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Introduction to
CMOS VLSI
Design
Layout, Fabrication, and
Elementary Logic Design
CMOS VLSI Design
Fabrication and Layout Slide 2
Introduction
 Integrated circuits: many transistors on one chip.
– Very Large Scale Integration (VLSI): very many
 Metal Oxide Semiconductor (MOS) transistor
– Fast, cheap, low-power transistors
– Complementary: mixture of n- and p-type leads to
less power
 Today: How to build your own simple CMOS chip
– CMOS transistors
– Building logic gates from transistors
– Transistor layout and fabrication
 Rest of the course: How to build a good CMOS chip
CMOS VLSI Design
Fabrication and Layout Slide 3
Silicon Lattice
 Transistors are built on a silicon substrate
 Silicon is a Group IV material
 Forms crystal lattice with bonds to four neighbors
Si Si
Si
Si Si
Si
Si Si
Si
CMOS VLSI Design
Fabrication and Layout Slide 4
Dopants
 Silicon is a semiconductor
 Pure silicon has no free carriers and conducts poorly
 Adding dopants increases the conductivity
 Group V: extra electron (n-type)
 Group III: missing electron, called hole (p-type)
As Si
Si
Si Si
Si
Si Si
Si
B Si
Si
Si Si
Si
Si Si
Si
-
+
+
-
CMOS VLSI Design
Fabrication and Layout Slide 5
p-n Junctions
 A junction between p-type and n-type semiconductor
forms a diode.
 Current flows only in one direction
p-type n-type
anode cathode
CMOS VLSI Design
Fabrication and Layout Slide 6
nMOS Transistor
 Four terminals: gate, source, drain, body
 Gate – oxide – body stack looks like a capacitor
– Gate and body are conductors
– SiO2 (oxide) is a very good insulator
– Called metal – oxide – semiconductor (MOS)
capacitor
– Even though gate is
no longer made of metal
n+
p
Gate
Source Drain
bulk Si
SiO2
Polysilicon
n+
CMOS VLSI Design
Fabrication and Layout Slide 7
nMOS Operation
 Body is commonly tied to ground (0 V)
 When the gate is at a low voltage:
– P-type body is at low voltage
– Source-body and drain-body diodes are OFF
– No current flows, transistor is OFF
n+
p
Gate
Source Drain
bulk Si
SiO2
Polysilicon
n+
D
0
S
CMOS VLSI Design
Fabrication and Layout Slide 8
nMOS Operation
 When the gate is at a high voltage:
– Positive charge on gate of MOS capacitor
– Negative charge attracted to body
– Inverts a channel under gate to n-type
– Now current can flow through n-type silicon from
source through channel to drain, transistor is ON
n+
p
Gate
Source Drain
bulk Si
SiO2
Polysilicon
n+
D
1
S
CMOS VLSI Design
Fabrication and Layout Slide 9
pMOS Transistor
 Similar, but doping and voltages reversed
– Body tied to high voltage (VDD)
– Gate low: transistor ON
– Gate high: transistor OFF
– Bubble indicates inverted behavior
SiO2
n
Gate
Source Drain
bulk Si
Polysilicon
p+ p+
CMOS VLSI Design
Fabrication and Layout Slide 10
Power Supply Voltage
 GND = 0 V
 In 1980’s, VDD = 5V
 VDD has decreased in modern processes
– High VDD would damage modern tiny transistors
– Lower VDD saves power
 VDD = 3.3, 2.5, 1.8, 1.5, 1.2, 1.0, …
CMOS VLSI Design
Fabrication and Layout Slide 11
Transistors as Switches
 We can view MOS transistors as electrically
controlled switches
 Voltage at gate controls path from source to drain
g
s
d
g = 0
s
d
g = 1
s
d
g
s
d
s
d
s
d
nMOS
pMOS
OFF
ON
ON
OFF
CMOS VLSI Design
Fabrication and Layout Slide 12
CMOS Inverter
A Y
0
1
VDD
A Y
GND
A Y
CMOS VLSI Design
Fabrication and Layout Slide 13
CMOS Inverter
A Y
0
1 0
VDD
A=1 Y=0
GND
ON
OFF
A Y
CMOS VLSI Design
Fabrication and Layout Slide 14
CMOS Inverter
A Y
0 1
1 0
VDD
A=0 Y=1
GND
OFF
ON
A Y
CMOS VLSI Design
Fabrication and Layout Slide 15
CMOS NAND Gate
A B Y
0 0
0 1
1 0
1 1
A
B
Y
CMOS VLSI Design
Fabrication and Layout Slide 16
CMOS NAND Gate
A B Y
0 0 1
0 1
1 0
1 1
A=0
B=0
Y=1
OFF
ON ON
OFF
CMOS VLSI Design
Fabrication and Layout Slide 17
CMOS NAND Gate
A B Y
0 0 1
0 1 1
1 0
1 1
A=0
B=1
Y=1
OFF
OFF ON
ON
CMOS VLSI Design
Fabrication and Layout Slide 18
CMOS NAND Gate
A B Y
0 0 1
0 1 1
1 0 1
1 1
A=1
B=0
Y=1
ON
ON OFF
OFF
CMOS VLSI Design
Fabrication and Layout Slide 19
CMOS NAND Gate
A B Y
0 0 1
0 1 1
1 0 1
1 1 0
A=1
B=1
Y=0
ON
OFF OFF
ON
CMOS VLSI Design
Fabrication and Layout Slide 20
CMOS NOR Gate
A B Y
0 0 1
0 1 0
1 0 0
1 1 0
A
B
Y
CMOS VLSI Design
Fabrication and Layout Slide 21
3-input NAND Gate
 Y pulls low if ALL inputs are 1
 Y pulls high if ANY input is 0
CMOS VLSI Design
Fabrication and Layout Slide 22
3-input NAND Gate
 Y pulls low if ALL inputs are 1
 Y pulls high if ANY input is 0
A
B
Y
C
CMOS VLSI Design
Fabrication and Layout Slide 23
CMOS Fabrication
 CMOS transistors are fabricated on silicon wafer
 Lithography process similar to printing press
 On each step, different materials are deposited or
etched
 Easiest to understand by viewing both top and
cross-section of wafer in a simplified manufacturing
process
CMOS VLSI Design
Fabrication and Layout Slide 24
Inverter Cross-section
 Typically use p-type substrate for nMOS transistor
– Requires n-well for body of pMOS transistors
– Several alternatives: SOI, twin-tub, etc.
n+
p substrate
p+
n well
A
Y
GND VDD
n+ p+
SiO2
n+ diffusion
p+ diffusion
polysilicon
metal1
nMOS transistor pMOS transistor
CMOS VLSI Design
Fabrication and Layout Slide 25
Well and Substrate Taps
 Substrate must be tied to GND and n-well to VDD
 Metal to lightly-doped semiconductor forms poor
connection called Shottky Diode
 Use heavily doped well and substrate contacts / taps
n+
p substrate
p+
n well
A
Y
GND VDD
n+
p+
substrate tap well tap
n+ p+
CMOS VLSI Design
Fabrication and Layout Slide 26
Inverter Mask Set
 Transistors and wires are defined by masks
 Cross-section taken along dashed line
GND VDD
Y
A
substrate tap well tap
nMOS transistor pMOS transistor
CMOS VLSI Design
Fabrication and Layout Slide 27
Detailed Mask Views
 Six masks
– n-well
– Polysilicon
– n+ diffusion
– p+ diffusion
– Contact
– Metal
Metal
Polysilicon
Contact
n+ Diffusion
p+ Diffusion
n well
CMOS VLSI Design
Fabrication and Layout Slide 28
Fabrication Steps
 Start with blank wafer
 Build inverter from the bottom up
 First step will be to form the n-well
– Cover wafer with protective layer of SiO2 (oxide)
– Remove layer where n-well should be built
– Implant or diffuse n dopants into exposed wafer
– Strip off SiO2
p substrate
CMOS VLSI Design
Fabrication and Layout Slide 29
Oxidation
 Grow SiO2 on top of Si wafer
– 900 – 1200 C with H2O or O2 in oxidation furnace
p substrate
SiO2
CMOS VLSI Design
Fabrication and Layout Slide 30
Photoresist
 Spin on photoresist
– Photoresist is a light-sensitive organic polymer
– Softens where exposed to light
p substrate
SiO2
Photoresist
CMOS VLSI Design
Fabrication and Layout Slide 31
Lithography
 Expose photoresist through n-well mask
 Strip off exposed photoresist
p substrate
SiO2
Photoresist
CMOS VLSI Design
Fabrication and Layout Slide 32
Etch
 Etch oxide with hydrofluoric acid (HF)
– Seeps through skin and eats bone; nasty stuff!!!
 Only attacks oxide where resist has been exposed
p substrate
SiO2
Photoresist
CMOS VLSI Design
Fabrication and Layout Slide 33
Strip Photoresist
 Strip off remaining photoresist
– Use mixture of acids called piranah etch
 Necessary so resist doesn’t melt in next step
p substrate
SiO2
CMOS VLSI Design
Fabrication and Layout Slide 34
n-well
 n-well is formed with diffusion or ion implantation
 Diffusion
– Place wafer in furnace with arsenic gas
– Heat until As atoms diffuse into exposed Si
 Ion Implanatation
– Blast wafer with beam of As ions
– Ions blocked by SiO2, only enter exposed Si
n well
SiO2
CMOS VLSI Design
Fabrication and Layout Slide 35
Strip Oxide
 Strip off the remaining oxide using HF
 Back to bare wafer with n-well
 Subsequent steps involve similar series of steps
p substrate
n well
CMOS VLSI Design
Fabrication and Layout Slide 36
Polysilicon
 Deposit very thin layer of gate oxide
– < 20 Å (6-7 atomic layers)
 Chemical Vapor Deposition (CVD) of silicon layer
– Place wafer in furnace with Silane gas (SiH4)
– Forms many small crystals called polysilicon
– Heavily doped to be good conductor
Thin gate oxide
Polysilicon
p substrate
n well
CMOS VLSI Design
Fabrication and Layout Slide 37
Polysilicon Patterning
 Use same lithography process to pattern polysilicon
Polysilicon
p substrate
Thin gate oxide
Polysilicon
n well
CMOS VLSI Design
Fabrication and Layout Slide 38
Self-Aligned Process
 Use oxide and masking to expose where n+ dopants
should be diffused or implanted
 N-diffusion forms nMOS source, drain, and n-well
contact
p substrate
n well
CMOS VLSI Design
Fabrication and Layout Slide 39
N-diffusion
 Pattern oxide and form n+ regions
 Self-aligned process where gate blocks diffusion
 Polysilicon is better than metal for self-aligned gates
because it doesn’t melt during later processing
p substrate
n well
n+ Diffusion
CMOS VLSI Design
Fabrication and Layout Slide 40
N-diffusion
 Historically dopants were diffused
 Usually ion implantation today
 But regions are still called diffusion
n well
p substrate
n+
n+ n+
CMOS VLSI Design
Fabrication and Layout Slide 41
N-diffusion
 Strip off oxide to complete patterning step
n well
p substrate
n+
n+ n+
CMOS VLSI Design
Fabrication and Layout Slide 42
P-Diffusion
 Similar set of steps form p+ diffusion regions for
pMOS source and drain and substrate contact
p+ Diffusion
p substrate
n well
n+
n+ n+
p+
p+
p+
CMOS VLSI Design
Fabrication and Layout Slide 43
Contacts
 Now we need to wire together the devices
 Cover chip with thick field oxide
 Etch oxide where contact cuts are needed
p substrate
Thick field oxide
n well
n+
n+ n+
p+
p+
p+
Contact
CMOS VLSI Design
Fabrication and Layout Slide 44
Metallization
 Sputter on aluminum over whole wafer
 Pattern to remove excess metal, leaving wires
p substrate
Metal
Thick field oxide
n well
n+
n+ n+
p+
p+
p+
Metal
CMOS VLSI Design
Fabrication and Layout Slide 45
Layout
 Chips are specified with set of masks
 Minimum dimensions of masks determine transistor
size (and hence speed, cost, and power)
 Feature size f = distance between source and drain
– Set by minimum width of polysilicon
 Feature size improves 30% every 3 years or so
 Normalize for feature size when describing design
rules
 Express rules in terms of l = f/2
– E.g. l = 0.3 mm in 0.6 mm process
CMOS VLSI Design
Fabrication and Layout Slide 46
Simplified Design Rules
 Conservative rules to get you started
CMOS VLSI Design
Fabrication and Layout Slide 47
Inverter Layout
 Transistor dimensions specified as Width / Length
– Minimum size is 4l / 2l, sometimes called 1 unit
– For 0.6 mm process, W=1.2 mm, L=0.6 mm
CMOS VLSI Design
Fabrication and Layout Slide 48
Summary
 MOS Transistors are stack of gate, oxide, silicon
 Can be viewed as electrically controlled switches
 Build logic gates out of switches
 Draw masks to specify layout of transistors
 Now you know everything necessary to start
designing schematics and layout for a simple chip!

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lec0Fab.ppt

  • 1. Introduction to CMOS VLSI Design Layout, Fabrication, and Elementary Logic Design
  • 2. CMOS VLSI Design Fabrication and Layout Slide 2 Introduction  Integrated circuits: many transistors on one chip. – Very Large Scale Integration (VLSI): very many  Metal Oxide Semiconductor (MOS) transistor – Fast, cheap, low-power transistors – Complementary: mixture of n- and p-type leads to less power  Today: How to build your own simple CMOS chip – CMOS transistors – Building logic gates from transistors – Transistor layout and fabrication  Rest of the course: How to build a good CMOS chip
  • 3. CMOS VLSI Design Fabrication and Layout Slide 3 Silicon Lattice  Transistors are built on a silicon substrate  Silicon is a Group IV material  Forms crystal lattice with bonds to four neighbors Si Si Si Si Si Si Si Si Si
  • 4. CMOS VLSI Design Fabrication and Layout Slide 4 Dopants  Silicon is a semiconductor  Pure silicon has no free carriers and conducts poorly  Adding dopants increases the conductivity  Group V: extra electron (n-type)  Group III: missing electron, called hole (p-type) As Si Si Si Si Si Si Si Si B Si Si Si Si Si Si Si Si - + + -
  • 5. CMOS VLSI Design Fabrication and Layout Slide 5 p-n Junctions  A junction between p-type and n-type semiconductor forms a diode.  Current flows only in one direction p-type n-type anode cathode
  • 6. CMOS VLSI Design Fabrication and Layout Slide 6 nMOS Transistor  Four terminals: gate, source, drain, body  Gate – oxide – body stack looks like a capacitor – Gate and body are conductors – SiO2 (oxide) is a very good insulator – Called metal – oxide – semiconductor (MOS) capacitor – Even though gate is no longer made of metal n+ p Gate Source Drain bulk Si SiO2 Polysilicon n+
  • 7. CMOS VLSI Design Fabrication and Layout Slide 7 nMOS Operation  Body is commonly tied to ground (0 V)  When the gate is at a low voltage: – P-type body is at low voltage – Source-body and drain-body diodes are OFF – No current flows, transistor is OFF n+ p Gate Source Drain bulk Si SiO2 Polysilicon n+ D 0 S
  • 8. CMOS VLSI Design Fabrication and Layout Slide 8 nMOS Operation  When the gate is at a high voltage: – Positive charge on gate of MOS capacitor – Negative charge attracted to body – Inverts a channel under gate to n-type – Now current can flow through n-type silicon from source through channel to drain, transistor is ON n+ p Gate Source Drain bulk Si SiO2 Polysilicon n+ D 1 S
  • 9. CMOS VLSI Design Fabrication and Layout Slide 9 pMOS Transistor  Similar, but doping and voltages reversed – Body tied to high voltage (VDD) – Gate low: transistor ON – Gate high: transistor OFF – Bubble indicates inverted behavior SiO2 n Gate Source Drain bulk Si Polysilicon p+ p+
  • 10. CMOS VLSI Design Fabrication and Layout Slide 10 Power Supply Voltage  GND = 0 V  In 1980’s, VDD = 5V  VDD has decreased in modern processes – High VDD would damage modern tiny transistors – Lower VDD saves power  VDD = 3.3, 2.5, 1.8, 1.5, 1.2, 1.0, …
  • 11. CMOS VLSI Design Fabrication and Layout Slide 11 Transistors as Switches  We can view MOS transistors as electrically controlled switches  Voltage at gate controls path from source to drain g s d g = 0 s d g = 1 s d g s d s d s d nMOS pMOS OFF ON ON OFF
  • 12. CMOS VLSI Design Fabrication and Layout Slide 12 CMOS Inverter A Y 0 1 VDD A Y GND A Y
  • 13. CMOS VLSI Design Fabrication and Layout Slide 13 CMOS Inverter A Y 0 1 0 VDD A=1 Y=0 GND ON OFF A Y
  • 14. CMOS VLSI Design Fabrication and Layout Slide 14 CMOS Inverter A Y 0 1 1 0 VDD A=0 Y=1 GND OFF ON A Y
  • 15. CMOS VLSI Design Fabrication and Layout Slide 15 CMOS NAND Gate A B Y 0 0 0 1 1 0 1 1 A B Y
  • 16. CMOS VLSI Design Fabrication and Layout Slide 16 CMOS NAND Gate A B Y 0 0 1 0 1 1 0 1 1 A=0 B=0 Y=1 OFF ON ON OFF
  • 17. CMOS VLSI Design Fabrication and Layout Slide 17 CMOS NAND Gate A B Y 0 0 1 0 1 1 1 0 1 1 A=0 B=1 Y=1 OFF OFF ON ON
  • 18. CMOS VLSI Design Fabrication and Layout Slide 18 CMOS NAND Gate A B Y 0 0 1 0 1 1 1 0 1 1 1 A=1 B=0 Y=1 ON ON OFF OFF
  • 19. CMOS VLSI Design Fabrication and Layout Slide 19 CMOS NAND Gate A B Y 0 0 1 0 1 1 1 0 1 1 1 0 A=1 B=1 Y=0 ON OFF OFF ON
  • 20. CMOS VLSI Design Fabrication and Layout Slide 20 CMOS NOR Gate A B Y 0 0 1 0 1 0 1 0 0 1 1 0 A B Y
  • 21. CMOS VLSI Design Fabrication and Layout Slide 21 3-input NAND Gate  Y pulls low if ALL inputs are 1  Y pulls high if ANY input is 0
  • 22. CMOS VLSI Design Fabrication and Layout Slide 22 3-input NAND Gate  Y pulls low if ALL inputs are 1  Y pulls high if ANY input is 0 A B Y C
  • 23. CMOS VLSI Design Fabrication and Layout Slide 23 CMOS Fabrication  CMOS transistors are fabricated on silicon wafer  Lithography process similar to printing press  On each step, different materials are deposited or etched  Easiest to understand by viewing both top and cross-section of wafer in a simplified manufacturing process
  • 24. CMOS VLSI Design Fabrication and Layout Slide 24 Inverter Cross-section  Typically use p-type substrate for nMOS transistor – Requires n-well for body of pMOS transistors – Several alternatives: SOI, twin-tub, etc. n+ p substrate p+ n well A Y GND VDD n+ p+ SiO2 n+ diffusion p+ diffusion polysilicon metal1 nMOS transistor pMOS transistor
  • 25. CMOS VLSI Design Fabrication and Layout Slide 25 Well and Substrate Taps  Substrate must be tied to GND and n-well to VDD  Metal to lightly-doped semiconductor forms poor connection called Shottky Diode  Use heavily doped well and substrate contacts / taps n+ p substrate p+ n well A Y GND VDD n+ p+ substrate tap well tap n+ p+
  • 26. CMOS VLSI Design Fabrication and Layout Slide 26 Inverter Mask Set  Transistors and wires are defined by masks  Cross-section taken along dashed line GND VDD Y A substrate tap well tap nMOS transistor pMOS transistor
  • 27. CMOS VLSI Design Fabrication and Layout Slide 27 Detailed Mask Views  Six masks – n-well – Polysilicon – n+ diffusion – p+ diffusion – Contact – Metal Metal Polysilicon Contact n+ Diffusion p+ Diffusion n well
  • 28. CMOS VLSI Design Fabrication and Layout Slide 28 Fabrication Steps  Start with blank wafer  Build inverter from the bottom up  First step will be to form the n-well – Cover wafer with protective layer of SiO2 (oxide) – Remove layer where n-well should be built – Implant or diffuse n dopants into exposed wafer – Strip off SiO2 p substrate
  • 29. CMOS VLSI Design Fabrication and Layout Slide 29 Oxidation  Grow SiO2 on top of Si wafer – 900 – 1200 C with H2O or O2 in oxidation furnace p substrate SiO2
  • 30. CMOS VLSI Design Fabrication and Layout Slide 30 Photoresist  Spin on photoresist – Photoresist is a light-sensitive organic polymer – Softens where exposed to light p substrate SiO2 Photoresist
  • 31. CMOS VLSI Design Fabrication and Layout Slide 31 Lithography  Expose photoresist through n-well mask  Strip off exposed photoresist p substrate SiO2 Photoresist
  • 32. CMOS VLSI Design Fabrication and Layout Slide 32 Etch  Etch oxide with hydrofluoric acid (HF) – Seeps through skin and eats bone; nasty stuff!!!  Only attacks oxide where resist has been exposed p substrate SiO2 Photoresist
  • 33. CMOS VLSI Design Fabrication and Layout Slide 33 Strip Photoresist  Strip off remaining photoresist – Use mixture of acids called piranah etch  Necessary so resist doesn’t melt in next step p substrate SiO2
  • 34. CMOS VLSI Design Fabrication and Layout Slide 34 n-well  n-well is formed with diffusion or ion implantation  Diffusion – Place wafer in furnace with arsenic gas – Heat until As atoms diffuse into exposed Si  Ion Implanatation – Blast wafer with beam of As ions – Ions blocked by SiO2, only enter exposed Si n well SiO2
  • 35. CMOS VLSI Design Fabrication and Layout Slide 35 Strip Oxide  Strip off the remaining oxide using HF  Back to bare wafer with n-well  Subsequent steps involve similar series of steps p substrate n well
  • 36. CMOS VLSI Design Fabrication and Layout Slide 36 Polysilicon  Deposit very thin layer of gate oxide – < 20 Å (6-7 atomic layers)  Chemical Vapor Deposition (CVD) of silicon layer – Place wafer in furnace with Silane gas (SiH4) – Forms many small crystals called polysilicon – Heavily doped to be good conductor Thin gate oxide Polysilicon p substrate n well
  • 37. CMOS VLSI Design Fabrication and Layout Slide 37 Polysilicon Patterning  Use same lithography process to pattern polysilicon Polysilicon p substrate Thin gate oxide Polysilicon n well
  • 38. CMOS VLSI Design Fabrication and Layout Slide 38 Self-Aligned Process  Use oxide and masking to expose where n+ dopants should be diffused or implanted  N-diffusion forms nMOS source, drain, and n-well contact p substrate n well
  • 39. CMOS VLSI Design Fabrication and Layout Slide 39 N-diffusion  Pattern oxide and form n+ regions  Self-aligned process where gate blocks diffusion  Polysilicon is better than metal for self-aligned gates because it doesn’t melt during later processing p substrate n well n+ Diffusion
  • 40. CMOS VLSI Design Fabrication and Layout Slide 40 N-diffusion  Historically dopants were diffused  Usually ion implantation today  But regions are still called diffusion n well p substrate n+ n+ n+
  • 41. CMOS VLSI Design Fabrication and Layout Slide 41 N-diffusion  Strip off oxide to complete patterning step n well p substrate n+ n+ n+
  • 42. CMOS VLSI Design Fabrication and Layout Slide 42 P-Diffusion  Similar set of steps form p+ diffusion regions for pMOS source and drain and substrate contact p+ Diffusion p substrate n well n+ n+ n+ p+ p+ p+
  • 43. CMOS VLSI Design Fabrication and Layout Slide 43 Contacts  Now we need to wire together the devices  Cover chip with thick field oxide  Etch oxide where contact cuts are needed p substrate Thick field oxide n well n+ n+ n+ p+ p+ p+ Contact
  • 44. CMOS VLSI Design Fabrication and Layout Slide 44 Metallization  Sputter on aluminum over whole wafer  Pattern to remove excess metal, leaving wires p substrate Metal Thick field oxide n well n+ n+ n+ p+ p+ p+ Metal
  • 45. CMOS VLSI Design Fabrication and Layout Slide 45 Layout  Chips are specified with set of masks  Minimum dimensions of masks determine transistor size (and hence speed, cost, and power)  Feature size f = distance between source and drain – Set by minimum width of polysilicon  Feature size improves 30% every 3 years or so  Normalize for feature size when describing design rules  Express rules in terms of l = f/2 – E.g. l = 0.3 mm in 0.6 mm process
  • 46. CMOS VLSI Design Fabrication and Layout Slide 46 Simplified Design Rules  Conservative rules to get you started
  • 47. CMOS VLSI Design Fabrication and Layout Slide 47 Inverter Layout  Transistor dimensions specified as Width / Length – Minimum size is 4l / 2l, sometimes called 1 unit – For 0.6 mm process, W=1.2 mm, L=0.6 mm
  • 48. CMOS VLSI Design Fabrication and Layout Slide 48 Summary  MOS Transistors are stack of gate, oxide, silicon  Can be viewed as electrically controlled switches  Build logic gates out of switches  Draw masks to specify layout of transistors  Now you know everything necessary to start designing schematics and layout for a simple chip!