MEMS
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MEMS (Micro-Electro-Mechanical Systems) use microsensors and actuators to sense the environment and react to changes. They are revolutionizing modern medical electronics by enabling handheld devices to replace bulky hospital equipment. Examples include pedometers, blood pressure monitors, and glucose meters. MEMS integrate sensing, processing, and wireless transmission onto a single silicon chip using micromachining techniques. They are enabling new applications in areas like biosensing, diagnostics, and tissue engineering to provide personalized healthcare.
MEMS
- 1. MEMS. THE DRIVING FORCE FOR REVOLUTIONIZING MODERN DAY MEDICAL ELECTRONICS. Presented by: Deepam Sahu. Roll: 001110701022. UG 4th Year. E.T.C.E. Dept. Jadavpur University. © memx.com
- 2. WHAT IS MEMS ? • Micro-electro-mechanical systems (MEMS) refer to a collection of micro-sensors and actuators that can sense its environment and have the ability to react to changes in that environment with the use of a microcircuit control. • They may include integrating antenna structures, facilitating transmission of command signals into micro- electro-mechanical structures for desired sensing and actuating functions. MEMS are made up of components having dimensions in range of 1- 10 µm. Their overall dimensions range from 20 µm to 1 mm. © memx.com
- 3. BASIC STRUCTURE OF MEMS. MEMS is fabricated using silicon micromachining techniques which refers to fashioning microscopic mechanical parts out of silicon substrate or on a silicon substrate. A typical MEMS is SIP (System in Package) IC, usually consisting of two parts. • The first part is the micro-sensor that collects the data from the environment. • The second part is the central unit, responsible for processing the data, collected by the sensor. In addition, there may be integrated antenna structures, responsible for transmitting data and receiving commands for proper functioning. © analog.com
- 4. The micro-sensors in MEMS may be based on different sensing principles; • Piezoresistive Sensing: Piezoresistive sensing uses the resistors varying with the external pressing to measure such physical parameters as pressure, force, etc. • Capacitive Sensing: Capacitive sensing uses the diaphragm deformation–induced capacitance change to convert the information of pressure, force, etc., into the electrical signals such as changes of oscillation frequency, charge, and voltages. • Piezoelectric Sensing: Piezoelectric sensing is based on the piezoelectric effect of piezoelectric materials. The electrical charge change is generated when a force is applied across the face of a piezoelectric film. • Resonant Sensing: Resonant sensing principle is based on the fact that the resonant frequency of a resonator varies with the strain (stress) generated in the resonator structure. By picking up the natural frequency variation of the resonator, the physical information that caused the strain will be sensed.
- 5. MEMS: REVOLUTIONIZING THE PERSONAL HEALTHCARE SCENARIO. Bulky and centralized hospital equipments now have a new substitute – handheld personalized healthcare equipments. MEMS is all set to give healthcare a new definition. Some typical applications of MEMS in Healthcare are pedometer, blood pressure monitors, Glucometers, hearing aids etc. MEMS can also be used in complex procedures such as DNA Analysis.
- 6. APPLICATION OF MEMS IN PEDOMETER. ©Sony Electronics. The pedometer function is one of the most useful functions in many of the wearable electronic devices available today. Almost all the smart bands, emerging nowadays, take help of MEMS, such as gyroscopes and accelerometers, to measure the distance and the number of steps. Most pedometers use a 3-axis accelerometer that senses motion along three axes: x, y and z. This data is then processed with the help of the processing unit, to calculate the number of steps and the distance travelled.
- 7. As we can see, the peaks in the chart clearly approximate the user’s steps. Unfortunately, the sensor is far from ideal and produces quite a bit of noise. This can be verified from the data, collected by the sensor of a device that’s just sitting on a desk. As an example, let’s look at the acceleration data from the X-axis generated by walking:
- 8. Obviously, the above method is not perfect. The quality of their results will depend on a number of variables, both well known and less predictable. Even the device’s position on the user’s person will affect the results. Each MEMS sensor returns data, measured along all the three orthogonal axes. Since it doesn’t know in advance the device’s physical orientation, it needs to process the data from all three axes. The most common method for processing the results is to find the average of the data of all the three axes. This method yields decent results as can be seen from the graph below: acceleration time
- 9. BIO-MEMS. Bio-MEMS is an abbreviation for biomedical (or biological) micro-electro-mechanical systems. A broad definition for bio-MEMS can be used to refer to the science and technology of operating at the micro-scale for biological and biomedical applications, which may or may not include any electronic or mechanical functions. Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics. Bio-MEMS may be fabricated on a wide variety of substrates like paper, silicon, glass, plastic, polymers, biological materials, depending on its compatibility with fabrication technique as well as point of application. © ST Microelectronics
- 10. Bio-MEMS as Miniaturized Biosensors: Biosensors are devices that consist of a biological recognition system, called the bio-receptor, and a transducer. The interaction of the analyte with the bio-receptor causes an effect that the transducer can convert into a measurement, such as an electrical signal. The most common bio-receptors used are based on antibody-antigen interactions, enzymatic interactions, cellular interactions, etc. Bio-MEMS for diagnostics: Bio-MEMS have been developed to take saliva, blood, or urine samples and in an integrated approach, perform sample preconditioning, sample fractionation, signal amplification, analyte detection, data analysis, and result display. Bio-MEMS in tissue engineering: Bio-MEMS have been extensively used in tissue engineering to provide precise control over the factors that optimize the culture and growth of cells and tissues.
- 11. LAB ON A CHIP: With the advancement of MEMS technology, the concept of “Lab on a Chip” (LOCs) has become the backbone of personal healthcare. • Lab on a Chip(LOC) is a device that integrates one or several laboratory functions on a single chip of only millimetres to a few square centimetres in size. • These devices are usually fabricated using photolithographic techniques, and consist of separate compartments for collection, manipulation, testing of bodily fluids. • The Bio-MEMS in the LOC are responsible for sensing the properties of the fluid and converting them into corresponding electrical signals to be analysed by the processing unit. The data collected can then be either displayed or sent to database with the help of Bluetooth technology. © ST Microelectronics
- 12. Advantages of LOCs: Low fluid volumes consumption which means less waste, lower reagents costs and less required sample volumes for diagnostics. Faster analysis and response times due to short diffusion distances, fast heating, high surface to volume ratios and small heat capacities. Better process control because of a faster response of the system. Compactness of the systems due to integration of much functionality and small volumes. Lower fabrication costs, allowing cost-effective disposable chips, fabricated in mass production. The most common examples of LOCs, used in personal healthcare include blood glucose meters, blood cell count detectors, infectious antigen detectors, etc. Because of faster response times of LOCs, timely diagnosis of abnormalities in the human body are possible, thus providing efficient treatment of the condition.
- 13. FUTURE ASPECTS: • MEMS has opened many new avenues for healthcare. MEMS has made it possible to monitor the patients in real time without admitting them in the Hospitals. • With the advancement of connectivity and software, MEMS have also paved the way for collection, transmission, and processing of health related data of an individual. • Depending on the nature of the data collected over a considerable period of time, it has been possible to diagnose any bodily abnormalities at an early stage. • The advancement of semiconductor fabrication industry has played an important factor in reducing the cost of MEMS. As a result, we can expect more use of MEMS in providing cost effective treatment to patients, especially for those residing in developing countries.
- 14. REFERENCES: • Medical Electronics design: MEMS in healthcare. • “Counting Steps with MEMS” by Dmitry Elyuseev. • “MEMS for Biomedical Application” by Shekhar Bhansali. • www.interacademies.net. • www.memx.com. • www.st.com. • www.analog.com. • www.Wikipedia.org.