basic vlsi ppt
- 1. Department of Electronics & Communication Engineering Acharya Institute of Technology, Bangalore VLSI and its Applications Jayalaxmi .H Associate Proff, AIT (jayalaxmi@acharya.ac.in)
- 2. Overview • Why Design IC ? • A Brief History • Trends in VLSI • Technical Challenges • IC manufacturing • CMOS Technology • Fabrication Technology • VLSI in everyday life • A Look into the Future VLSI : A BIRD’ S EYE - VIEW
- 3. Why build integrated Circuit? • Why Design IC ? – Higher integration •More transistors, More computing power – Smaller and faster – More reliable • Advantages of IC – Small size •Micrometer v.s. millimeter – Faster speed •Smaller parasitic resistance, capacitance, and inductance – Less power consumption •Smaller transistors
- 4. The advantageous of digital ICs over the discrete components • Size – much smaller both transistor and wires. • Speed – communication within the chips are much faster than between a chips on PCB. – High speed of circuits on-chip due to smaller size. • Power Consumption – Logic operation within the chip consumes much less power. – smaller size -> smaller parasitic capacitances and resistance -> r equire less power to drive the circuit.
- 5. Why Digital Circuits? The entire electronic age is based digital circuits! Applications & S ervices Electronics In dustry Digital circui t Industry
- 6. The First Computer: Babbage Difference Engine • Invented by: Charles Babbage • Constructed in 1832 • Built from 25,000 parts • Cost: £17,470
- 7. ENIAC - First electronic computer (1946)
- 8. Invention of the Transistor • Vacuum tubes ruled in first half of 20th century Large , expensive, power-hungry, unreliable • 1947: first point contact transistor – John Bardeen and Walter Brattain at Bell Labs
- 9. Transistor Types • Bipolar transistors – npn or pnp silicon structure – Small current into very thin base layer controls large curre nts between emitter and collector – Base currents limit integration density • Metal Oxide Semiconductor Field Effect Transistors – nMOS and pMOS MOSFETS – Voltage applied to insulated gate controls current between source and drain – Low power allows very high integration
- 10. First Integrated Circuit • Jack Kilby (Texas Instruments) invented the first integrated circuit in 19 58
- 11. • 1970’s processes usually had only nMOS transistors – Inexpensive, but consume power while idle • 1980s-present: CMOS processes for low idle power MOS Integrated Circuits Intel 1101 256-bit SRAM Intel 4004 4-bit mProc
- 12. • CMOS remains the driving techn ology • A lot of chip area is memory • Very little is completely custom • Many blocks synthesized from V HDL or Verilog • Transistor count for Pentium 4 ~ 50 million • Currently implemented at 65nm t echnology node Modern Processors Intel Pentium 4
- 13. Digital Systems • Impact of Digital Systems on society. - Instrumentation. - Control System. - Data Manipulation. - Signal Processing. - Telecommunication.
- 14. Digital Electronics Technology • World is Digital
- 15. Digital System A digital system is an electronic network that processes i nformation using only digits (numbers) to implement c alculations & operations. Classification: • System Design. • Logic Design. • Circuit Design.
- 16. System Design • Break the overall system into subsystems & specify th e characterstics of each subsystems. • Example: System design of a Digital Computer. -Number & type of memory units. -Arithmetic unit. -Input and Output unit. -Control Unit.
- 17. Logic Design • This involves determining how to interconnect basic b uilding blocks to perform a specific function. • Example: Interconnecting gates & Flip Flops to perform binary addition.
- 18. Circuit Design • This involves specifying the interconnection of specifi c components (Resistors,Diodes,Transistors). • Example: Interconnection of transistors to form a logic gate
- 19. Need of Digital System Design
- 20. VLSI – Past, Present and Future
- 21. Microelectronics Market Primary Market Information Systems Telecommunications Consumer Secondary Market Systems (e.g. Transportation) Manufacturing (e.g. Robots
- 22. Integrated Circuit Revolution 1958: First integrated circuit (germanium) B uilt by Jack Kilby at Texas Instruments Cont ailed five components : transistors, resistors and capacitors 2000: Intel Pentium 4 Processor Clock speed: 1.5 GHz # Transistors: 42 million Technology: 0.18μm CMOS
- 23. VLSI Trends: Moore’s Law • In 1965, Gordon Moore predicted that transistors woul d continue to shrink, allowing: – Doubled transistor density every 18-24 months – Doubled performance every 18-24 months • History has proven Moore right I’m smiling because I was right! Gordon Moore Intel Co-Founder and Chairmain Emeritus Image source: Intel Corporation www.intel.com
- 24. Moore’s Law Year Transistors 4004 8008 8080 8086 80286 Intel386 Intel486 Pentium Pentium Pro Pentium II Pentium III Pentium 4 1,000 10,000 100,000 1,000,000 10,000,000 100,000,000 1,000,000,000 1970 1975 1980 1985 1990 1995 2000 Integration Levels SSI: 10 gates MSI: 1000 gates LSI: 10,000 gates VLSI: > 10k gates
- 25. Frequency Lead Microprocessors frequency doubles every 2 years P6 Pentium ® proc 486 386 28680868085 8080 8008 4004 0.1 1 10 100 1000 10000 1970 1980 1990 2000 2010 Year Frequency(Mhz) Doubles every 2 years
- 26. Evolution in IC Complexity
- 27. 1) SSI – Small Scale Integration (1 – 10 logic gates) 2) MSI – Medium Scale Integration (10-100 gates) logic functions, counters 3) LSI – Large Scale Integration (Up to 10000 gates) first microprocessors on the chip 4) VLSI – Very Large Scale Integration (above 10000 gates) now offers 64-bit microprocessors, IC Evolution
- 28. How to evaluate performance of a digital circuit (gat e, block, …)? • Cost • Reliability • Scalability • Speed (delay, operating frequency) • Power dissipation • Energy to perform a function Design Metrics
- 29. How Small Are The Transistor s? • Compare that to diameter of human hair - 56 83 86 89 92 95 98 01 04 0.1 80286 80386 486 pentium pentium II 1.0 0.2 0.3 2.0 0.05 Pentium IV 0.03 Itanium 07 Micron Sub-micron Deep-sub micron Ultra Deep-sub micron Nano mm
- 30. TREND
- 31. Complexity
- 32. How to Handle Complexity?
- 33. VLSI Design Flow Specifications X = AB ; Y = CD ;
- 34. Grand Challenges • Enhancing Performance – Along with power dissipation in high end applications – Leakage power in low power applications • Cost effective manufacturing – Reduce manufacturing costs – Make reliable chips => Increase Yield
- 36. Major Roadblocks Predicted Wire Delay PowerVariability Soft Errors
- 37. Designer’s Dilemma Area Cost of the die. Power Portable application – PCS, wireless, etc. Speed State-of-the-art microprocessors, communications, etc. ? Yield Manufacturability
- 38. Low Power Design • Standby Power: Drain leakage will increase as VT de creases to maintain noise margins and meet frequency demands, leading to excessive battery draining standb y power consumption. Year 2002 2005 2008 2011 2014 Power supply Vdd (V) 1.5 1.2 0.9 0.7 0.6 Threshold VT (V) 0.4 0.4 0.35 0.3 0.25 8KW 1.7KW 400W 88W 12W 0% 10% 20% 30% 40% 50% 2000 2002 2004 2006 2008 StandbyPower …and phones leaky!
- 39. How Chips Have Shrunk • 1946 in UPenn • Measured in cubic ft.
- 40. 7.44 mm x 5.29 mm 0.5 technology ENIAC on a Chip • 1997 • 174,569 Transistor s m
- 41. What is common to all these end-e quipment? They all power the Com munications and Interne t Age They are strongly driven by developments in Sem iconductors and...
- 42. VLSI Evolution 1 computer/ group of peopl e MAINFRAME PERSONAL COMPUTER 1 computer/ person INTERNET Few computers/ home MOBILE INTERNET Many computers/ person 1970 1980 1990 2000
- 43. IC manufacturing • IC design flow overview
- 44. IC manufacturing • VLSI design Funnel
- 48. Summary of VLSI Design Flow ENTRY SYNTHESIS VERIFICATION QUALITY TEST
- 49. VLSI Design Cycle System Specification Architectural Design Logic Design Circuit Design Physical Design Functional Design Fabrication Packaging
- 50. MOS Transistor • MOS Metal Oxide Silicon – NMOS n-type transistor MOS – PMOS p-type Transistor MOS – CMOS complementary MOS
- 51. N Transistor Structure Review
- 52. Key feature: transistor length L 2002: L=130nm 2003: L=90nm 2005: L=65nm? P Transistor Structure Review
- 56. 1971 1979 1989 1981 10 µm technol ogy 3 µm technology 1.5 µm technology 0.8 µm technology What is Fabrication Technology?
- 57. FABRICATION UNIT
- 58. Patterning of SiO2 – Cross Section Si-substrate Si-substrate Si-substrate (a) Silicon base material (b) After oxidation and deposition of negative photoresist (c) Stepper exposure Photoresist SiO 2 UV-light Patterned optical mask Exposed resist SiO 2 Si-substrate Si-substrate Si-substrate SiO 2 SiO 2 (d) After development and etching of resist, chemical or plasma etch of SiO 2 (e) After etching (f) Final result after removal of resist Hardened resist Hardened resist Chemical or plasma etch
- 59. oxidation optical mask process step photoresist coatingphotoresist removal (ashing) spin, rinse, dry photoresist stepper exposure development acid etch Photo-Lithographic Process
- 61. Computer Aided Design • Why do we need CAD tool? – complexity of circuit • CAD TOOLs – Design Tool • ie. schematic drawing packages – Analysis and Verification Tool • ie. SPICE – Syntesis Tool • generate low level of abstraction
- 62. A View of the Clean room
- 63. 0.25 micron transistor (Bell Labs) poly silicide source/drain gate oxide
- 65. Example of VLSI application • Electronic system in cars. • Digital electronics control VCRs • Transaction processing system, ATM • Personal computers and Workstations • Medical electronic systems. • etc….
- 66. Applications
- 67. MP3 Player
- 68. Fabrication Steps • Start with blank wafer • Build inverter from the bottom up • First step will be to form the n-well – Cover wafer with protective layer of SiO2 (oxide) – Remove layer where n-well should be built – Implant or diffuse n dopants into exposed wafer – Strip off SiO2 p substrate
- 69. Oxidation • Grow SiO2 on top of Si wafer – 900 – 1200 C with H2O or O2 in oxidation furnace p substrate SiO2
- 70. Photoresist • Spin on photoresist – Photoresist is a light-sensitive organic polymer – Softens where exposed to light p substrate SiO2 Photoresist
- 71. Lithography • Expose photoresist through n-well mask • Strip off exposed photoresist p substrate SiO2 Photoresist
- 72. Etch • Etch oxide with hydrofluoric acid (HF) – Seeps through skin and eats bone; nasty stuff!!! • Only attacks oxide where resist has been exposed p substrate SiO2 Photoresist
- 73. Strip Photoresist • Strip off remaining photoresist – Use mixture of acids called piranah etch • Necessary so resist doesn’t melt in next step p substrate SiO2
- 74. n-well • n-well is formed with diffusion or ion implantation • Diffusion – Place wafer in furnace with arsenic gas – Heat until As atoms diffuse into exposed Si • Ion Implanatation – Blast wafer with beam of As ions – Ions blocked by SiO2, only enter exposed Si n well SiO2
- 75. Strip Oxide • Strip off the remaining oxide using HF • Back to bare wafer with n-well • Subsequent steps involve similar series of steps p substrate n well
- 76. Polysilicon • Deposit very thin layer of gate oxide – < 20 Å (6-7 atomic layers) • Chemical Vapor Deposition (CVD) of silicon layer – Place wafer in furnace with Silane gas (SiH4) – Forms many small crystals called polysilicon – Heavily doped to be good conductor Thin gate oxide Polysilicon p substrate n well
- 77. Polysilicon Patterning • Use same lithography process to pattern polysilicon Polysilicon p substrate Thin gate oxide Polysilicon n well
- 78. Self-Aligned Process • Use oxide and masking to expose where n+ dopants s hould be diffused or implanted • N-diffusion forms nMOS source, drain, and n-well co ntact p substrate n well
- 79. N-diffusion • Pattern oxide and form n+ regions • Self-aligned process where gate blocks diffusion • Polysilicon is better than metal for self-aligned gates because it doesn’t melt during later processing p substrate n well n+ Diffusion
- 80. N-diffusion cont. • Historically dopants were diffused • Usually ion implantation today • But regions are still called diffusion n well p substrate n+n+ n+
- 81. -A way of thinking which seeks changes in perceptions, concepts, and i deas through the use of formal thinking tools (Edward de Bono)