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VLSI
• What is VLSI?
    – “Very Large Scale Integration”

•   Single Transistor-----------------------------1958
•   SSI – Small-Scale Integration (0-102)---1960
•   MSI – Medium-Scale Integration (102-103)---1967
•   LSI – Large-Scale Integration (103-105)---1972
•   VLSI – Very Large-Scale Integration (105-107)---1978
•   ULSI – Ultra Large-Scale Integration (>=107)---1989
•   GSI _ Giant Scale Integration (>=109)---2000

*Where these are given as no of transistors.
ENIAC - The first electronic computer
                    (1946)




Digital Integrated Circuits   Introduction   © Prentice Hall 1995
Integration Level Trends




   Obligatory historical Moore’s law plot
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Example: Intel Processor Sizes
Silicon Process   1.5µ   1.0µ      0.8µ          0.6µ      0.35µ 0.25µ
Technology
 Intel386TM DX
 Processor

 Intel486TM DX
 Processor


  Pentium® Processor


  Pentium® Pro &
  Pentium® II Processors
                           Source: http://www.intel.com/
Why monolithic Integration?
•Less area/volume, compact size
•Less power consumption
•Less testing requirement at sys level
•Higher reliability, due to improved on chip
interconnects & elimination of soldered
joints.
•Higher speed, reduced int length & abs of
parasitic capacitance.
•Less cost and easy to handle
IC Products

•   Processors
    – CPU, DSP, Controllers
•   Memory chips
    – RAM, ROM, EEPROM
•   Analog
    – Mobile communication,
      audio/video processing
•   Programmable
    – PLA, FPGA
•   Embedded systems
    – Used in cars, factories
    – Network cards
•   System-on-chip (SoC)

                                      Images: amazon.com
What is an IC?


• It is a miniature, low cost electronic device
  consisting of active and passive
  components those are irreparably joined
  together on a single crystal chip.
What is “CMOS VLSI”?
• MOS = Metal Oxide Semiconductor (This used
  to mean a Metal gate over Oxide insulation)

• Now we use polycrystalline silicon which is
  deposited on the surface of the chip as a gate.
  We call this “poly” or just “red stuff” to
  distinguish it from the body of the chip, the
  substrate, which is a single crystal of silicon.

• We do use metal (aluminum) for
  interconnection wires on the surface of the
  chip.
• Integrated Circuits/MEMs
                Hierarchy of various technology
                    Semiconductor process

            Silicon                               GaAs




Bipolar               Unipolar          Bipolar          Unipolar


          ECL
                  NMOS           PMOS



                         CMOS
          TTL
• Selection of processing technology is a
  trade off among Operating speed, Chip
  area, Power dissipation.
• 1980------2mic.m tech-------64Kb per chip
• 1990------.5---------------------16Mb
• 1995------.25--------------------256Mb
• 2000------.18--------------------1Gb
• 2005------.15--------------------4Gb
• 2010------.08---------------------64Gb
VLSI Design Methodology

•   Full custom Design style
•   Semi custom Design style
•   Frontend Designer
•   Backend Designer
VLSI design flow--Y chart (D.GJASKI)
Top-down & bottom-up approach

                                                           SYSTEM




                                                           MODULE
                              +

                                                             GATE


                                                           CIRCUIT



                                                           DEVICE
                                                       G
                                                 S                 D
                                                  n+          n+


Digital Integrated Circuits       Introduction               © Prentice Hall 1995
FLOW CHART FOR VLSI DESIGN FLOW




        Functional design

         Fun verification

          Logic design

        Logic verification

           Ckt design

         Ckt verification
Layout design


Layout verification



 Fabrication &
   Testing
Chips
• Integrated circuits consist of:
  – A small square or rectangular “die”, < 1mm thick
     • Small die: 1.5 mm x 1.5 mm => 2.25 mm 2
     • Large die: 15 mm x 15 mm => 225 mm 2
  – Larger die sizes mean:
     • More logic, memory
     • Less volume
     • Less yield
  – Dies are made from silicon (substrate)
     • Substrate provides mechanical support and
       electrical common point
Advancements over the years




• © Intel 4004       • © Intel P4
  Processor            Processor
• Introduced in      • Introduced in 2000
  1971               • 40 Million
• 2300 Transistors     Transistors
• 108 KHz Clock      • 1.5GHz Clock
Intel 4004 Microprocessor
Intel Pentium (IV) Microprocessor
System Design Pyramid
Photolithography and
            Patterning
• Photo-litho-graphy: latin: light-stone-writing
• Photolithography: an optical means for transferring patterns
onto a substrate.
• Patterns are first transferred to a photoresist layer.
•Typically a wafer is about 8-10 inches in diameter.
Individual ICs are placed inside it.
Photoresist is a liquid film that is spread out onto a
substrate, exposed with a desired pattern, and
developed into a selectively placed layer for subsequent
processing.

• Photolithography is a binary pattern transfer: there is
no gray-scale, color, nor depth to the image.
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Steps
• Photo resist Coating (covering)
A light sensitive organic polymer (plastic)

• Mask/ Reticle formation

• Exposure to light (UV/X-RAY/E-BEAM)
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WHAT IS A PHOTOMASK?

Photomasks are high precision plates containing microscopic
images of
electronic circuits. Photomasks are made from very flat pieces
of quartz or glass with a layer of chrome on one side. Etched
in the chrome is a portion of an electronic circuit
design. This circuit design on the mask is also called
geometry.
The Resist
The first step is to coat the Si/SiO2 wafer with a film of a
light sensitive material, called a resist.
                         Solvent Evaporates




A resist must also be capable of high fidelity recording of the
pattern (resolution) and durable enough to survive later
process steps
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Photolithography
                                  Energy

                                                         Mask + Aligner

                                                        Photoresist
                                                        Wafer


Energy             -   causes (photo)chemical reactions that modify resist
dissolution rate
Mask - blocks energy transmission to some areas of the resist
Aligner- aligns mask to previously exposed layers of the overall design
Resist - records the masked pattern of energy
Next Generation Lithography
In 1996, five technology options were proposed for the
130 nm gate length technology:


   •X-ray proximity Lithography (XPL)
   •Extreme Ultraviolet (EUV)
   •Electron Projection Lithography (EPL)
   •Ion Projection Lithography (IPL)
   •Direct-write lithography (EBDW).


These options were referred to as the next generation
lithography.
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MOSFET Design Rules

• Lambda based design Rule




• Micron Rule
Minimum width and Spacing
Layer            Value
Poly             2L
Active           3L
N select         3L
Metal            3L
Stick Diagrams

Metal

  poly

 ndiff

 pdiff
                          Can also draw
                           in shades of
                          gray/line style.
• Wiring Tracks
• A wiring track is the space required for a
  wire
  – 4 λ width, 4 λ spacing from neighbor = 8 λ
    pitch
• Transistors also consume one wiring track
• Well spacing
• Wells must surround transistors by 6 λ
  – Implies 12 λ between opposite transistor
    flavors
  – Leaves room for one wire track
Stick Diagrams


    Basic Circuit Layout
    VDD
                                         VDD
                                   X


                                   X
x                              x          x
          x       Stick
                  Diagra           X
                    m

                                   X


    Gnd                            Gnd
Stick Diagrams


      Layout Diagrams

    VDD
                                         VDD
                                   X


                                   X
x                              x          x
          x                        X



                                   X


    Gnd                            Gnd
Example: Inverter
MOSFET Arrays and AOI Gates
         A       B       C



 x                               y


             A   B   C


                             y




     x
Parallel Connected MOS Patterning


        x                   x
    A       B
                        A       B


                    X       X       X

                y
                                        y
Alternate Layout Strategy

         x
                             x


                         X       X

A                B
                     A               B
                         X       X



             y               y
MOSFET Arrays and AOI Gates
              NAND2 Layout


 Vp           Vp


                        X        X       X
               a.b


Gnd
                                             a.b
      a   b
                        X                X

                             a       b
               Gnd
NOR2 Layout
                Vp
 Vp

                         X           X


              a+ b
                     a                   a +b

      a   b                  X
Gnd                      X           X
                                 b
                 Gnd
Stick Diagrams




                 Power




     A              Out




     C

     B


                 Ground
Cells, Libraries, and Hierarchical
                  Design
• Creation of a Cell Library

                               VDD

       X                   X


x      X         x         X
                                     x   x
                 X
       X                   X



       X                   X


           Gnd
VDD
                     X
    X   X       X


a               xX
                     X
                           a.b
                     X


    X           X
                     X
                         a.b
            b
                         Gnd
VDD

                           X
      X            X


                       x
                           X
                               a+b
  a                        X
                  a +b

      X   X        X       X
              b
Gnd
• Cell Placement
• System Hierarchy (MOSFET-Gates-F/Fs-
  Registers-Networks-Systems)
• Floorplans and Interconnect Wiring
• Y= (# of Good Chips/Total No)*100%
• Y=Yield
• ‘Y’ depends on total area=A, and no of
  defects=D,

     − AD
• Y=e       *100%
Interconnects
•   Place and Route Algorithm.
•   Wiring Delay
•   td=kl2
•   l=length of inter connect.
      td

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Vlsi giet

  • 2. • What is VLSI? – “Very Large Scale Integration” • Single Transistor-----------------------------1958 • SSI – Small-Scale Integration (0-102)---1960 • MSI – Medium-Scale Integration (102-103)---1967 • LSI – Large-Scale Integration (103-105)---1972 • VLSI – Very Large-Scale Integration (105-107)---1978 • ULSI – Ultra Large-Scale Integration (>=107)---1989 • GSI _ Giant Scale Integration (>=109)---2000 *Where these are given as no of transistors.
  • 3. ENIAC - The first electronic computer (1946) Digital Integrated Circuits Introduction © Prentice Hall 1995
  • 4. Integration Level Trends Obligatory historical Moore’s law plot
  • 6. Example: Intel Processor Sizes Silicon Process 1.5µ 1.0µ 0.8µ 0.6µ 0.35µ 0.25µ Technology Intel386TM DX Processor Intel486TM DX Processor Pentium® Processor Pentium® Pro & Pentium® II Processors Source: http://www.intel.com/
  • 7. Why monolithic Integration? •Less area/volume, compact size •Less power consumption •Less testing requirement at sys level •Higher reliability, due to improved on chip interconnects & elimination of soldered joints. •Higher speed, reduced int length & abs of parasitic capacitance. •Less cost and easy to handle
  • 8. IC Products • Processors – CPU, DSP, Controllers • Memory chips – RAM, ROM, EEPROM • Analog – Mobile communication, audio/video processing • Programmable – PLA, FPGA • Embedded systems – Used in cars, factories – Network cards • System-on-chip (SoC) Images: amazon.com
  • 9. What is an IC? • It is a miniature, low cost electronic device consisting of active and passive components those are irreparably joined together on a single crystal chip.
  • 10. What is “CMOS VLSI”? • MOS = Metal Oxide Semiconductor (This used to mean a Metal gate over Oxide insulation) • Now we use polycrystalline silicon which is deposited on the surface of the chip as a gate. We call this “poly” or just “red stuff” to distinguish it from the body of the chip, the substrate, which is a single crystal of silicon. • We do use metal (aluminum) for interconnection wires on the surface of the chip.
  • 11. • Integrated Circuits/MEMs Hierarchy of various technology Semiconductor process Silicon GaAs Bipolar Unipolar Bipolar Unipolar ECL NMOS PMOS CMOS TTL
  • 12. • Selection of processing technology is a trade off among Operating speed, Chip area, Power dissipation. • 1980------2mic.m tech-------64Kb per chip • 1990------.5---------------------16Mb • 1995------.25--------------------256Mb • 2000------.18--------------------1Gb • 2005------.15--------------------4Gb • 2010------.08---------------------64Gb
  • 13. VLSI Design Methodology • Full custom Design style • Semi custom Design style • Frontend Designer • Backend Designer
  • 14. VLSI design flow--Y chart (D.GJASKI)
  • 15. Top-down & bottom-up approach SYSTEM MODULE + GATE CIRCUIT DEVICE G S D n+ n+ Digital Integrated Circuits Introduction © Prentice Hall 1995
  • 16. FLOW CHART FOR VLSI DESIGN FLOW Functional design Fun verification Logic design Logic verification Ckt design Ckt verification
  • 17. Layout design Layout verification Fabrication & Testing
  • 18. Chips • Integrated circuits consist of: – A small square or rectangular “die”, < 1mm thick • Small die: 1.5 mm x 1.5 mm => 2.25 mm 2 • Large die: 15 mm x 15 mm => 225 mm 2 – Larger die sizes mean: • More logic, memory • Less volume • Less yield – Dies are made from silicon (substrate) • Substrate provides mechanical support and electrical common point
  • 19. Advancements over the years • © Intel 4004 • © Intel P4 Processor Processor • Introduced in • Introduced in 2000 1971 • 40 Million • 2300 Transistors Transistors • 108 KHz Clock • 1.5GHz Clock
  • 21. Intel Pentium (IV) Microprocessor
  • 23. Photolithography and Patterning • Photo-litho-graphy: latin: light-stone-writing • Photolithography: an optical means for transferring patterns onto a substrate. • Patterns are first transferred to a photoresist layer. •Typically a wafer is about 8-10 inches in diameter. Individual ICs are placed inside it.
  • 24. Photoresist is a liquid film that is spread out onto a substrate, exposed with a desired pattern, and developed into a selectively placed layer for subsequent processing. • Photolithography is a binary pattern transfer: there is no gray-scale, color, nor depth to the image.
  • 28. Steps • Photo resist Coating (covering) A light sensitive organic polymer (plastic) • Mask/ Reticle formation • Exposure to light (UV/X-RAY/E-BEAM)
  • 31. WHAT IS A PHOTOMASK? Photomasks are high precision plates containing microscopic images of electronic circuits. Photomasks are made from very flat pieces of quartz or glass with a layer of chrome on one side. Etched in the chrome is a portion of an electronic circuit design. This circuit design on the mask is also called geometry.
  • 32. The Resist The first step is to coat the Si/SiO2 wafer with a film of a light sensitive material, called a resist. Solvent Evaporates A resist must also be capable of high fidelity recording of the pattern (resolution) and durable enough to survive later process steps
  • 35. Photolithography Energy Mask + Aligner Photoresist Wafer Energy - causes (photo)chemical reactions that modify resist dissolution rate Mask - blocks energy transmission to some areas of the resist Aligner- aligns mask to previously exposed layers of the overall design Resist - records the masked pattern of energy
  • 36. Next Generation Lithography In 1996, five technology options were proposed for the 130 nm gate length technology: •X-ray proximity Lithography (XPL) •Extreme Ultraviolet (EUV) •Electron Projection Lithography (EPL) •Ion Projection Lithography (IPL) •Direct-write lithography (EBDW). These options were referred to as the next generation lithography.
  • 38. MOSFET Design Rules • Lambda based design Rule • Micron Rule
  • 39. Minimum width and Spacing Layer Value Poly 2L Active 3L N select 3L Metal 3L
  • 40. Stick Diagrams Metal poly ndiff pdiff Can also draw in shades of gray/line style.
  • 41. • Wiring Tracks • A wiring track is the space required for a wire – 4 λ width, 4 λ spacing from neighbor = 8 λ pitch • Transistors also consume one wiring track
  • 42. • Well spacing • Wells must surround transistors by 6 λ – Implies 12 λ between opposite transistor flavors – Leaves room for one wire track
  • 43. Stick Diagrams Basic Circuit Layout VDD VDD X X x x x x Stick Diagra X m X Gnd Gnd
  • 44. Stick Diagrams Layout Diagrams VDD VDD X X x x x x X X Gnd Gnd
  • 46. MOSFET Arrays and AOI Gates A B C x y A B C y x
  • 47. Parallel Connected MOS Patterning x x A B A B X X X y y
  • 48. Alternate Layout Strategy x x X X A B A B X X y y
  • 49. MOSFET Arrays and AOI Gates NAND2 Layout Vp Vp X X X a.b Gnd a.b a b X X a b Gnd
  • 50. NOR2 Layout Vp Vp X X a+ b a a +b a b X Gnd X X b Gnd
  • 51. Stick Diagrams Power A Out C B Ground
  • 52. Cells, Libraries, and Hierarchical Design • Creation of a Cell Library VDD X X x X x X x x X X X X X Gnd
  • 53. VDD X X X X a xX X a.b X X X X a.b b Gnd
  • 54. VDD X X X x X a+b a X a +b X X X X b Gnd
  • 55. • Cell Placement • System Hierarchy (MOSFET-Gates-F/Fs- Registers-Networks-Systems) • Floorplans and Interconnect Wiring • Y= (# of Good Chips/Total No)*100% • Y=Yield • ‘Y’ depends on total area=A, and no of defects=D, − AD • Y=e *100%
  • 56. Interconnects • Place and Route Algorithm. • Wiring Delay • td=kl2 • l=length of inter connect. td

Editor's Notes

  • #9: Datapath is the “computational unit” of a processor Digital Signal Processing (DSP) chips are used all over the place: audio, image processing, satellite applications, etc. Memory performance always behind CPU speed, greater need for more capacity, bandwidth Network processors: low-cost, versatile, fast designs needed for the increasing internet applications, protocols, etc.
  • #21: introduced in 1971 versus 8086 introduced in 1978 1 MHz clock rate 10 MHz clock rate 5volt VDD (?) 5volt VDD 10 micron (?) 3 micron 5K transistors (?) 29K transistors
  • #22: P5 introduced in 1994 versus P6 (Pentium Pro) in 1996 75 to 100 MHz clock rate 150 to 200 MHz clock rate 91 mm**2 196 mm**2 3.3M transistors 5.5M transistors (1M in cache) (external cache) 0.35 micron 0.35 micron 4 layers metal 4 layers metal 3.3volt VDD 3.3volt VDD &gt;20W typical power dissipation 387 pins