Performance Comparison of CMOS and Finfet Based Circuits At 45nm Technology Using SPICE
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The document compares the performance of CMOS and FinFET based circuits at 45nm technology, focusing on power dissipation and efficiency. It shows that FinFET technology significantly reduces power consumption by 92.93% during read operations and 97.8% during write operations compared to CMOS. While FinFETs have slower voltage transfer characteristics than CMOS, they effectively overcome limitations faced by CMOS technology in nanoscale design.
![Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com
ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43
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Performance Comparison of CMOS and Finfet Based Circuits At 45nm Technology Using SPICE Mugdha Sathe*, Dr. Nisha Sarwade** *(Department of Electrical Engineering, VJTI, Mumbai-19) ** (Department of Electrical Engineering, VJTI, Mumbai-19) ABSTRACT According to the Moore’s Law, the number of transistors in a unit chip area double every two years. But the existing technology of integrated circuit formation is posing limitations to this law. CMOS technology shows certain limitations as the device is reduced more and more in the nanometer regime out of which power dissipation is an important issue. FinFET is evolving to be a promising technology in this regard. This paper aims to analyze and compare the characteristics of CMOS and FinFET circuits at 45nm technology. Inverter circuit is implemented in order to study the basic characteristics such as voltage transfer characteristics, leakage current and power dissipation. Further the efficiency of FinFET to reduce power as compared to CMOS is proved using SRAM circuit. The results show that the average power is reduced by 92.93% in read operation and by 97.8% in write operation.
Keywords – 6T SRAM cell, CMOS vs FinFET, FinFETs, Low power nanoscale design, Power dissipation
I. Introduction
The integrated circuit technology is progressing at a great pace since the invention of first MOS microprocessor in 1970. The major driving force behind this progress is the technique of scaling. The scaling of MOS transistor has resulted in high density, high performance chips. But this miniaturization is obstructed by many unwanted issues that arise in MOS device as the device size goes on shrinking [1]. Out of these issues, power dissipation is a major drawback. It has been listed as one of the challenges in International Technology Roadmap for Semiconductors (ITRS) 2012. Different low power design techniques using CMOS are implemented but they see certain limitations. Hence the need for new transistor technology arises. In this report, one such technology, FinFET technology is studied. From the perspective of circuit operation, a FinFET behave very much similar to MOSFET. However, two gates provide a greater control over the channel because of which many performance parameters can be altered. The second section describes in brief about the limitations of CMOS scaling along with how these limitations can be overcome using FinFETs. The third section describes the operation of conventional 6T SRAM cell. In the fourth section the modelling parameters of FinFET and CMOS at 45nm are discussed. The simulation results are presented in the fifth section along with their analysis.
II. Issues in Scaling: CMOS vs FinFET
Short channel effects (SCEs) and leakage current are a major source of power dissipation in MOSFETs
at nanoscale. An effect called drain-induced barrier lowering (DIBL) takes place when a high-drain voltage is applied to a short-channel device and the source injects carriers into the channel surface independent of gate voltage. Gate oxide tunneling of electrons can result in leakage when there is a high electric field across a thin gate oxide layer. Hot- carrier injection occurs in short-channel transistors. Because of a strong electric field near the silicon/silicon oxide interface, electrons or holes can gain enough energy to cross the interface and enter the oxide layer. Punchthrough leakage occurs when there is decreased separation between depletion regions at the drain-substrate and the source-substrate junctions. The front and back gates are electrically coupled to better control Short Channel Effects by substantially lowering both Drain Induced Barrier Lowering and sub-threshold slope (S). Therefore, FinFET devices are most suitable for low-power designs as they enable significant reduction in standby power while simultaneously providing increased performance [2]. Joshi, Kim and Kanj have analyzed in [2] the DG-nFET device. They have proved that a DG-MOSFET shows far superior device characteristics to its bulk-Si counterparts with much lower sub-threshold slope S (65 mV/V vs. 90 mV/V) and much suppressed DIBL (35 mV/V vs. 105 mV/V), which offer over 10 times reduced off- current.
In order to overcome the issues regarding power dissipation, certain low power design techniques using CMOS are implemented [3]. Reduction in power dissipation can be achieved by reducing the
RESEARCH ARTICLE OPEN ACCESS](https://image.slidesharecdn.com/f047023943-140909002952-phpapp01/85/Performance-Comparison-of-CMOS-and-Finfet-Based-Circuits-At-45nm-Technology-Using-SPICE-1-320.jpg)
![Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com
ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43
www.ijera.com 40 | P a g e
supply voltage but this has a disadvantage of
increasing the delay. Reduction in threshold voltage
increases leakage current. Lowering the capacitance
have adverse effects on the system performance.
The low power techniques employed for FinFET
circuits effectively reduce the power of the circuit at
the same time overcoming the above issues of CMOS
techniques. The advantages of these techniques are
summarized in [4]. Back-Gate biasing technique
reduces VT variability, reduces leakage and thus
power [1]. Dual-VT technique enables merging of
transistors thus saving up on total power [5].
Asymmetric- ΦG produces low leakage current and
high speed performance [6].
III. Operation of Conventional 6T SRAM
Cell
The conventional 6T SRAM cell using FinFETs
is shown in Figure 1. This cell is made up six
transistors. Two pairs of inverters are connected such
that the output of one is fed to the input of the other
and vice versa. This feedback connection stabilizes
the storage nodes in the cell. Two other transistors
are used as access transistors and are connected to the
storage nodes (Q and QB) of the two inverters. The
signals wordline (WL), bitline (BL) and bitlinebar
(BLB) control the operation of the cell. When WL is
high, the access transistors are turned on providing
the access to the storage nodes. For write operation,
BL and BLB are set according to the value to be
written (complement of each other) and Q and QB
are pulled to the required levels. For read operation,
BL and BLB are precharged to high voltage. Either
BL or BLB discharge depending upon the values of
Q and QB, thus data is read.
Fig. 1. 6T SRAM cell using FinFET
IV. Modelling Parameters of FinFET at 45nm
The key parameters of the FinFET model are its
gate length (Lg), height of the fin (Hfin), thickness of
gate oxide (tox), thickness of the fin (Tsi) and the
channel width. These parameters define the
performance of the circuit. They are important to
minimize leakage current at the same time
maintaining the on current. The model files used in
here are PTM model files [7]. The values of the
parameters used in this model of FinFET at 45nm are
given in TABLE 1.
Table 1. Modelling parameters of FinFET at 45nm
Parameter Value
Channel length (Lg) 45nm
Oxide Thickness (tox) 1.5nm
Si thickness (Tsi) 8.4nm
Threshold voltage of front gate
(Vthf0)
0.31V
Threshold voltage of back gate
(Vthb0)
0.31V
Channel doping (Nch) 2*1016 cm-3
V. Simulation Results
In order to prove the claim that FinFETs give
better performance in terms of power dissipation and
leakage current than CMOS, simple inverter circuit is
used. Inverter circuits using FinFETs and using
CMOS at 45 nm are formed. They are simulated by
varying the input voltage from 0 to 1V at intervals of
0.001V.
In Figure 2, the voltage transfer characteristics
(VTC) of FinFET inverter and CMOS inverter at 45
nm are compared. From the figure it is evident that
the VTC curve for CMOS is steeper than that of
FinFET. This is an advantage of CMOS over
FinFET.
Vin
Vout
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
0
0.15
0.3
0.45
0.6
0.75
0.9
1.05
V(nd)(CMOS)
V(nd)(FinFET)
Fig. 2. Voltage transfer characteristics of FinFET and
CMOS at 45 nm node
In Figure 3, the power dissipation in the NMOS
device of FinFET and CMOS inverters is compared.
It can be seen that the peak power dissipated in
CMOS circuit is 120uW whereas in FinFET circuit it
is 22uW. The average power dissipation over the
given range of input voltage is found to be 12.8uW in
CMOS inverter and 5.2uW in FinFET inverter
resulting in a 59.38% reduction.](https://image.slidesharecdn.com/f047023943-140909002952-phpapp01/85/Performance-Comparison-of-CMOS-and-Finfet-Based-Circuits-At-45nm-Technology-Using-SPICE-2-320.jpg)
![Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com
ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43
www.ijera.com 42 | P a g e
Fig. 9. Read operation of FinFET SRAM Figures 10 and 11 show the power dissipation of CMOS SRAM and FinFET SRAM respectively during read operation. Fig. 10. Total switching power in CMOS SRAM during read operation Fig. 11. Total switching power in FinFET SRAM during read operation
VI. Conclusion
The limitations of CMOS scaling are reviewed. It is observed that FinFETs are capable to overcome these limitations effectively. The comparison of inverter circuits using CMOS and FinFETs at 45nm show that power reduction by 59.38% is achieved in FinFET circuit. Although it faces the disadvantage of a slower voltage transfer characteristics as compared to CMOS. The simulations of read and write operations of SRAM cell are found to be same using FinFETs and CMOS. Whereas the results of the switching power show a large reduction in the power using FinFETs than using CMOS. The results are tabulated below in TABLE 2.
Table 2. Comparison of obtained results
Performance Parameter
CMOS
FinFET
% change in FinFET as compared to CMOS
Average Power in SRAM Read Operation
124uW
8.76uW
92.93% reduction
Average Power in SRAM Write Operation
896.17nW
19.76nW
97.8% reduction
Average Power in 45nm Inverter
12.8uW
5.2uW
59.38% reduction
The results obtained from the simulation of SRAM cell help to prove that FinFETs can be used to reduce power without compromising on the performance. References
[1] B. Swahn and S. Hassoun, “Gate Sizing: FinFETs vs 32nm Bulk MOSFETs”, Design Automation Conference, 2006 43rd ACM/IEEE, San Francisco, CA, 2006, 528- 531.
[2] R. Joshi, K. Kim and R. Kanj, “FinFET SRAM Design”, in Nanoelectronic Circuit Design, Springer, 2011, 55-95.
[3] Jan M. Rabaey Digital Integrated Circuits: A Design Perspective (Prentice-Hall of India Pvt. Ltd, New Delhi, October 2001).
[4] M. Sathe and N. Sarwade, “Power Optimization at Nanoscale using FinFETs and its Comparison with CMOS”, International Journal of Computer Engineering and Applications, vol. 6, issue II, May 14, 33-41.
[5] M. Rostami and K. Mohanram, “Dual-Vth Independent-Gate FinFETs for Low Power Logic Circuits”, IEEE Transactions on Computer-Aided Design Of Integrated Circuits And Systems, vol. 30, no. 3, March 2011, 337-349.
[6] N. Bhoj and N. K. Jha, “Design of Ultra- low-leakage Logic Gates and Flip-flops in High-performance FinFET Technology”, International Symposium on Quality Electronic Design (ISQED), Santa Clara, CA, March 2011, 1-8.
[7] Predictive Technology Modelling URL: http://ptm.asu.edu/](https://image.slidesharecdn.com/f047023943-140909002952-phpapp01/85/Performance-Comparison-of-CMOS-and-Finfet-Based-Circuits-At-45nm-Technology-Using-SPICE-4-320.jpg)
Performance Comparison of CMOS and Finfet Based Circuits At 45nm Technology Using SPICE
- 1. Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43 www.ijera.com 39 | P a g e Performance Comparison of CMOS and Finfet Based Circuits At 45nm Technology Using SPICE Mugdha Sathe*, Dr. Nisha Sarwade** *(Department of Electrical Engineering, VJTI, Mumbai-19) ** (Department of Electrical Engineering, VJTI, Mumbai-19) ABSTRACT According to the Moore’s Law, the number of transistors in a unit chip area double every two years. But the existing technology of integrated circuit formation is posing limitations to this law. CMOS technology shows certain limitations as the device is reduced more and more in the nanometer regime out of which power dissipation is an important issue. FinFET is evolving to be a promising technology in this regard. This paper aims to analyze and compare the characteristics of CMOS and FinFET circuits at 45nm technology. Inverter circuit is implemented in order to study the basic characteristics such as voltage transfer characteristics, leakage current and power dissipation. Further the efficiency of FinFET to reduce power as compared to CMOS is proved using SRAM circuit. The results show that the average power is reduced by 92.93% in read operation and by 97.8% in write operation. Keywords – 6T SRAM cell, CMOS vs FinFET, FinFETs, Low power nanoscale design, Power dissipation I. Introduction The integrated circuit technology is progressing at a great pace since the invention of first MOS microprocessor in 1970. The major driving force behind this progress is the technique of scaling. The scaling of MOS transistor has resulted in high density, high performance chips. But this miniaturization is obstructed by many unwanted issues that arise in MOS device as the device size goes on shrinking [1]. Out of these issues, power dissipation is a major drawback. It has been listed as one of the challenges in International Technology Roadmap for Semiconductors (ITRS) 2012. Different low power design techniques using CMOS are implemented but they see certain limitations. Hence the need for new transistor technology arises. In this report, one such technology, FinFET technology is studied. From the perspective of circuit operation, a FinFET behave very much similar to MOSFET. However, two gates provide a greater control over the channel because of which many performance parameters can be altered. The second section describes in brief about the limitations of CMOS scaling along with how these limitations can be overcome using FinFETs. The third section describes the operation of conventional 6T SRAM cell. In the fourth section the modelling parameters of FinFET and CMOS at 45nm are discussed. The simulation results are presented in the fifth section along with their analysis. II. Issues in Scaling: CMOS vs FinFET Short channel effects (SCEs) and leakage current are a major source of power dissipation in MOSFETs at nanoscale. An effect called drain-induced barrier lowering (DIBL) takes place when a high-drain voltage is applied to a short-channel device and the source injects carriers into the channel surface independent of gate voltage. Gate oxide tunneling of electrons can result in leakage when there is a high electric field across a thin gate oxide layer. Hot- carrier injection occurs in short-channel transistors. Because of a strong electric field near the silicon/silicon oxide interface, electrons or holes can gain enough energy to cross the interface and enter the oxide layer. Punchthrough leakage occurs when there is decreased separation between depletion regions at the drain-substrate and the source-substrate junctions. The front and back gates are electrically coupled to better control Short Channel Effects by substantially lowering both Drain Induced Barrier Lowering and sub-threshold slope (S). Therefore, FinFET devices are most suitable for low-power designs as they enable significant reduction in standby power while simultaneously providing increased performance [2]. Joshi, Kim and Kanj have analyzed in [2] the DG-nFET device. They have proved that a DG-MOSFET shows far superior device characteristics to its bulk-Si counterparts with much lower sub-threshold slope S (65 mV/V vs. 90 mV/V) and much suppressed DIBL (35 mV/V vs. 105 mV/V), which offer over 10 times reduced off- current. In order to overcome the issues regarding power dissipation, certain low power design techniques using CMOS are implemented [3]. Reduction in power dissipation can be achieved by reducing the RESEARCH ARTICLE OPEN ACCESS
- 2. Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43 www.ijera.com 40 | P a g e supply voltage but this has a disadvantage of increasing the delay. Reduction in threshold voltage increases leakage current. Lowering the capacitance have adverse effects on the system performance. The low power techniques employed for FinFET circuits effectively reduce the power of the circuit at the same time overcoming the above issues of CMOS techniques. The advantages of these techniques are summarized in [4]. Back-Gate biasing technique reduces VT variability, reduces leakage and thus power [1]. Dual-VT technique enables merging of transistors thus saving up on total power [5]. Asymmetric- ΦG produces low leakage current and high speed performance [6]. III. Operation of Conventional 6T SRAM Cell The conventional 6T SRAM cell using FinFETs is shown in Figure 1. This cell is made up six transistors. Two pairs of inverters are connected such that the output of one is fed to the input of the other and vice versa. This feedback connection stabilizes the storage nodes in the cell. Two other transistors are used as access transistors and are connected to the storage nodes (Q and QB) of the two inverters. The signals wordline (WL), bitline (BL) and bitlinebar (BLB) control the operation of the cell. When WL is high, the access transistors are turned on providing the access to the storage nodes. For write operation, BL and BLB are set according to the value to be written (complement of each other) and Q and QB are pulled to the required levels. For read operation, BL and BLB are precharged to high voltage. Either BL or BLB discharge depending upon the values of Q and QB, thus data is read. Fig. 1. 6T SRAM cell using FinFET IV. Modelling Parameters of FinFET at 45nm The key parameters of the FinFET model are its gate length (Lg), height of the fin (Hfin), thickness of gate oxide (tox), thickness of the fin (Tsi) and the channel width. These parameters define the performance of the circuit. They are important to minimize leakage current at the same time maintaining the on current. The model files used in here are PTM model files [7]. The values of the parameters used in this model of FinFET at 45nm are given in TABLE 1. Table 1. Modelling parameters of FinFET at 45nm Parameter Value Channel length (Lg) 45nm Oxide Thickness (tox) 1.5nm Si thickness (Tsi) 8.4nm Threshold voltage of front gate (Vthf0) 0.31V Threshold voltage of back gate (Vthb0) 0.31V Channel doping (Nch) 2*1016 cm-3 V. Simulation Results In order to prove the claim that FinFETs give better performance in terms of power dissipation and leakage current than CMOS, simple inverter circuit is used. Inverter circuits using FinFETs and using CMOS at 45 nm are formed. They are simulated by varying the input voltage from 0 to 1V at intervals of 0.001V. In Figure 2, the voltage transfer characteristics (VTC) of FinFET inverter and CMOS inverter at 45 nm are compared. From the figure it is evident that the VTC curve for CMOS is steeper than that of FinFET. This is an advantage of CMOS over FinFET. Vin Vout 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.15 0.3 0.45 0.6 0.75 0.9 1.05 V(nd)(CMOS) V(nd)(FinFET) Fig. 2. Voltage transfer characteristics of FinFET and CMOS at 45 nm node In Figure 3, the power dissipation in the NMOS device of FinFET and CMOS inverters is compared. It can be seen that the peak power dissipated in CMOS circuit is 120uW whereas in FinFET circuit it is 22uW. The average power dissipation over the given range of input voltage is found to be 12.8uW in CMOS inverter and 5.2uW in FinFET inverter resulting in a 59.38% reduction.
- 3. Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43 www.ijera.com 41 | P a g e Also the gate leakage current was observed to reduce from 1.8nA in CMOS to 0.0012fA in FinFET. Vin (Volts) Power Dissipated (Watts) 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 1.5E-5 3E-5 4.5E-5 6E-5 7.5E-5 9E-5 0.000105 0.00012 CMOS FinFET Fig. 3. Power dissipation of NMOS in FinFET and CMOS inverters at 45 nm node Figures 4 and 5 show the write operations of SRAMs implemented using CMOS and FinFET respectively. The simulation is performed for a period of 75us. The bit line (BL) is first made high. Then after some time, the word line (WL) is made high. It can be seen that at that particular instant (35us), the storage bit (Q) becomes high. Thus write 1operation is achieved. Fig. 4. Write operation of CMOS SRAM Fig. 5. Write operation of FinFET SRAM In the successive two figures (6 and 7), the power dissipation of these two SRAM circuits during write operation is shown. It shows the total switching power of all the four transistors forming the two inverters since switching takes place at these transistors. In both the figures, the first plot is of V(Q) i.e. voltage at storage node Q. The instant at which Q becomes 1 is the write 1 instant (35us) and the instant at which Q become 0 is the write 0 instant (50us). It can be seen that power dissipation in all the transistors occur at these two instances. Adding up the power of the four transistor, the total switching power dissipation of CMOS at write 1 is 587.9uW and that of FinFET is 9.76uW. Fig. 6. Total switching power in CMOS SRAM during write operation Fig. 7. Total switching power in FinFET SRAM during write operation Figures 8 and 9 show read operations of CMOS and FinFET SRAMs respectively. It can be seen that equivalent performance is obtained using FinFET instead of CMOS in the wrire and read operation. Fig. 8. Read operation of CMOS SRAM
- 4. Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43 www.ijera.com 42 | P a g e Fig. 9. Read operation of FinFET SRAM Figures 10 and 11 show the power dissipation of CMOS SRAM and FinFET SRAM respectively during read operation. Fig. 10. Total switching power in CMOS SRAM during read operation Fig. 11. Total switching power in FinFET SRAM during read operation VI. Conclusion The limitations of CMOS scaling are reviewed. It is observed that FinFETs are capable to overcome these limitations effectively. The comparison of inverter circuits using CMOS and FinFETs at 45nm show that power reduction by 59.38% is achieved in FinFET circuit. Although it faces the disadvantage of a slower voltage transfer characteristics as compared to CMOS. The simulations of read and write operations of SRAM cell are found to be same using FinFETs and CMOS. Whereas the results of the switching power show a large reduction in the power using FinFETs than using CMOS. The results are tabulated below in TABLE 2. Table 2. Comparison of obtained results Performance Parameter CMOS FinFET % change in FinFET as compared to CMOS Average Power in SRAM Read Operation 124uW 8.76uW 92.93% reduction Average Power in SRAM Write Operation 896.17nW 19.76nW 97.8% reduction Average Power in 45nm Inverter 12.8uW 5.2uW 59.38% reduction The results obtained from the simulation of SRAM cell help to prove that FinFETs can be used to reduce power without compromising on the performance. References [1] B. Swahn and S. Hassoun, “Gate Sizing: FinFETs vs 32nm Bulk MOSFETs”, Design Automation Conference, 2006 43rd ACM/IEEE, San Francisco, CA, 2006, 528- 531. [2] R. Joshi, K. Kim and R. Kanj, “FinFET SRAM Design”, in Nanoelectronic Circuit Design, Springer, 2011, 55-95. [3] Jan M. Rabaey Digital Integrated Circuits: A Design Perspective (Prentice-Hall of India Pvt. Ltd, New Delhi, October 2001). [4] M. Sathe and N. Sarwade, “Power Optimization at Nanoscale using FinFETs and its Comparison with CMOS”, International Journal of Computer Engineering and Applications, vol. 6, issue II, May 14, 33-41. [5] M. Rostami and K. Mohanram, “Dual-Vth Independent-Gate FinFETs for Low Power Logic Circuits”, IEEE Transactions on Computer-Aided Design Of Integrated Circuits And Systems, vol. 30, no. 3, March 2011, 337-349. [6] N. Bhoj and N. K. Jha, “Design of Ultra- low-leakage Logic Gates and Flip-flops in High-performance FinFET Technology”, International Symposium on Quality Electronic Design (ISQED), Santa Clara, CA, March 2011, 1-8. [7] Predictive Technology Modelling URL: http://ptm.asu.edu/
- 5. Mugdha Sathe Int. Journal of Engineering Research and Applications www.ijera.com ISSN : 2248-9622, Vol. 4, Issue 7( Version 2), July 2014, pp.39-43 www.ijera.com 43 | P a g e About the Authors Mugdha S. Sathe received the B.E. degree in Electronics Engineering from Mumbai University, India, in 2011. She is currently pursuing the M.Tech. degree in Electronics Engineering under guidance of Dr. Nisha Sarwade at Veermata Jijabai Technological Institute, Mumbai, India. Dr. Nisha P. Sarwade received the B.E. degree in Electronics Engineering from Jiwaji University, Gwalior and M.E. (Solid State Electronics) and PhD (Electronics Engineering) from University of Roorkee. She was working as a lecturer at the University of Roorkee during 1983-1987. Currently she is working as an Associate Professor at Veermata Jijabai Technological Institute, Mumbai, India. Her research interests include Nano Electronics with emphasis on CNT, Compound semiconductors, High- k dielectrics and flash memories and Microwave communication.