Wireless sensor networks consist of distributed nodes that monitor physical environments through measuring temperature, pressure, and humidity. Each node contains sensors, a power source, radio, and electronic brain to process and communicate data. Wireless sensor networks use MEMS technology, which are tiny integrated devices or systems that combine electrical and mechanical components manufactured at the micrometer scale. MEMS can be used as pressure sensors, accelerometers, and chemical sensors in wireless sensor networks to monitor various environments and applications such as healthcare, pollution, forests fires, and landslides.