.6.8 Microstereolithography..................................................................87
3.7 Electrical Discharge Machining................................................................89
3.8 Photostructurable Glasses..........................................................................90
3.9 Precision Engineering................................................................................91
3.9.1 Roughness Measurements .............................................................92
3.10 Other Processes .........................................................................................93
References ...........................................................................................................94
Chapter 4 Mask Design..................................................................................95
4.1 Introduction................................................................................................95
4.2 Minimum Feature Size..............................................................................95
4.3 Layout Software ........................................................................................95
4.3.1 File Formats...................................................................................97
4.3.1.1 Technology Files.............................................................98
4.3.1.1.1 Units ...............................................................99
4.3.1.2 Further Caveats .............................................................100
4.3.2 Graphics.......................................................................................100
4.3.3 Grid..............................................................................................101
4.3.4 Text ..............................................................................................101
4.3.5 Other Features .............................................................................102
4.3.6 Manhattan Geometry...................................................................102
4.4 Design......................................................................................................103
4.4.1 The Frame and Alignment Marks...............................................104
4.4.1.1 Scribe Lane ...................................................................104
4.4.1.2 Alignment Marks ..........................................................105
4.4.1.3 Test Structures...............................................................107
4.4.1.4 Layer and Mask Set Identification Marks....................108
4.4.1.5 Putting It All Together ..................................................108
4.4.1.6 Another Way to Place Alignment Marks......................111
4.4.2 The Device...................................................................................111
4.5 Design Rules............................................................................................117
4.5.1 Developing Design Rules............................................................120
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4.6 Getting the Masks Produced ...................................................................122
4.6.1 Mask Plate Details.......................................................................122
4.6.2 Design File Details......................................................................123
4.6.3 Mask Set Details .........................................................................123
4.6.4 Step and Repeat...........................................................................124
4.6.5 Placement Requirements .............................................................124
4.7 Generating Gerber Files ..........................................................................124
4.8 Mask Design — Key Points....................................................................126
Part II
Microsystems .......................................................127
II.1 Introduction..............................................................................................127
II.1.1 Microsystem Components...........................................................128
Chapter 5 Microsensors................................................................................131
5.1 Introduction..............................................................................................131
5.2 Thermal Sensors......................................................................................131
5.2.1 Thermocouples ............................................................................131
5.2.2 Thermoresistors ...........................................................................132
5.2.3 Thermal Flow-Rate Sensors........................................................133
5.3 Radiation Sensors....................................................................................134
5.3.1 Photodiodes..................................................................................134
5.3.2 Phototransistors............................................................................135
5.3.3 Charge-Coupled Devices.............................................................135
5.3.4 Pyroelectric Sensors ....................................................................136
5.4 Magnetic Sensors.....................................................................................137
5.5 Chemical Sensors and Biosensors ..........................................................138
5.5.1 ISFET Sensors.............................................................................138
5.5.2 Enzyme-Based Biosensors ..........................................................140
5.6 Microelectrodes for Neurophysiology ....................................................141
5.7 Mechanical Sensors.................................................................................143
5.7.1 Piezoresistors...............................................................................143
5.7.2 Piezoelectric Sensors...................................................................144
5.7.3 Capacitive Sensors.......................................................................144
5.7.4 Optical Sensors............................................................................145
5.7.5 Resonant Sensors.........................................................................145
5.7.6 Accelerometers ............................................................................146
5.7.7 Pressure Sensors..........................................................................146
Chapter 6 Microactuators.............................................................................147
6.1 Introduction..............................................................................................147
6.2 Electrostatic Actuators.............................................................................147
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6.2.1 Comb Drives................................................................................148
6.2.2 Wobble Motors ............................................................................149
6.3 Magnetic Actuators..................................................................................150
6.4 Piezoelectric Actuators............................................................................151
6.5 Thermal Actuators ...................................................................................151
6.6 Hydraulic Actuators.................................................................................152
6.7 Multilayer Bonded Devices.....................................................................153
6.8 Microstimulators......................................................................................153
Chapter 7 Micro Total Analysis Systems.....................................................155
7.1 Introduction..............................................................................................155
7.2 Basic Chemistry.......................................................................................156
7.2.1 Inorganic Chemistry ....................................................................157
7.2.1.1 Bond Formation ............................................................159
7.2.1.2 pH..................................................................................161
7.2.2 Organic Chemistry.......................................................................162
7.2.2.1 Polymers........................................................................164
7.2.2.2 Silicones ........................................................................166
7.2.3 Biochemistry................................................................................167
7.2.3.1 Proteins..........................................................................168
7.2.3.2 Nucleic Acids ................................................................170
7.2.3.3 Lipids.............................................................................172
7.2.3.3.1 Fats ...............................................................173
7.2.3.3.2 Phospholipids ...............................................173
7.2.3.3.3 Cholesterol....................................................174
7.2.3.4 Carbohydrates................................................................175
7.3 Applications of Microengineered Devices in Chemistry
and Biochemistry.....................................................................................176
7.3.1 Chemistry.....................................................................................177
7.3.1.1 Synthesis........................................................................177
7.3.1.2 Process and Environmental Monitoring .......................177
7.3.2 Biochemistry................................................................................177
7.3.3 Biology ........................................................................................178
7.3.3.1 Microscopy....................................................................178
7.3.3.2 Radioactive Labeling ....................................................179
7.3.3.3 Chromatography............................................................180
7.3.3.4 Electrophoresis..............................................................181
7.3.3.5 Mass Spectrometry........................................................182
7.3.3.6 X-Ray Crystallography and NMR................................182
7.3.3.7 Other Processes and Advantages ..................................183
7.4 Micro Total Analysis Systems.................................................................183
7.4.1 Microfluidic Chips.......................................................................183
7.4.2 Laminar Flow and Surface Tension ............................................184
7.4.3 Electroosmotic Flow....................................................................185
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7.4.4 Sample Injection..........................................................................186
7.4.5 Microchannel Electrophoresis.....................................................186
7.4.6 Detection......................................................................................190
7.4.6.1 Laser-Induced Fluorescence (LIF)................................190
7.4.6.1.1 Derivatization ...............................................190
7.4.6.1.2 Advantages and Disadvantages
of LIF Detection...........................................190
7.4.6.2 Ultraviolet (UV) Absorbance........................................191
of UV Absorption.........................................191
7.4.6.3 Electrochemical Detection ............................................192
7.4.6.3.1 Cyclic Voltammetry......................................193
of Cyclic Voltammetry .................................194
7.4.6.4 Radioactive Labeling ....................................................194
7.4.6.5 Mass Spectrometry........................................................194
7.4.6.6 Nuclear Magnetic Resonance .......................................195
7.4.6.7 Other Sensors ................................................................195
7.5 DNA Chips ..............................................................................................196
7.5.1 DNA Chip Fabrication ................................................................196
7.6 The Polymerase Chain Reaction (PCR) .................................................197
7.7 Conducting Polymers and Hydrogels .....................................................197
7.7.1 Conducting Polymers ..................................................................198
7.7.2 Hydrogels.....................................................................................198
References .........................................................................................................199
Chapter 8 Integrated Optics .........................................................................201
8.1 Introduction..............................................................................................201
8.2 Waveguides..............................................................................................201
8.2.1 Optical Fiber Waveguides ...........................................................201
8.2.1.1 Fabrication of Optical Fibers........................................202
8.2.2 Planar Waveguides.......................................................................204
8.3 Integrated Optics Components................................................................204
8.4 Fiber Coupling.........................................................................................205
8.5 Other Applications...................................................................................205
8.5.1 Lenses ..........................................................................................205
8.5.2 Displays .......................................................................................206
8.5.3 Fiber-Optic Cross-Point Switches...............................................206
8.5.4 Tunable Optical Cavities.............................................................206
Chapter 9 Assembly and Packaging ............................................................209
9.1 Introduction..............................................................................................209
9.2 Assembly .................................................................................................209
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9.2.1 Design for Assembly...................................................................209
9.2.1.1 Auto- or Self-Alignment
and Self-Assembly ........................................................210
9.2.1.2 Future Possibilities........................................................211
9.3 Passivation ...............................................................................................211
9.4 Prepackage Testing .................................................................................212
9.5 Packaging.................................................................................................212
9.5.1 Conventional IC Packaging.........................................................213
9.5.2 Multichip Modules ......................................................................214
9.6 Wire Bonding ..........................................................................................214
9.6.1 Thermocompression Bonding .....................................................214
9.6.2 Ultrasonic Bonding......................................................................214
9.6.3 Flip-Chip Bonding.......................................................................215
9.7 Materials for Prototype Assembly and Packaging..................................215
Chapter 10 Nanotechnology..........................................................................217
10.1 Introduction............................................................................................217
10.2 The Scanning Electron Microscope ......................................................217
10.3 Scanning Probe Microscopy..................................................................219
10.3.1 Scanning Tunneling Electron Microscope...............................219
10.3.2 Atomic Force Microscope .......................................................220
10.3.3 Scanning Near-Field Optical Microscope ...............................221
10.3.4 Scanning Probe Microscope:
Control of the Stage.................................................................221
10.3.5 Artifacts and Calibration..........................................................221
10.4 Nanoelectromechanical Systems ...........................................................222
10.4.1 Nanolithography.......................................................................222
10.4.1.1 UV Photolithography for
Nanostructures.........................................................222
10.4.1.1.1 Phase-Shift Masks................................223
10.4.1.2 SPM “Pens”.............................................................224
10.4.2 Silicon Micromachining and Nanostructures ..........................224
10.4.3 Ion-Beam Milling.....................................................................225
10.5 Langmuir–Blodgett Films......................................................................227
10.6 Bionanotechnology ................................................................................228
10.6.1 Cell Membranes .......................................................................229
10.6.2 The Cytoskeleton .....................................................................230
10.6.3 Molecular Motors.....................................................................230
10.6.4 DNA-Associated Molecular Machines....................................232
10.6.5 Protein and DNA Engineering.................................................233
10.7 Molecular Nanotechnology....................................................................233
10.7.1 Buckminsterfullerene ...............................................................234
10.7.2 Dendrimers...............................................................................234
References .........................................................................................................235
DK3182_C000.fm Page xvii Thursday, February 2, 2006 4:41 PM

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W
XVI
THE SOUL OF A SONG
ITHIN, at one side of the room, a group of forty sisters,
more or less, sat listening to the song. The room was
spacious. Against its white walls hung various paintings by
old masters. The further wall, facing the western windows, was
partly covered by an enormous tapestry representing Esther and her
handmaidens before King Ahasuerus. The king was on a throne,
amid the splendors of his court. Now, at this hour, its colors were all
aglow at the touch of the sinking sun. Between the three long
windows stood growing plants in massive pots of Siena marble.
Across the room, facing the sisters, stood Madame Francesca;
and, not far away, the accompanist with her harp.
The various members of the little audience were affected by the
song in different ways and in different degree, according to
temperament. Some, enraptured by her voice and art, leaned
forward in æsthetic joy. Others, with moister eyes and quicker
breath, gave out their hearts to the deeper meaning of the song.
Madame Drusilla, an older woman whose two young sons had fallen
in the war, sat always, on these occasions, with head bent low, her
face in her hands. But all the others kept their eyes upon the singer.

For the personality of Madame Francesca—as she wished to be
called since her retirement from the world—possessed in itself an
irresistible charm. Now, standing in her light gray uniform, in the
flood of golden light from the great windows, she seemed
transfigured—a celestial being from another sphere.
The song itself was the outpouring of a mother's love. And it was
rendered with a pathos, a beauty and a depth of feeling that stirred
the heart of every listener. It seemed to the sisters a marvel of
dramatic art that a woman, however great an artist, could so touch
the hearts of others when not herself a mother. And they marveled
that a woman whose physicians forbade excitement could so move
an audience and not be overwhelmed herself by emotion.
The song ended. As the fingers of the harpist moved gently
across the strings, in the last notes of the accompaniment, Madame
Francesca stood for a moment with closed eyes. Her breathing and
the color in her cheeks showed a degree of feeling which Sister
Lucrezia, the physician, did not approve.
Then came a climax to the song—a climax far transcending any
singer's art. In this short, somewhat solemn silence that followed the
song, there appeared in one of the long windows that opened to the
floor, a figure rarely seen within the convent walls. It was a man.
And the man was neither workman, priest, grand duke or king.
Neither was he old. Men visitors were rare, and the few that entered
were usually middle aged or churchly. This visitor was young,
hatless, his hair in disorder. He wore a checkered suit and leather
leggings, and he was in no way ecclesiastical. His manner was eager,
—somewhat excited, with eyes fixed earnestly on Sister Francesca.
He paid no attention to the other sisters. If such a thing was
possible he was ignorant of their presence. As for the sisters they
were too surprised to speak, or move. They merely sat and stared.
Cyrus stepped within, slowly, as in a trance. Slowly he advanced
toward Madame Francesca. She, as surprised as any of the others,
regarded him in silence until he stopped before her. As they stood
facing each other, the western light on both their faces, the
spectators—including Ruth, now at the open window—began to

marvel. Fear began to mingle with surprise, for many in the
audience knew that famous beauties could be tormented by crazy
lovers. But fear, in turn, gave way to wonder, for it proved a strange
interview, never forgotten by those who saw it. No words were
spoken. No words were needed. In the eyes that looked into his own
Cyrus read their greeting as clearly as in an open book. And she, as
clearly, looked deep into his heart—as she had looked into the heart
of his father. Now in his responsive, eager face she saw the
confirmation of his father's letters, that she had bequeathed to her
child her own extraordinary faculty. It brought a sudden joy, this
assurance of a perfect understanding. Each received, in full, the
other's message. In the face of Cyrus—with his grandfather's drowsy
eyes—she saw his happiness in this meeting. He was telling her in
unspoken words of his childhood yearnings; how he had thought
and dreamed of her from early boyhood; that he had prayed and
hoped for this meeting. And now—here, had come the fulfillment of
all his dreams, his hopes, his prayers! And he, as he fathomed to
their secret depths the tragic but tender eyes, found love and a
heart-expanding welcome.
The little audience, however, saw nothing but the outward, silent
greetings. To them was not revealed the greater happiness, the
imperishable bond.
But this silent meeting, with its overwhelming joy, was the
prelude to the drama—its silent overture. The curtain had risen on
the Diva's final triumph, the Immortal Opera with its happy ending.
To the amazement of the audience she drew the young man's
face to hers and kissed him on either cheek. Then, overcome by
emotion, as it seemed, her head fell slowly forward on his breast.
Without his supporting arms she would have sunk to the floor. The
sisters saw, and hastened to her side. Cyrus, with their help, carried
the fainting figure to a nearby bench, where they laid her, with a
cushion beneath her head. Sister Lucrezia, the physician, bent
anxiously over the unconscious form. And so sudden was it all that
her hearers could hardly believe her when at last she arose, and

solemnly announced that the spirit of Madame Francesca had risen
to another life.
She spoke in Italian but Cyrus knew its meaning. His head
drooped and he stood motionless, crushed, as if his own spirit and
that of the sleeping figure on the bench were still together.
It was the Diva's long sleep. The last notes of her enchanting
voice had died away; the curtain was down, the orchestra gone, the
lights out. The audience had vanished. No more in the empty house
would be heard the clapping of hands, the cries of enthusiasm, the
bravos and encores.
But there are memories that never die. And now, to those who
looked upon the tranquil face, it seemed as if memories of conquest
and of triumph—or of something higher—still lingered in her heart.
For the face was more than peaceful. There was a smile upon the
lips that bore witness to a perfect contentment beyond the touch of
death.
Cyrus was recalled to himself by the voice of the Mother Superior,
a tall, gray-haired, kind-faced woman. She approached him, and in a
voice of sympathy addressed him, in Italian. He understood the
meaning of the message; that she shared his grief, but the presence
of men was forbidden; the rules were strict, and she begged him to
go. He expressed his gratitude by a respectful inclination and a few
words in English. Then he walked over to the silent figure. Upon her
folded hands he laid one of his own and stood, for a moment,
looking down upon the face. The rosy light from the western sky
seemed to bring the flush of life to the Diva's cheeks. He knelt
beside the bench. Reverently he touched his lips to the sleeper's
forehead.
He arose and moved toward the terrace. Near the window he
stopped, and to the watching sisters he bowed. In this obeisance he
told his sorrow and his profound respect. Then he turned and went
out as he came.

The Mother Superior, still apprehensive, asked Ruth to
accompany him to the gates and make sure of his departure. But
Cyrus did not walk toward the gates. He walked toward the spot
where he and Ruth had met, then beyond among the trees. During
this walk neither spoke. As Cyrus was obviously in deepest sorrow
Ruth refrained from words. Absorbed in her own thoughts, she
suddenly realized that she was approaching an unfamiliar object.
This unfamiliar object, a thing about twenty feet in length and a little
taller than a man, might pass for some unknown monster of the
deep, or a minor whale. It seemed to be of iron with a trap-door in
the side just large enough for a man to climb within. Its color was a
dull gray.
"Look!" she exclaimed. "What on earth is that?"
"My flying machine. That is what I came in."
"You came in that?"
As she looked up at him he nodded, slowly, and made no other
reply. The light was fading, but she could see that a change had
come into his face since they stood together at the garden wall. This
new expression showed a side of his character that she had
forgotten. She now remembered that it was the same look that had
come into his face when he vanquished the Tormentor in the
Unitarian Church, years ago; when the good natured, easy going
boy became, of a sudden, a reckless gladiator, the fearless defender
who fights—and dies, if needed—for a sacred cause; his God, his
Country, or—on that occasion—for his girl. It told deep emotions, of
strength of purpose and the courage that has no respect for
obstacles. Yet the slumbrous eyes were friendly as he said:
"Come, Ruth. Come home with me. I will make you happier than
you will ever be in this place."
"No, Cyrus. No. I cannot."
"Do you mean that you will stay here all your life, from a sense
of duty?"
"No—not wholly. Oh, why begin all over again? Please be
reasonable, Drowsy. Please go away quietly."

His voice was gentle, but there was something in his face that
recalled the boy of long ago, the boy who vanquished giants. Now it
was the man—who might defy the gods. She was afraid:—of what,
she knew not. But she took a backward step, a hand to her breast as
if to calm a nervous heart. There was reason to be afraid. For then
happened the unforgivable thing—doubly unforgivable when applied
to a woman of sensibility and pride. He bent forward, to pick up
something at her feet, she thought. Then, without warning, and all
too sudden for escape, she felt an arm behind her knees, another
across her back, and she was lifted from the ground. Before she
could protest, or even struggle, he pushed open the door of the iron
monster with his foot and passed her within as if she were a child.
Gently he placed her on the floor and climbed in himself. She found
herself sitting in front of him, her shoulders held firmly between his
knees. He shut the little door at his side and all was dark. A button
was pressed, one or two small levers manipulated, then a buzzing
sound, a slight quivering of the car and through the port hole in
front she saw that they were rising above the tops of the trees.
Then, high into the air.

S
XVII
"I MEAN IT"
IX hundred miles an hour, to old-time travelers, might seem
fast. High up in the air, however, some miles above the earth
with nothing beneath but the Atlantic Ocean, it seems a
moderate pace. There are none of the usual landmarks to gauge
one's speed; no telegraph poles, houses, or towns. The few ships
one passes, seen far below, are movable objects with no definite
relation to your own progress. Also, in a practically air tight
conveyance no wind can beat against your face.
While three hours may seem brief for a transatlantic passage it
must be remembered that the time Cyrus lost in going Eastward he
gained in going West. The surface of our little earth moves eastward
about a thousand miles an hour; so, with North America rushing
forward to meet him he could easily make the journey of five
thousand miles and more in the four hours, and almost without
hurrying. There is a startling difference in celerity between an
automobile and a yoke of oxen; more still between a steamship and
a cannon-ball: and Cyrus' device was capable of any speed that he
dared to travel. The only delays were in starting off, and in
approaching his own Coast. Once above Massachusetts, however, he
could easily find Longfields. The landmarks were familiar.

During this journey very little conversation took place between
his passenger and himself. Sitting on the floor in front of him, her
shoulders between his knees, he could not see her face. She made
no acknowledgment of his speeches and gave no answer to any
questions. He was correct in his belief that she was both alarmed
and angry. But he did not know at the time that her anger far
exceeded her alarm. This he realized, however, when he helped her
from the car at the door of her aunt's house in Longfields.
For a moment she leaned against the door, weak, trembling,
dazed, her hair disarranged, her cheeks hot. No words had been
spoken during the last two hours. This long silence he was the first
to break.
"You will forgive me, Ruth, won't you?"
It was too dark to see each other's faces, but this time had her
eyes met his there would be nothing to conceal. Her anger and her
dislike were deep and sincere. She answered in a low tone, but the
tone and manner revealed a repugnance of whose existence there
could be no doubt.
"Do not speak to me again; ever. Do you hear?"
"Yes, I hear."
"I mean it."
With a quivering hand she turned the knob, entered the house
and shut the door behind her.
That Ruth meant all she said was soon made clear to Cyrus—very
clear indeed. Two days later—after giving her time to recover—he
came to her aunt's house with a little bouquet of flowers, hopefully
gathered by his own hands in his own garden. With it was a note, an
eloquent little plea for forgiveness, so humble and so sincere as to
soften a heart of granite. He knocked at the front door, and waited.
At last—it might have been a year that he waited—the door was
opened.
"Good morning, Stella."
"Good morning, Cyrus."

Stella was the daughter of Abner Phillips, the harness maker, and
she and Ruth and Cyrus had been playmates together in the old
days at the red school house. The little harness business had
suffered—even more than other things—with the decline of
Longfields, and had finally expired. Stella had been out at service for
the last few years. She was an angular maiden with thin lips and
sharp eyes.
"Will you please take this note and the flowers to Ruth, Stella,
and ask if I can see her?"
"Yes, of course, won't you come in?"
"No, thank you. I'll just wait here."
On the doorstep he waited, but not long; Stella quickly returned
with the note and the flowers.
She seemed embarrassed. "Ruth says she—she——"
"Out with it, Stella."
"She says she won't see you."
"Won't see me! Is that just what she said?"
The maiden hesitated. As a friend of both and strictly neutral, her
position was awkward.
"Why—yes."
"Just what did she say, Stella?"
"She said, give him back his flowers and his note and tell him not
to come again."
This was clear to the dullest lover. And the words cut deeper still
as he saw in the face of the sharp eyed ambassadress an
impressible gleam of pity—or exultation—he could not tell which.
Cyrus blushed like a girl. For a moment his drowsy eyes gazed
blindly at Stella, then at the flowers and the note as if trying to
realize what had happened. The effort was painful. The flowers
seemed to be jubilant in their gayety, and jeering at him. He had
believed, until this moment, that he was prepared for the worst. He
had also believed, from his knowledge of women in history and
fiction that they changed their minds with ease—in short, that
honest lovers never need despair. This blow seemed to paralyze his

senses. But Pride came to his rescue. It made him realize the
degradation of appearing a fool before Stella. So, collecting his
scattered wits he raised his head and smiled upon the waiting
maiden. There was a quivering of the lip, however, as he said in a
manner laboriously offhand—and, of course, unsuccessful:
"Oh, well, I must try again. Thank you, Stella. Good-by."
As he reached the gate she saw him toss the flowers to the
ground.
His state of mind as he walked blindly along the village street,
beneath the arching elms, could not be described in articulate
language. Sorrow, anger, humiliation, all struggled for control.
Resignation was not among them. So Ruth was really in earnest. If
she hated and despised him, why live? This tumult within, while it
numbed his senses—and might lead to tragedy—provided mirth for
others. Just in front of the store a group of children ran across his
path. They were followed, slowly, by a large Newfoundland dog, a
well-known character in the village. He officiated, as is customary
among dogs, as guardian and boon companion to children, all of
whom he loved. His name was Major. He belonged to little Jason
Howard, but he was on terms of intimacy with every child in
Longfields. Major happened to stroll across the sidewalk just in front
of Cyrus. The discarded lover, blind to outward things, collided with
him. Always a gentleman and never forgetting his manners, Cyrus
stopped, and—Ruth being the only thing in his mind—he raised his
cap and bowed politely.
"I beg your pardon. It was my fault. Excuse me."
And all with a sober face. The children laughed, supposing Cyrus
was being funny for their amusement. But never in his life had Cyrus
felt less like being funny. Soberly he walked away not even hearing
their laughter.
After this interview with Major he at once relapsed into the
Cañon of Despair. For his was the agony of a man of honor who
feels he has committed a disgraceful act, and has lost, for all time,
the respect and good opinion of the being whose affection he valued
above all other things.

It seemed but a moment after leaving Major that he found
himself standing before two women and saying "how do you do"—or
something equally significant. With a mighty effort to ignore the past
—and the future—he recognized the two elderly maidens as Miss
Fidelia Allen and Miss Anita Clement. They had stopped and were
passing the time of day with him. He realized, blindly, that Miss
Clement had opened a book and was telling him about it. Miss
Clement had the faculty of expressing a barren idea in a wealth of
language. So, while the listener's drowsy—and now dreaming—eyes
rested on the speaker's lips he was seeing, not Miss Clement's face,
but a face more threatening, yet of greater interest. As to the effect
of Miss Clement's well chosen words on the listener's far away mind,
the sound from her lips might have been the murmuring of pines.
And as for The Only Woman in the world, if other women had
changed their minds why not this one? He recalled the look in her
eyes when——
"Do tell us what you think of it—just how you feel about it,
Cyrus?"
As the wild horse of the prairies is suddenly jerked to earth by a
lasso, so came back Cyrus.
"Oh—oh—very well, indeed, thank you. Never better."
"I meant about this new thought from the Orient. Just how
deeply it impresses you. Just where, among the great thinkers, you
would place Rub-a Shah Lagore."
"That's it exactly! Rubbish galore! Couldn't express it better.
Somebody described all that stuff as transcendental flim-flam." And
he smiled his most winning smile—a smile of sympathy, of fine
intelligence and a lively interest in the conversation.
But Miss Clement stiffened a little, and frowned. "Do you feel that
way?"
"Possibly you don't know Rub-a Shah Lagore," said Miss Fidelia,
more gently.
"Know him? Oh, yes," said Cyrus. "I know him. That is, I think I
met him. Was it in Cambridge?"

"I doubt it," said Miss Clement, "as he died about fifteen
hundred."
"Fifteen hundred!" Cyrus smiled, nodded and tried to appear at
ease. "Still I may have met him in a previous incarnation."
Then, apropos of incarnations, Miss Clement discoursed on the
Oriental mind, on matters psychic, philosophic, mystic and occult.
And as she talked, and drifted hither and thither on a sea of words,
Cyrus floated off in his own direction, and was recalling once again
the look in Ruth's eyes—that mingling of anger and contempt when
Miss Clement again suddenly brought him back to the village street.
"Don't you think so yourself?"
Cyrus pulled himself together. "Er—well—perhaps I don't quite
understand you."
"Do you know of any richer period in human thought? Any
greater age?"
"Any greater age? No, certainly not. You mean fifteen hundred
years? It certainly beats all records. That is, of course, all human
records. Elephants, parrots and turtles, I believe, live to a green old
age, but nothing like——"
Just what happened after that Cyrus did not remember. He found
himself walking home with clear memories of Ruth, intermingled
with blurred but painful impressions of two maiden ladies, frowning
in surprise and annoyance as they said good-by and turned away.
Of one thing only was he certain: that in the utterance of
senseless words he had surpassed all previous records, ancient or
modern.

A
XVIII
THE CAÑON OF DESPAIR
S to human wisdom, the best that can be said is that some of
us are less crazy than others. Also, that the habitually foolish
person, he who is foolish by preference—or by unalterable
Fate—is less disturbing than your usually sensible friend who
suddenly becomes fatuous.
This was realized by Joanna during the next few days. Cyrus
caused her serious alarm. On his new and larger air craft he worked
with such feverish haste that he forgot to eat or go to bed until
reminded of those habits. In the matter of eating he seemed to have
lost all memory as to when or how to do it. He poured tea instead of
maple syrup on his rice cakes; he recognized no difference in flavor
between salt and powdered sugar, marmalade or mustard. Joanna's
strawberry shortcake, the very best in the world—and his favorite
dish—he regarded with unseeing eyes and forgot to eat it. His reply
to nearly all her demands for information on whatever subject, was a
smiling "Certainly, of course."
But these were trifles. In his cup of bitterness there still were
dregs: and sleepless Fate had not forgotten them. The cup was to
be emptied. Late one afternoon, three days after the rebuff to his

note, his flowers and himself, he was returning from Springfield
alone in his motor. About a mile from Longfields, where the road ran
through some woods, he saw a figure on ahead, walking toward the
village. It was a female figure, short, slight, erect, and moving with a
light and rather jaunty step. It wore a continental hat, a white shirt
waist and a white skirt. He recognized this person at first glance, ran
his car ahead of her a short distance, then stopped at the side of the
road, got out and walked back to meet her. This time there was no
elaborate salutation à la Grande Monarch. It was a simple raising of
his cap and a tentative, humble minded greeting.
"Good day, Ruth."
"Good day, Cyrus."
She smiled, but the smile brought no sunshine to his heart; a
perfunctory smile of duty and good manners, such as might have
greeted any other human animal. And as she stood there, against
the dark background of the woods, calm, cold, beautiful, and oh! so
far away!—he saw aversion in her face and in every line of the rigid
little figure.
In a low, uncertain voice he spoke. "So you will never forgive
me?"
For a moment she looked away, beyond him, along the road
toward the village. "I forgive you a great deal. I forgive your taking
me by force and against my will from a welcome refuge where I was
looking forward to a peaceful, happy life. But the greater wrong you
have done me, the irreparable injury—that is harder to forgive."
"Irreparable injury? What do you mean, Ruth?"
Her eyebrows went up. "Indeed! You really do not know what I
mean?"
"On my honor I do not."
"I mean my reputation—the loss of my good name."
"Oh, Ruth! Why you—oh—don't say that!"
Calmly, but with an obvious effort at self control she answered:
"Do you think there is no gossip in Longfields, no comment on
my unexpected arrival? Do you think an unmarried woman can travel

about the world alone with a young man as I did, and keep her good
name?"
"I never thought of it—in that way. On my honor—I did not."
"Do you know of any other respectable young woman of your
acquaintance who has done anything like it?"
"But it was all my doing. You couldn't help it. Don't they all know
that?"
"No. Why should they know it? Will they believe that you, whom
they have known from boyhood, whom they respect and like, would
carry me off by force, entirely against my will?" Then with a bitter
little laugh: "Oh, no! They are not so simple! And some woman has
started a story that we——" Her face became crimson and she
covered it for a moment with her hands—"Oh, I can't bear to think
of it."
Cyrus closed his eyes. His head drooped. "I never thought of all
that. I was stupid. I can see it now. I don't blame you for hating
me."
Ruth went on, speaking with nervous haste. "A pleasanter bit of
scandal never happened in this village. I could not bear to live here.
It would kill me to live here."
"You are not going away!"
"Indeed I am!"
"Where?"
"To Worcester, to earn my living as a nurse."
"Listen, Ruth. Let me do something, no matter what. Let me take
you, or send you back to the Convent."
"The Convent! The Convent!" she repeated, and her cheeks
reddened. "Do you think the Convent a refuge for women who leave
it as I did?—for women who elope with—oh! It's for better women
than that! They would never allow me within its gates."
"Then let me atone in some way."
"Indeed! And how?"
"In any way you say—there's all my money—take some of it—all
of it. Not as a gift, but in some business way. Let me buy something

at a——"
"Clever thought! Regild my reputation with Cyrus Alton's money!"
"Then marry me. Be my wife, only in name. I swear to you—I—
will never see you if you wish it. Or—or trouble you in any way. Only
let me do something. I had no idea of—of what—of what all this
meant to you."
"Your wife!" she laughed a scornful, tragic, broken-hearted little
laugh. "Never in this world. Never! Never that!"
She turned and walked away.
He walked beside her. "Please listen. I will do anything you say. I
know I deserve it all, but that afternoon at the convent I was not
myself. After what happened I was all wrought up. My brain——"
She stopped, turned about and faced him.
"Yes, there is one thing you can do. Leave me now. And let us
not be seen together again—ever."
For a brief moment they stood confronting each other. And Cyrus
looked deep into the eyes that once had been his guiding stars; the
friendly eyes in whose depths his boy heart had sought—and never
in vain—encouragement, or consolation. Now, he was finding in their
contemptuous beauty only the cold ashes of their childhood
devotion.
Then, once more, she turned her back upon him. Erect and with
decisive steps, the little figure departed. He stood watching her as
she walked—walking out of his life. In his brain and in his heart was
a numbing pain—the knowledge that his highest hopes were dead—
killed, and by himself!
There and there he made a decision, a decision of vital import to
himself. And why not? Who in the world, except Joanna would
mourn, or even miss him? If there be such a thing as consolation
when hope is dead, he found it in a great resolve.
As he passed her in his car he raised his cap and murmured
"Morituri te salutamus."

R
XIX
A YOUNG MAN TALKS
UTH was in earnest when she told Cyrus of her intention to
become a nurse. Some experience in that line, while in
Europe, had fitted her for the work and she found little
difficulty in securing a position in a Worcester Hospital. Possibly her
prepossessing appearance was a help. The Superintendent, being
human, was not immune, perhaps, to the influence of an interesting
personality, especially in combination with an attractive face and
voice and figure.
After this interview at the hospital, about the middle of the day,
she took a return train for Springfield.
When she entered the car at the Worcester Station, and found a
vacant seat, she gave no special attention to the two men in the
seat just behind her own. She merely noticed that the carefully
dressed young man nearest the aisle had an intelligent wide awake
face, and that his companion—next the window—was suffering from
a cold in the head of aggravated dimensions. His aqueous eyes and
swollen nose, his sneezes and his busy handkerchief told the familiar
and unromantic drama of a mucous membrane at war with its
owner.

The weather this day—a week or so after the interview with
Cyrus—was cloudy, damp and otherwise depressing. She felt, of
course, gratification in the success of her mission at the hospital. Her
thoughts, however, were not entirely rosy as she looked from the car
window on this homeward journey, gazing absently on the sunless
landscape. She had much to think about, and often, during this little
journey from Worcester she tried vainly to escape from unwelcome
memories. At the mention of a familiar name, however, these
wandering thoughts were centered suddenly on the conversation of
the two men in the seat behind her.
"Alton, Cyrus Alton. Guess you've met him."
"Yez, I thig zo. Kide of sleeby eyes, hasn'd he?"
"Yep. His eyes are sleepy, but, gee whiz! He does things."
"Whad thigs?"
"Oh, anything—if it's impossible."
"Didn'd he bake a lod of bunny all of a zudden?"
"Bet your life he did! Made it while you wait."
"How budge?"
"God knows."
"How did he do id?"
"God knows that too:—He and Alton. You can hear anything.
Some say a rich widow, others, a pirate's cave. Perhaps it's just a
friendly tip from his Partner."
"Who is his bardner?"
"The Almighty."
"You bead he is bious?"
"Nixy not! He's a scientist, and science and piety don't seem to
cuddle much. He has discovered—or his Big Partner has told him—
some secret of electricity that is just the humpingest thing out of jail.
It's going to revolutionize the whole human outfit; business, travel,
transportation. As to little things like manufactures in peace and
wholesale destruction in war, why, we've got to begin all over again.
You just can't digest it. And it's so simple that you laugh when you
think of it."

"Doe! Really?"
"Yep; that's no exaggeration."
"Thad's inderesdig. I have heard vague rubers aboud id bud
nothing like thad. Just whad is id?"
"Just what is it. Well, that's an easy question to ask. When he
blabs his secret then we'll all know. But he says it's so simple that
it's sure to be discovered some day."
"I spoze you doe him breddy well."
"Yep, in a way. He orders his electric stuff through us. A year ago
when he was so poor he used to foot it to save trolley fare the boss
trusted him for twelve hundreds dollars' worth of radium."
"Good for the boss! He was a zpord. Did he ever get his bunny
bag?"
"Twice over. Oh, Alton didn't forget it. He's as straight as a
string."
"Well, he bay be all ride in sub ways bud he busd be jusd aboud
grazy to sdard on thad jourdy."
"Oh, I dunno. He has done some big stunts already. And he's
pretty level headed."
"Yez, bud id seebs like suizide to be. How var away is Bars,
eddyway?"
"Oh, just a step. I believe the astronomers call it about forty-
eight millions of miles."
"Vorty-eight billions of biles? Whew!"
"No, forty-eight millions—not billions."
The Rose Cold tried to laugh. "Yez I doe id iz—but with thiz
invernal drouble I gan'd prodounce by ebs."
"Of course; beg your pardon."
"Thad's all ride. But dell be, is he really goig to dry vor id?"
"Sure thing. He may have started already."
Here both men noticed in a careless way, a movement of the
shoulders of the girl in front of them when a hand went nervously to

her face. And it so happened that the Rose Cold's next words were
the expression of her own thoughts when he said:
"The bad's a vool!"
"No," said the younger man; "he's not a fool. He has done a lot
of figuring over it,—and experimenting. You see his machine is too
good to be true. It can shoot through space at the same rate as
electric waves, or waves of light."
"And how vasd is thad?"
"About a hundred and eighty thousand miles a second."
"Doe!"
"Yep."
"And you really believe id?"
"Sure."
"Id's sibly imbossible."
"I don't blame you for thinking so. But that's just why Alton likes
it. If it was possible it wouldn't interest him. Miracles are his daily
food. Gad, he's a wonder!"
"A hundred and eighty thouzand biles a zegond! Doe—thad's doo
buch vor bee."
"No wonder you don't believe it. It surely is going some. Beats
oxen."
"Aboud how log would id taig him to ged there ad thad rade?"
Here came a silence while the younger man did some figuring.
"About five seconds. But of course no human being, even in an air-
tight cylinder, could keep his head—or anything else, at that rate. He
allows about twelve hours to get there."
"Dwelve hours! Vorty-eight billion biles in twelve hours! Why zo
zlow?"
"Well, he's got to go slow through the six or seven miles of our
atmosphere. Then, he doesn't know what sort of atmosphere
surrounds Mars. So that'll take time like entering an unknown harbor.
To be really safe he'll have to jog along slowly—on an average of
four or five million miles an hour."

The Rose Cold laughed. "Beads vairy dales, doesn'd id?"
"To a frazzle."
"But the bravesd bad in the world gan'd go all day withoud
breathig."
"True enough. But Alton has the same system of oxygen
cylinders as the U-boats—only better. More condensed and lasts
longer. Uses same air more times without deteriorating."
"Well, whadever habbens, he busd be glever."
"Clever! He beats the devil."
"Will he ever gum bag, Jibby?"
"Dunno."
"I subbose the gradest danger is in being hid by a medeoride. I
understand those rogs are always shoodig about in spaze."
"Yep; and all the way in size from a liver pill to a state house. But
that isn't what'll knock him out."
"Berhabs dod, bud I shouldn'd gare do be there iv one habbened
to hid him."
"Right you are. He'd have about as much show as a bottle of
ginger ale colliding with a locomotive. But astronomers say they are
not so very numerous. What he's most afraid of himself is some
sudden electric disturbance in his own machine that will put his own
nervous system out of commission. You see nobody really knows
what is going on in space. And if his nerves or lungs or brain go
back on him, in anyway—Ping!—he's a goner."
After a pause the Rose Cold spoke in a more serious tone.
"Well, I taig off my had to him. It's a big thig, thad zord of
gourage."
"I should say! And he knows himself there isn't one chance in a
hundred of his ever touching this little earth again."
Here the attention of both men was drawn to the girl in front of
them, who suddenly started from her seat—with both hands pressed
hard against her face. She stood for a moment as if in pain, or under
some mental disturbance. Then, sinking back into her seat, she
appeared to be looking quietly out of the window during the short

remainder of the journey. Although her action caused them no
further interest, nor curiosity, it served to divert their talk from Cyrus
Alton—a subject apparently exhausted—to other matters of no
interest to Ruth Heywood.

W
XX
ANOTHER MESSAGE
HEN Ruth left the train and took the stage for Longfields
her spirit was in revolt—in revolt against herself, against
Cyrus and against the progress of the vehicle. But any
vehicle, however fast, would have been too slow on that afternoon.
She left the conveyance at Cyrus Alton's driveway. This was her first
visit to the Alton's home since her sudden departure, so many years
ago. And now, as she walked toward the house, almost every foot of
ground, every object in the spacious yard, the old maples and the
house itself, seemed accusing her of treason and of heartless
murder. From every side, however, came pleasant memories of
bygone days,—like flowers in a forsaken garden. And all of Cyrus!
Never was a yard so full of history. And now that Cyrus was gone—
gone forever, driven from the world by her own cruelty,—her over
sensitive spirit writhed beneath the stings of conscience. Every
recollection seemed to increase her guilt. Hardest to bear, in all this
vista of the past, was the clear, undying fact that the cherubic,
sleepy eyed little boy always stood between herself and trouble.
These memories overwhelmed her. There was the old maple in
whose shade she and Drowsy played keeping house. They

pretended Zac was President of the United States who had dropped
in for dinner. Only gingerbread and sour grapes were served and
Drowsy gave her the biggest half of the gingerbread because she,
also, was a guest. Zac, always loyal, ate one or two of the green
grapes just because Cyrus did. And the stone wall that saved their
lives;—at least, she thought so when Mr. Randall's horse came
snorting toward them across the field, on the other side. He seemed
close at their heels when Cyrus boosted her up and pushed her over
before he climbed up himself. He pushed so hard—against that part
of the body on which we sit—that she landed on her face, and the
short, stiff blades of grass that had just been mowed, cut the inside
of her nose. She tried to smile as she remembered, with a gulp, that
although he was badly scared himself he was the last to climb over
the wall. Yes, he always gave her first chance at everything—in
peace or war!
And there the well, where she and Susie Jordan had a quarrel
one Sunday after Church, and Susie threw a dipperful of water on
Ruth's head. It spoiled her new hat and she burst into tears. Then
Cyrus walked up to Susie—Ruth could see him now as if it were
yesterday—made one of his lowest bows, as if to apologize in
advance, then slapped her hard on both cheeks. After slapping her
he backed away a few steps and made yet another profound
obeisance, as a judge, after performing a painful duty, might salute
a prisoner of high degree.
But now she was in too great haste to linger long over memories,
or anything else. She hurried on to the house. Tearful, smiling, but
on the very edge of sobs, she rang the door bell. Too impatient to
wait she entered and walked into the sitting room. The same old
sitting room, and changed but little since she saw it last. On the
walls the same green paper, just a little more faded, perhaps, at
certain places where the morning sun had loitered. Almost covering
the center table were books, papers and magazines.
Joanna entered. The greetings were cordial. Then, for a few
moments they sat facing each other, Ruth in an arm chair, Joanna on
the old sofa.

In a casual way, Ruth remarked:
"I suppose Cyrus is out in the old barn, hard at work on his new
machine."
"Not now. It is all finished."
"Is it there now,—the machine?"
"No, he went away in it."
"When did he go?"
"Last night."
"Where has he gone?"
"I don't know."
Ruth leaned back in her chair and the color left her face.
"Oh, Miss Ruth, are you ill?"
"No, no! I am not ill. But didn't he say when he was coming
back?"
"He said he might not be back for some days. But he has often
done that."
Ruth suddenly jumped from her chair, began walking about the
room, and exclaimed:
"He's a contemptible thing!"
"Not Cyrus?"
"Yes, Cyrus. And what a fool! Oh, what a fool!"
Into Joanna's placid, serious face came a look of amazement.
"You don't mean to say, Miss Ruth, that, Cyrus—is a—
contemptible—thing and—and a fool!"
"That's just exactly what I mean. He's a fool—a contemptible,
weak, half-hearted, easily discouraged, stupid fool!"
Ruth was clearly excited. She spoke rapidly and with vehemence,
marching to and fro as if lashed to fury by some strange obsession.
As Joanna watched the little figure she could hardly believe that this
was the ever gentle Ruth Heywood of her acquaintance.
Ruth went on: "Not a speck of perseverance! And what a coward!
I never suspected he was such a hopeless coward!"
"Cyrus a coward! Oh, but—Miss Ruth, you really——"

"Of course he's a coward! Why has he run away? Do brave men
run away? No. Cowards run away. A mean, contemptible thing. That
covers it. A contemptible cowardly act by a contemptible, cowardly
man. And so ungrateful! Even as a boy he was ungrateful."
Now, to Joanna, who had known Cyrus intimately since the age
of seven, he was the one perfect thing in creation. Morally he was
an example for the angels; mentally the wonder of the age. So,
being a somewhat literal person, these words came like stabs from a
dagger and struck deep into her own heart. But she answered—
more in sadness than in anger:
"I really can't imagine anybody thinking Cyrus ungrateful."
"Well, I do! He has no real love for anybody but himself. He
thinks only of himself; only of himself!"
"Why, Miss Ruth, when Mrs. Eagan was laid up for nearly a whole
summer, years ago, Cyrus took her a bowl of ice cream himself,
every Sunday, after our own dinner. We had ice cream once a week.
He was nothing but a boy then, but he——"
"Of course he did! Why not? Any boy would carry ice cream—just
for the sake of holding it."
Joanna shook her head. "No. All boys are not like that."
Here Ruth turned fiercely upon her. "And how do you know he
did? He probably ate it himself before he got to Mrs. Eagan's. He
would tell you he didn't, of course. He's an awful liar and always
was. You know that, Joanna, as well as I do."
"Liar! No, no, Miss Ruth! You don't know him. He got entirely
over that, years ago. He's as truthful as anybody. Long ago, before
he went away to school, his father made him ashamed of his lies
and——"
"Oh, for a time perhaps! Bad boys don't become good over
night."
"But, Miss Ruth, please listen. You only knew him when you were
both very young. He really cured himself. He has not lied since. He
was too young to know better. But even with his lying he was always
a good boy."

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